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SEMI P10-0705 © SEMI 1990, 2005 65 <xs:element name="PatternOptions" type="PatternOptionsType"/> </xs:sequence> <xs:sequence minOccurs="0" maxOccurs="unbounded"> …

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SEMI P10-0705 © SEMI 1990, 2005 64
<xs:element name="FigureCount" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MinimumFeatureSize"
type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="MinimumFeatureLocation"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="OpcDefinition"
type="OpcDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpticalMaskSetId"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="OpticalMaskId"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OpticalMaskTitle"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternOptions"
type="PatternOptionsType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartPatternDefinitions"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndPatternDefinitions"/>
</xs:complexType>
<xs:complexType name="CellInstanceType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternOptions"
type="PatternOptionsType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Placement" type="PlacementType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCellInstance"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCellInstance"/>
</xs:complexType>
<xs:complexType name="PatternInstanceType">
<xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 65
<xs:element name="PatternOptions"
type="PatternOptionsType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Placement" type="PlacementType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartPatternInstance"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndPatternInstance"/>
</xs:complexType>
<xs:complexType name="PlacementType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Location" type="XYType"/>
<xs:sequence minOccurs="0">
<xs:element name="SteppingDistance"
type="XYType"/>
<xs:element name="SteppingCount"
type="XYType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ArrayDiameter" type="xs:double"/>
<xs:element name="ArrayCenter" type="XYType"/>
<xs:sequence minOccurs="0">
<xs:element name="ArrayDiameterInclusive"
type="xs:boolean"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataOffset" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Dropout" type="XYType"/>
<xs:sequence minOccurs="0">
<xs:element name="ScribeTone"
type="xs:string"/>
<xs:element name="ScribeInsideCorners"
type="WindowType"/>
<xs:element name="ScribeOutsideCorners"
type="WindowType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="LocationSpec" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdMeasureDie" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartPlacement"/>
SEMI P10-0705 © SEMI 1990, 2005 66
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndPlacement"/>
</xs:complexType>
<xs:complexType name="PatternOptionsType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternFunction" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataFileSize" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataChecksum" type="xs:integer"/>
<xs:element name="DataChecksumType"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternAddressSize"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ScaleFactor" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DigitizedDataDark"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="StripeHeight" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="UnscaledPatternSize"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MfgBiasPreapplied"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="LithoModeReqd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="VirtualAddress" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurroundingTone" type="xs:string"/>
<xs:element name="SurroundingWidth"
type="xs:double"/>
<xs:element name="SurroundingHeight"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MirrorPattern" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipPlot" type="ShipPlotType"/>
</xs:sequence>