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SEMI P10-0705 © SEMI 1990, 2005 56 <xs:attribute name="p10Start" type="xs:string" use="required" fixed="StartOpcDefinition"/> <xs:attribute name="p10End" type=&q…

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SEMI P10-0705 © SEMI 1990, 2005 55
</xs:sequence>
<xs:element name="CdVerticalLocation" type="XYType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdXySite"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdXySite"/>
</xs:complexType>
<xs:complexType name="CdIsoDenseDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdIsoGroup" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdDenseGroup" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdIsoDenseTolerance"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdIsoDenseReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdIsoDenseDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdIsoDenseDefinition"/>
</xs:complexType>
<xs:complexType name="OpcDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcType" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="OpcMinimumFeatureSize"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcMinimumGap"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcPatternSeparate"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpcPatternModifiable"
type="xs:boolean"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
SEMI P10-0705 © SEMI 1990, 2005 56
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartOpcDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndOpcDefinition"/>
</xs:complexType>
<xs:complexType name="DefectDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectQualityId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="VisualInspectionOk"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="VisualInspectionReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="VisualInspCriteria"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="AutoInspectionReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DieToDieInspection"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSize" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeCl" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDk" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeClAdj" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeClAdjRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkAdj" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkAdjRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeClIso" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 57
<xs:element name="DefectSizeClIsoRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkIso" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkIsoRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectDensity" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectCount" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectCountRep" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieDensity"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieCount"
type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieCountRep"
type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PercentDefectiveDie"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EdgeRoughness" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="InspectionArea" type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="InspectionAreaExclude"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchSizeFront"
type="xs:double"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchInspArea"
type="WindowType"/>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="ScratchInspExclude"
type="WindowType"/>
</xs:sequence>
</xs:sequence>