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SEMI P10-0705 © SEMI 1990, 2005 167 RELATED INFORMATION 5 SEMI PHOTOMASK ORDER EX AMPLE FOR 5X RETICLES NOTICE : The information contained in this rel ated information is not an offici al part of SEMI P10, and it is not …

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SEMI P10-0705 © SEMI 1990, 2005 166
MEASURED_CD_SITE_ID CD_4
MEASURED_CD_LOCATION 0.01,-0.04
MEASURED_CD 10.07
END_CD_MEASUREMENT CD_4
END_CD_GROUP_MEASUREMENTS SPECIFICATION
END_MASK 1
END_MASK_GROUP 5X
END_MASK_SET 9999
END_ORDER MS9999
CHECKSUM computed checksum
SEMI P10-0705 © SEMI 1990, 2005 167
RELATED INFORMATION 5
SEMI PHOTOMASK ORDER EXAMPLE FOR 5X RETICLES
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
! Sample of 5X reticle order corresponding to recent practices
!
START_ORDER O555555
SEMI_REVISION P10-0704
CUSTOMER CUSTOMER NAME
VENDOR ACME PHOTOMASKS
FILE_DATE_TIME 14-Oct-2002, 10:39:26
!
MASK_SET_ID S55555
!
BUSINESS_CONTACT ORDER FROM CONTACT NAME
BUSINESS_ADDRESS ORDER FROM ADDRESS LINE1 !Use as few or as
BUSINESS_ADDRESS ORDER FROM ADDRESS LINE2 !many lines as
BUSINESS_ADDRESS ORDER FROM ADDRESS LINE3 !needed - min=1
BUSINESS_PHONE 555-555-5555
BUSINESS_FAX 555-555-5555
BUSINESS_EMAIL BUSINESS EMAIL ADDRESS
!
BILLING_CONTACT BILL CONTACT NAME
BILLING_ADDRESS BILL ADDRESS LINE1 !Use as few or as
BILLING_ADDRESS BILL ADDRESS LINE2 !many lines as
BILLING_ADDRESS BILL ADDRESS LINE3 !needed - min=1
BILLING_PHONE 555-555-5555
BILLING_FAX 555-555-5555
BILLING_EMAIL BILL EMAIL ADDRESS
!
DESIGN_RULE 0.35
PRICE_UNITS USD
!
ENGINEERING_CONTACT ENGR CONTACT NAME
ENGINEERING_ADDRESS ENGR ADDRESS LINE1 !Use as few or as
ENGINEERING_ADDRESS ENGR ADDRESS LINE2 !many lines as
ENGINEERING_ADDRESS ENGR ADDRESS LINE3 !needed - min=1
ENGINEERING_PHONE 555-555-5555
ENGINEERING_FAX 555-555-5555
ENGINEERING_EMAIL ENGR EMAIL ADDRESS
!
SHIPPING_CONTACT SHIP CONTACT NAME
SHIPPING_ADDRESS SHIP ADDRESS LINE1
SHIPPING_ADDRESS SHIP ADDRESS LINE2
SHIPPING_PHONE 555-555-5555
SHIPPING_FAX 555-555-5555
SHIPPING_EMAIL EMAIL ADDRESS
!
!
SHIPPING_METHOD COURIER NAME
SHIPPING_METHOD TERMS
!
REPAIRS_AUTHORIZED T
!
START_SHIPPABLE_DATA S1
SHIP_CD_DATA T
START_SHIP_TO S1CD ! <different shipto address>
SEMI P10-0705 © SEMI 1990, 2005 168
MAILING_ADDRESS 123 SOMEWHERE ELSE ST.
MAILING_ADDRESS A CITY
MAILING_ADDRESS THE STATE, THE ZIP
MAILING_ADDRESS COUNTRY
END_SHIP_TO S1CD
SHIP_DEFECT_DATA T
SHIP_THRU_PELLICLE_DATA T
SHIP_INSP_DATABASE_DATA F
SHIP_REPAIR_DATA T
SHIP_REGISTR_DATA T
END_SHIPPABLE_DATA S1
!
!
DATA_MEDIUM FTP
DATA_FILE_SIZE 12121212
DATA_PATTERN_NAME FILESNAME.01
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_WINDOW 0.0, 0.0, 34555.500, 10987.500
END_DATA_PATTERN_NAME FILESNAME.01
END_DATA_MEDIUM FTP
!
DATA_MEDIUM FTP
DATA_FILE_SIZE 12171212
DATA_PATTERN_NAME FILESNAME.02
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_WINDOW 0.0, 0.0, 34555.500, 10987.500
END_DATA_PATTERN_NAME FILESNAME.02
END_DATA_MEDIUM FTP
!
DATA_MEDIUM FTP
DATA_FILE_SIZE 13101056
DATA_PATTERN_NAME FILESNAME.03
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_WINDOW 0.0, 0.0, 34555.500, 10987.500
END_DATA_PATTERN_NAME FILESNAME.03
END_DATA_MEDIUM FTP
!
! MET2ALL
DATA_MEDIUM FTP
DATA_FILE_SIZE 13101058
DATA_PATTERN_NAME FILESNAME.04
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_WINDOW 0.0, 0.0, 34555.500, 10987.500
END_DATA_PATTERN_NAME FILESNAME.04
END_DATA_MEDIUM FTP
!
MASK_SET_NAME DEVICE NAME
ORDER_ID ORDER ID NUMBER
!
END_MASK_SET_OPTIONS S55555
!
MASK_GROUP_ID G5555
PO_NUMBER P.O. NUMBER
!
PRODUCT_TYPE RETICLE
PRODUCT_MAGNIFICATION 5X
PRODUCT_IMAGING_TYPE BINARY
!
END_MASK_GROUP_OPTIONS G5555
!
PLACEMENT_TOP_CELL TC
!