semi合集-English.pdf - 第5599页

SEMI P10-0705 © SEMI 1990, 2005 94 < / x s : e l e m e n t > < x s : e l e m e n t n a m e = " M e a s u r e d E t c h D e p t h " t y p e = " x s : d o u b l e " / > < x s : e l e m e …

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SEMI P10-0705 © SEMI 1990, 2005 93
< xs: elem ent nam e= "Et ch Dept hM ark Fe a t ur e "
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent
nam e= " EtchDe pt h Mar k Loca t ionD raw ing"
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< xs: elem ent nam e= "Et ch Dept hM ark D ra w in g"
type
= " xs:st r ing" m inOccurs= " 0 " / >
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n
">
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< xs: at t ribut e
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"
type
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use
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d
" fixed= "2 "
/ >
< / xs: ext ension>
< / xs: com plexCont ent>
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- < xs: elem ent
nam e
= "Mea su re dEtchDe pt h Ma
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">
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base
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type
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"
use
= " requir e
d
" fixed= "2 "
/ >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
SEMI P10-0705 © SEMI 1990, 2005 94
< / xs: elem ent>
< xs: elem ent
nam e= " M easuredEt chD ept h"
type
= " xs:dou ble" / >
< xs: elem ent
nam e= " M easuredEt chD ept hErr
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< / xs: sequence>
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type
= " xs:st r ing" use= " r equ ir ed"
fixed
= "Mea su re dEt chD ept hM a rkSit
eI d
" / >
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type
= " x s:st r ing" use= " r equ ir ed"
fixed
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use
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string"
use
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fixed
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< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring"
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= " requir e d"
fixed
= "EndEt chD e pt hM e a sur e m ent s" / >
< / xs: com plexType>
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< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
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< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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fixed
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< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dPh a se Shift M e a su r em ent s" / >
< / xs: com plexType>
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< xs: elem ent nam e= "Regist rQua lit yI d" t ype= "x s:st r ing"
m inOccurs
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< xs: elem ent nam e= "Regist rEquipReqd" t ype= "x s:st r ing"
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< xs: elem ent nam e= "EquipSit e Reqd" type= "x s:st ring"
m inOccurs
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SEMI P10-0705 © SEMI 1990, 2005 95
< xs: elem ent nam e= "Regist rRe fMet hodRe qd"
type
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/ >
< xs: elem ent nam e= "Regist rSt dGr id" type= "x s:st r ing"
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< xs: elem ent nam e= "Regist rCom pe nsa t ionTem pe r atur e"
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< xs: elem ent nam e= "EquipSit e Use d" t ype= " x s:string"
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< xs: elem ent nam e= "Regist rRe fMet hodUse d"
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< xs: elem ent nam e= "Regist rSt dGr idUse d" type= "xs:string"
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= " 0 " / >
< xs: elem ent nam e= "Regist rAlgor it hm Used" type= " x s:st ring"
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= " 0 " / >
< xs: elem ent nam e= "Regist rMea su re m e nt D a t e "
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= " xs:dat eTim e" m inOccurs= " 0 " / >
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< xs: elem ent nam e= "Regist rRefM a sk I d" type= " xs:st ring"
/ >
< xs: elem ent nam e= "Regist rRefM a sk Se t I d"
type
= " x s:st r ing" / >
< / xs: sequence>
< xs: elem ent nam e= "Regist rError" t ype= "x s:double "
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< xs: at t ribut e nam e= "p1 0 Mult iValue "
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