semi合集-English.pdf - 第5598页

SEMI P10-0705 © SEMI 1990, 2005 93 < x s : e l e m e n t n a m e = " Et c h D e p t h M a r k F e a t u r e " t y p e = " x s : s t r i n g " m i n Oc cu r s = " 0 " / > < x s : e l…

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SEMI P10-0705 © SEMI 1990, 2005 92
< xs: at t ribut e nam e= "p1 0 End"
type
= " x s:st r ing" use= " r equ ir ed"
fixed
= "EndMea sur edPha se Angle Sit
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" / >
< / xs: com plexType>
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use
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= " requir e d"
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use
= " requir e d"
fixed
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nam e= " M ea sure dEt chDept hRange"
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SEMI P10-0705 © SEMI 1990, 2005 93
< xs: elem ent nam e= "Et ch Dept hM ark Fe a t ur e "
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " EtchDe pt h Mar k Loca t ionD raw ing"
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< xs: elem ent nam e= "Et ch Dept hM ark D ra w in g"
type
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< / xs: ext ension>
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- < xs: elem ent
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SEMI P10-0705 © SEMI 1990, 2005 94
< / xs: elem ent>
< xs: elem ent
nam e= " M easuredEt chD ept h"
type
= " xs:dou ble" / >
< xs: elem ent
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type
= " xs:st r ing" use= " r equ ir ed"
fixed
= "Mea su re dEt chD ept hM a rkSit
eI d
" / >
< xs: at t ribut e nam e= "p1 0 End"
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fixed
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< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string"
use
= " requir e d"
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< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring"
use
= " requir e d"
fixed
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< / xs: com plexType>
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< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
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< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
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fixed
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- < xs: com plexType nam e= "Re gist rM ea su rem ent sType">
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