semi合集-English.pdf - 第5582页

SEMI P10-0705 © SEMI 1990, 2005 77 < x s : a t t r i b u t e n a m e = " p 1 0 E n d " t y p e = " x s : s t r i n g " u s e = " r e q u i r e d " f i x e d = " En d M a s k G r o u …

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SEMI P10-0705 © SEMI 1990, 2005 76
- < xs: com plexType>
- < xs: sequence>
< xs: elem ent nam e= "Vendor I nfo"
type
= " Ve ndorI nfoType" m inOccurs= "0 " / >
< xs: elem ent nam e= "Or der I d" type= "x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "MaskSet N a m e "
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "MaskSet V ersion"
type
= " xs:st r ing" m inOccurs= " 0 " / >
- < xs: elem ent nam e= "MaskGroupI d"
m axOccurs
= "u nbounde d">
- < xs: com plexType>
- < xs: sequence>
< xs: elem ent nam e= "Vendor I nfo"
type
= " Ve ndorI nfoType"
m inOccurs
= " 0 " / >
- < xs: elem ent nam e= "MaskI d"
m axOccurs
= "u nbounde d">
- < xs: com plexType>
- < xs: sequence>
< xs: elem ent
nam e= " M askResul
t sOpt ion s
"
type
= " M ask Re sult
sOpt ionsType
" / >
< / xs: sequence>
< xs: at t ribut e
nam e= " groupN a m e "
type
= " x s:st r ing"
use
= " requir e d" / >
< xs: at t ribut e
nam e= " p1 0 St a rt"
type
= " x s:st r ing"
use
= " requir e d"
fixed
= "Ma sk I d" / >
< xs: at t ribut e
nam e= " p1 0 End"
type
= " x s:st r ing"
use
= " requir e d"
fixed
= "En dM a sk " / >
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e "
type
= " x s:st r ing" use= " r equ ir ed" / >
< xs: at t ribut e nam e= "p1 0 St art "
type
= " x s:st r ing" use
= " required"
fixed
= "Ma sk Gr oupI d" / >
SEMI P10-0705 © SEMI 1990, 2005 77
< xs: at t ribut e nam e= "p1 0 End"
type
= " x s:st r ing" use= " r equ ir ed"
fixed
= "En dM a sk Group" / >
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string"
use
= " requir e d" fixed= "MaskSet I d" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring"
use
= " requir e d
" fixed= "EndM a sk Se t " / >
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt MaskResults" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dM a sk Result s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "M a sk Re sult sOpt ionsType
">
- < xs: sequence>
< xs: elem ent nam e= "St a t us" type= "xs:st rin g" m inOccurs= "0 "
/ >
< xs: elem ent nam e= "Vendor I nfo" type= "VendorI nfoType"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "BillingI nform a t ion"
type
= " BillingI nfor m a t ionType " m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mat er ia lsUsed"
type
= " M a t e r ialsUse dType " m inOccurs= "0 " / >
< xs: elem ent nam e= "MfgSit e Re qd" type= "xs:st r ing"
m inOccurs
= " 0
" m axOccurs= " unbounde d" / >
< xs: elem ent nam e= "MfgSit e Use d" type= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Product Type" t ype= "x s:st r ing" / >
< xs: elem ent nam e= "Product Magn ifica t ion" t ype= " x s:st ring"
/ >
< xs: elem ent nam e= "MaskNam e" type= "xs:st r ing"
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "Tit leTe xt " type= "xs:st ring" / >
< xs: elem ent nam e= " Tit leType" t ype= "xs:st r ing"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: elem ent nam e= "DueD at eTim e Com m it t e d"
type
= " xs:dat eTim e" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Ela pse dTim e Com m itt ed"
type= "xs:int ege r" m inOccurs= "0 " / >
SEMI P10-0705 © SEMI 1990, 2005 78
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Mile st one" type= "x s:string" / >
< xs: elem ent nam e= "Addit iona lMile st one I nfo"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "PeriodicUpda t e " t ype= "x s:st ring" / >
< xs: elem ent nam e= "Addit iona lMile st one I nfo"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Est im a t e dArr iva l" t ype= "x s:st r ing"
/ >
< xs: elem ent nam e= "Addit iona lMile st one I nfo"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
< xs: elem ent nam e= "Mask ShippedD a t eTim e"
type
= " x s:dat eTim e" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Fina lAudit Dat e Tim e"
type
= " x s:dat eTim e" m inOccurs= " 0 " / >
< xs: elem ent nam e= "De signRu le" type= "x s:dou ble "
m inOccurs
= " 0 " / >
- <
xs: sequence m inOccurs= "0 ">
- < xs: elem ent nam e= "W a fe r Ex posur e Da ta">
- < xs: com plexType>
- < xs: sequence>
< xs: elem ent
nam e= " W a fe rExposure N um e ricalAper a t
ure
" type= "xs:dou ble" / >
< xs: elem ent nam e= "W a fe rEx posur eSigm a "
type
= " x s:dou ble" m inOccurs= " 0 " / >
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent
nam e= " W afe rEx posureSigm a I nne r "
type
= " x s:dou ble" / >
< xs: elem ent
nam e= " W afe r Ex posur e Sigm a Out e r "
type
= " x s:dou ble" / >
< / xs: sequence
>
< xs: elem ent
nam e= " W a ferExposure I llum ina t ion"
type
= " x s:st r ing" / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e "
type
= " x s:st r ing" use= " r equ ir ed" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string"
use
= " requir e d"
fixed
= "St ar t W a ferEx posu re D a t a" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring"
use
= " requir e d"
fixed= "EndW a fe r Exposur e D a t a" / >