semi合集-English.pdf - 第5593页

SEMI P10-0705 © SEMI 1990, 2005 88 < x s : e l e m e n t n a m e = " T r a n s m i s s i o n T a r g e t " t y p e = " x s : d o u b l e " / > < x s : e l e m e n t n a m e = " T r a n s…

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SEMI P10-0705 © SEMI 1990, 2005 87
- < xs: sequence>
< xs: elem ent nam e= "Pa t t e r nGrou pI d" t ype= "x s:st r ing" / >
< xs: elem ent nam e= "Pha seShiftMea sur em ent s"
type
= " Pha se Shift M easurem e nt sType" m inOccurs= " 0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "Regist rMea su re m e nt s"
type
= " Regist r M ea su re m e nt sType" m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "Closure M easurem e nts"
type
= " Closu reM e a surem e nt sType " m inOccurs= " 0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "CdGroupM easu re m ent s"
type
= " CdGr oupM e a sur e m e n t sType " m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "CdSet Result s" t ype= " CdSe t Re sult sType"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdXyResult s" t ype= " CdXyResult sType"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdI soDen seRe su lt s"
type
= " CdI soD ense ResultsType " m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "De fect M easur em en t s"
type
= " Defe ct M e a sur e m ent sType " m inOccurs= "
0 "
m axOccurs
= "u nbounde d" / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Pa t t e r nGr oupResult s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndPa t t er nGroupResu lt s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "PhaseShift M e a sur em en t sType">
- < xs: sequence>
< xs: elem ent nam e= " Psm W a ve lengt h" type= " xs:double" / >
< xs: elem ent nam e= "Pha se Sh ift Qualit yI d" type= "xs:st ring"
m inOccurs
= " 0 " / >
- < xs: elem ent nam e= "Tr a nsm issionMea sure m e nt s"
m inOccurs
= " 0 " >
- < xs: com plexType>
- < xs: sequence>
< xs: elem ent
nam e= " Tra nsm issionM easu rem e nt Da t e"
type
= " xs:dat eTim e" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Tr a n sm issionEquipUse d"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "
Tr ansm ission M ode Used"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " Tra nsm issionM easu rem e nt File N a m e
" type= "xs:st r in g" m inOccurs= " 0 " / >
SEMI P10-0705 © SEMI 1990, 2005 88
< xs: elem ent nam e= "Tr ansm ission Ta rget "
type
= " x s:dou ble" / >
< xs: elem ent
nam e= " Tra nsm issionRe fer ence On ly"
type
= " xs:boolean" m inOccurs= "0 " / >
< xs: elem ent nam e= "Tr ansm ission Tole ra nce "
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Tr ansm issionRan ge"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Tr ansm ission Er ror "
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " M easuredTra nsm issionAve ra ge"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " M easuredTra nsm issionTole rance"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " M easuredTra nsm issionRa nge"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Tr ansm ission Ma r k Feat ure"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " Tra nsm issionM ark Loca t ionD r aw ing"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " Tra nsm issionM ark D ra w in g"
type
= " xs:st r ing" m inOccurs= "
0 " / >
- < xs: elem ent
nam e
= "Mea su re dTr a nsm issionM a rkSit e I d"
m axOccurs
= "u nbounde d">
- < xs: com plexType>
- < xs: sequence m inOccurs= " 0 ">
- < xs: elem ent
nam e
= "Tr ansm issionMark Loca t
ion
">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension
base
= "XYCoordTy
pe
">
< xs: at t ribut e
nam e= " p1 0 M
ult iValue
"
type
= " x s:in t e
ger
"
use
= " requir e
d
" fixed= "2 "
/ >
< / xs: ext ension>
< / xs: com plexCont ent
>
SEMI P10-0705 © SEMI 1990, 2005 89
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent
nam e
= "Mea su re dTr a nsm ission
Mar k Loca t ion
">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension
base
= "XYCoordTy
pe
">
< xs: at t ribut e
nam e= " p1 0 M
ult iValue
"
type
= " x s:in t e
ger
"
use
= " requir e
d
" fixed= "2 "
/ >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent
nam e= " M easuredTra nsm ission
" type= "xs:double" / >
< xs: elem ent
nam e= " M easuredTra nsm ission
Er ror
" type= "x s:double"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e "
type
= " xs:st r ing" use= " r equ ir ed" / >
< xs: at t ribut e nam e= "p1 0 St art "
type
= " xs:st r ing" use= " r equ ir ed"
fixed
= "Mea su re dTra nsm issionMa r k
Sit e I d
" / >
< xs: at t ribut e nam e= "p1 0 End"
type
= " xs:st r ing" use= " r equ ir ed"
fixed
= "EndM e a sur edTra n sm issionSi
t e
" / >
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string"
use
= " requir e d"
fixed
= "St a rt Tr a nsm issionM ea sur e m ent s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring"
use
= " requir e d"
fixed= "EndTr a nsm issionM easure m e nt s" / >