semi合集-English.pdf - 第5600页

SEMI P10-0705 © SEMI 1990, 2005 95 < x s : e l e m e n t n a m e = " R e g i s t r R e f M e t h o d R e q d " t y p e = " x s : s t r i n g " m i n Oc cu r s = " 0 " m a x Oc cu r s = &q…

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SEMI P10-0705 © SEMI 1990, 2005 94
< / xs: elem ent>
< xs: elem ent
nam e= " M easuredEt chD ept h"
type
= " xs:dou ble" / >
< xs: elem ent
nam e= " M easuredEt chD ept hErr
or
" type= "x s:double "
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e "
type
= " xs:st r ing" use= " r equ ir ed" / >
< xs: at t ribut e nam e= "p1 0 St art "
type
= " xs:st r ing" use= " r equ ir ed"
fixed
= "Mea su re dEt chD ept hM a rkSit
eI d
" / >
< xs: at t ribut e nam e= "p1 0 End"
type
= " x s:st r ing" use= " r equ ir ed"
fixed
= "EndM e a sur e dEt ch Dept hSit e"
/ >
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string"
use
= " requir e d"
fixed
= "St a rt Et chD ept h M easur em en t s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring"
use
= " requir e d"
fixed
= "EndEt chD e pt hM e a sur e m ent s" / >
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Pha se Shift M ea sure m e nt s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dPh a se Shift M e a su r em ent s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "Re gist rM ea su rem ent sType">
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "Regist rQua lit yI d" t ype= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rEquipReqd" t ype= "x s:st r ing"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "EquipSit e Reqd" type= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
SEMI P10-0705 © SEMI 1990, 2005 95
< xs: elem ent nam e= "Regist rRe fMet hodRe qd"
type
= " x s:st r ing" m inOccurs= " 0 " m axOccurs= "unbounded"
/ >
< xs: elem ent nam e= "Regist rSt dGr id" type= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rAlgor it hm " type= "xs:st rin g"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rCom pe nsa t ionTem pe r atur e"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Regist rEquipUsed" t ype= "xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "EquipSit e Use d" t ype= " x s:string"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rRe fMet hodUse d"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Regist rSt dGr idUse d" type= "xs:string"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rAlgor it hm Used" type= " x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rMea su re m e nt D a t e "
type
= " xs:dat eTim e" m inOccurs= " 0 " / >
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Regist rRefM a sk I d" type= " xs:st ring"
/ >
< xs: elem ent nam e= "Regist rRefM a sk Se t I d"
type
= " x s:st r ing" / >
< / xs: sequence>
< xs: elem ent nam e= "Regist rError" t ype= "x s:double "
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 ">
- < xs: elem ent nam e= "Regist rScale">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Regist rScaleRefer enceOnly"
type
= " x s:boolean" m inOccurs= "0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
- < xs: elem ent nam e= "Regist rRe sidua l">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
SEMI P10-0705 © SEMI 1990, 2005 96
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Regist rRe sidua lRe fe re nce Only"
type
= " xs:boolean" m inOccurs= "0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
- < xs: elem ent nam e= "Regist rThr ee Sigm a" >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Regist rThre e Sigm a Refer enceOnly"
type
= " x s:boolean" m inOccurs= "0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
- < xs: elem ent nam e= "Regist rResidua lThr eeSigm a ">
- < xs: com plexType
>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent
nam e= " Regist rResidua lThree Sigm a Re fere nce On ly"
type
= " xs:boolean" m inOccurs= "0 " / >
< / xs: sequence>
< xs: elem ent nam e= "Regist rTole ran ce" t ype= "xs:dou ble
"
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Regist rOrt ho" t ype= "x s:double " / >
< xs: elem ent nam e= "Regist rOrt hoRe fere nceOnly"
type
= " xs:boolean" m inOccurs= "0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Regist rRela t ive" t ype= "x s:st ring" / >