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SEMI P10-0705 © SEMI 1990, 2005 165 RELATED INFORMATION 4 SEMI PHOTOMASK MASK RESULTS DATA FILE EXAMPLE NOTICE : The information contained in this rel ated information is not an offici al part of SEMI P10, and it is not …

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SEMI P10-0705 © SEMI 1990, 2005 164
END_PATTERN_GROUP_OPTIONS PG2
LEVEL_ID 1
PATTERN_NAME SC9999X-1A-26
DIGITIZED_DATA_DARK T
START_CD DIMENSION
CD_DATA 0.8
CD_DIGITIZED T
CD_TARGET 0.8
END_CD DIMENSION
END_PATTERN_DEFINITION 1
LEVEL_ID 2
PATTERN_NAME SC9999X-1A-10
DIGITIZED_DATA_DARK F
START_CD DIMENSION
CD_DATA 0.8
CD_DIGITIZED T
CD_TARGET 0.8
END_CD DIMENSION
END_PATTERN_DEFINITION 2
END_PATTERN_GROUP PG2 !END SCRIBE GROUP
!
PATTERN_GROUP_ID PG3 !RMS ALIGNMENT MARK
PATTERN_ADDRESS_SIZE 0.5
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 2000,2000
INSPECTION_AREA -3000,-3000,3000,3000
END_PATTERN_GROUP_OPTIONS PG3
LEVEL_ID A
PATTERN_NAME GCARMSB-OX-AA
DIGITIZED_DATA_DARK F
END_PATTERN_DEFINITION A
END_PATTERN_GROUP PG3 !END ALIGNMENT MARK
!
END_MASK_GROUP PSM
END_MASK_SET 9999
END_ORDER MS9999
CHECKSUM computed checksum
SEMI P10-0705 © SEMI 1990, 2005 165
RELATED INFORMATION 4
SEMI PHOTOMASK MASK RESULTS DATA FILE EXAMPLE
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
EXAMPLE: The actual mask CD data sent by the vendor to the customer for a 4-die 5 reticle with
SHIP_CD_DATA set to TRUE. (For reference, see Related Information 2, for MASK_ID = 1.)
START_MASK_RESULTS MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 13-APR-1992, 13:00:00
MASK_SET_ID 9999 !<mask_set>
MASK_GROUP_ID 5X
MASK_ID 1
TITLE_TEXT DEVICE 9999
TITLE_TEXT DIFFUSION
START_CD_GROUP_MEASUREMENTS SPECIFICATION
CD_TARGET 10
CD_TOLERANCE 0.25
CD_RANGE 0.3
START_CD_MEASUREMENT CD_1
CD_SITE_ID CD_1
CD_LOCATION -40000,0
MEASURED_CD_SITE_ID CD_1
MEASURED_CD_LOCATION -40000.1,0.08
MEASURED_CD 9.95
END_CD_MEASUREMENT CD_1
START_CD_MEASUREMENT
CD_2
CD_SITE_ID
CD_2
CD_LOCATION 0,-40000
MEASURED_CD_SITE_ID CD_2
MEASURED_CD_LOCATION -0.07,-40000.11
MEASURED_CD 10.01
END_CD_MEASUREMENT CD_2
START_CD_MEASUREMENT CD_3
CD_SITE_ID CD_3
CD_LOCATION 0,40000
MEASURED_CD_LOCATION 0.03,39999.95
MEASURED_CD 9.98
END_CD_MEASUREMENT CD_3
START_CD_MEASUREMENT CD_4
CD_SITE_ID CD_4
CD_LOCATION 0,0
SEMI P10-0705 © SEMI 1990, 2005 166
MEASURED_CD_SITE_ID CD_4
MEASURED_CD_LOCATION 0.01,-0.04
MEASURED_CD 10.07
END_CD_MEASUREMENT CD_4
END_CD_GROUP_MEASUREMENTS SPECIFICATION
END_MASK 1
END_MASK_GROUP 5X
END_MASK_SET 9999
END_ORDER MS9999
CHECKSUM computed checksum