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SEMI P10-0705 © SEMI 1990, 2005 166 MEASURED_CD_SITE_ID CD_4 MEASURED_CD_LOCATION 0.01,-0.04 MEASURED_CD 10.07 END_CD_MEASUREMENT CD_4 END_CD_GROUP_MEASUREME NTS SPECIFICATIO N END_MASK 1 END_MASK_GROUP 5X END_MASK_SET 9…

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SEMI P10-0705 © SEMI 1990, 2005 165
RELATED INFORMATION 4
SEMI PHOTOMASK MASK RESULTS DATA FILE EXAMPLE
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
EXAMPLE: The actual mask CD data sent by the vendor to the customer for a 4-die 5 reticle with
SHIP_CD_DATA set to TRUE. (For reference, see Related Information 2, for MASK_ID = 1.)
START_MASK_RESULTS MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 13-APR-1992, 13:00:00
MASK_SET_ID 9999 !<mask_set>
MASK_GROUP_ID 5X
MASK_ID 1
TITLE_TEXT DEVICE 9999
TITLE_TEXT DIFFUSION
START_CD_GROUP_MEASUREMENTS SPECIFICATION
CD_TARGET 10
CD_TOLERANCE 0.25
CD_RANGE 0.3
START_CD_MEASUREMENT CD_1
CD_SITE_ID CD_1
CD_LOCATION -40000,0
MEASURED_CD_SITE_ID CD_1
MEASURED_CD_LOCATION -40000.1,0.08
MEASURED_CD 9.95
END_CD_MEASUREMENT CD_1
START_CD_MEASUREMENT
CD_2
CD_SITE_ID
CD_2
CD_LOCATION 0,-40000
MEASURED_CD_SITE_ID CD_2
MEASURED_CD_LOCATION -0.07,-40000.11
MEASURED_CD 10.01
END_CD_MEASUREMENT CD_2
START_CD_MEASUREMENT CD_3
CD_SITE_ID CD_3
CD_LOCATION 0,40000
MEASURED_CD_LOCATION 0.03,39999.95
MEASURED_CD 9.98
END_CD_MEASUREMENT CD_3
START_CD_MEASUREMENT CD_4
CD_SITE_ID CD_4
CD_LOCATION 0,0
SEMI P10-0705 © SEMI 1990, 2005 166
MEASURED_CD_SITE_ID CD_4
MEASURED_CD_LOCATION 0.01,-0.04
MEASURED_CD 10.07
END_CD_MEASUREMENT CD_4
END_CD_GROUP_MEASUREMENTS SPECIFICATION
END_MASK 1
END_MASK_GROUP 5X
END_MASK_SET 9999
END_ORDER MS9999
CHECKSUM computed checksum
SEMI P10-0705 © SEMI 1990, 2005 167
RELATED INFORMATION 5
SEMI PHOTOMASK ORDER EXAMPLE FOR 5X RETICLES
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
! Sample of 5X reticle order corresponding to recent practices
!
START_ORDER O555555
SEMI_REVISION P10-0704
CUSTOMER CUSTOMER NAME
VENDOR ACME PHOTOMASKS
FILE_DATE_TIME 14-Oct-2002, 10:39:26
!
MASK_SET_ID S55555
!
BUSINESS_CONTACT ORDER FROM CONTACT NAME
BUSINESS_ADDRESS ORDER FROM ADDRESS LINE1 !Use as few or as
BUSINESS_ADDRESS ORDER FROM ADDRESS LINE2 !many lines as
BUSINESS_ADDRESS ORDER FROM ADDRESS LINE3 !needed - min=1
BUSINESS_PHONE 555-555-5555
BUSINESS_FAX 555-555-5555
BUSINESS_EMAIL BUSINESS EMAIL ADDRESS
!
BILLING_CONTACT BILL CONTACT NAME
BILLING_ADDRESS BILL ADDRESS LINE1 !Use as few or as
BILLING_ADDRESS BILL ADDRESS LINE2 !many lines as
BILLING_ADDRESS BILL ADDRESS LINE3 !needed - min=1
BILLING_PHONE 555-555-5555
BILLING_FAX 555-555-5555
BILLING_EMAIL BILL EMAIL ADDRESS
!
DESIGN_RULE 0.35
PRICE_UNITS USD
!
ENGINEERING_CONTACT ENGR CONTACT NAME
ENGINEERING_ADDRESS ENGR ADDRESS LINE1 !Use as few or as
ENGINEERING_ADDRESS ENGR ADDRESS LINE2 !many lines as
ENGINEERING_ADDRESS ENGR ADDRESS LINE3 !needed - min=1
ENGINEERING_PHONE 555-555-5555
ENGINEERING_FAX 555-555-5555
ENGINEERING_EMAIL ENGR EMAIL ADDRESS
!
SHIPPING_CONTACT SHIP CONTACT NAME
SHIPPING_ADDRESS SHIP ADDRESS LINE1
SHIPPING_ADDRESS SHIP ADDRESS LINE2
SHIPPING_PHONE 555-555-5555
SHIPPING_FAX 555-555-5555
SHIPPING_EMAIL EMAIL ADDRESS
!
!
SHIPPING_METHOD COURIER NAME
SHIPPING_METHOD TERMS
!
REPAIRS_AUTHORIZED T
!
START_SHIPPABLE_DATA S1
SHIP_CD_DATA T
START_SHIP_TO S1CD ! <different shipto address>