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SEMI P10-0705 © SEMI 1990, 2005 176 ! MASK_SET_NAME ABC123 MASK_SET_VERSION ABC123 ! END_MASK_SET_OPTIONS ABC123 ! MASK_G ROUP_ID UT1X_GROUP_1 END_MA SK_GROUP_OPTIONS UT1X_GROUP_1 ! PLACEMENT_TOP _CELL UT_1X_TOP_CELL ! !…

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SEMI P10-0705 © SEMI 1990, 2005 175
RELATED INFORMATION 6
SEMI PHOTOMASK ORDER EXAMPLE FOR UT1X RETICLES
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
!NOTE: Indentation is for clarity only and is not required.
!
START_ORDER ORDER11111
SEMI_REVISION P10-0704
CUSTOMER AAA CUSTOMER
VENDOR ANY VENDOR
FILE_DATE_TIME 01-Jan-2002, 12:00
OPERATOR_NAME AN OPERATOR
!
MASK_SET_ID ABC123
BILLING_CONTACT CONTACT NAME
BILLING_ADDRESS BILLING ADDRESS LINE 1
BILLING_ADDRESS BILLING ADDRESS LINE 2
PRICE_UNITS USD
SHIPPING_CONTACT CONTACT NAME
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 1
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 2
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 3
!
DATA_MEDIUM FTP
DATA_PATTERN_NAME FILENAME01.1$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME01.1$
DATA_PATTERN_NAME FILENAME01.2$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME01.2$
DATA_PATTERN_NAME FILENAME02.1$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME02.1$
DATA_PATTERN_NAME FILENAME03.50
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME03.50
DATA_PATTERN_NAME FILENAME04.50
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME04.50
DATA_PATTERN_NAME FILENAME05.S$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME05.S$
DATA_PATTERN_NAME FILENAME06.25
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME06.25
END_DATA_MEDIUM FTP
SEMI P10-0705 © SEMI 1990, 2005 176
!
MASK_SET_NAME ABC123
MASK_SET_VERSION ABC123
!
END_MASK_SET_OPTIONS ABC123
!
MASK_GROUP_ID UT1X_GROUP_1
END_MASK_GROUP_OPTIONS UT1X_GROUP_1
!
PLACEMENT_TOP_CELL UT_1X_TOP_CELL
!
!-----------MASKS-------------------------
MASK_ID 100001
MASK_NAME NAME100001
DELIVERABLE_MASK T
PO_NUMBER 123456789
RELEASE_NUMBER 987654
STATUS NEW
DUE_DATE_TIME_REQUESTED 01-Jan-2002, 10:44
PRICE 1111.0
REPAIRS_AUTHORIZED T
!
START_SHIPPABLE_DATA 1
SHIP_CD_PRINTOUT T
SHIP_DEFECT_DATA T
SHIP_REGISTR_DATA T
END_SHIPPABLE_DATA 1
!
PRODUCT_TYPE 1X_STD_FIELD_RETICLE
PRODUCT_MAGNIFICATION 1X
PRODUCT_IMAGING_TYPE BINARY
QUANTITY 1
WAFER_EXPOSURE_TOOL ULTRATECH
JOB_NAME j1000001.jb
JOB_LEVEL 1
!
START_TITLE TITLE_1
TITLE_TEXT ABC123
TITLE_TYPE DEVICE
TITLE_JUSTIFICATION L
TITLE_LOCATION -33000.0, -1000.0
MIRROR_TITLE F
ROTATE_TITLE 0
ROTATE_TITLE_CHARACTERS 0
END_TITLE TITLE_1
!
START_TITLE TITLE_2
TITLE_TEXT NAME100001
SEMI P10-0705 © SEMI 1990, 2005 177
TITLE_TYPE MASK
TITLE_JUSTIFICATION L
TITLE_LOCATION -22000.0, 1000.0
MIRROR_TITLE F
ROTATE_TITLE 0
ROTATE_TITLE_CHARACTERS 0
END_TITLE TITLE_2
!(
MIRROR_MASK T
BLANK_SIZE 5/90
BLANK_TYPE ULTE
BLANK_FLATNESS 2
MASK_COATING LOW_REFLECTIVE_CHROME
UT1X_UNCUT T
TOP_PELLICLE_TYPE Pellicle Part Number
GUIDES_REQD STANDARD
!
START_DEFECT_DEFINITION UT1X_1
GOOD_FIELDS (1 AND 2)
END_DEFECT_DEFINITION UT1X_1
!
START_DEFECT_DEFINITION PREPELL_DIE2DIE_1
AUTO_INSPECTION_REQD T
DIE_TO_DIE_INSPECTION T
DEFECT_SIZE_CL 1.0
DEFECT_SIZE_DK 1.0
DEFECT_COUNT 0
END_DEFECT_DEFINITION PREPELL_DIE2DIE_1
!
QUALITY_GROUP_ID ABC123
PACKAGE Package Part Number
END_MASK 1000001
!------------------------------------------
!
! The TOP_CELL's role in the P10 Standard is to provide a means to list and locate all of the
! Patterns on the Mask. Within the TOP_CELL Cell ID section (below) both Patterns and other Cells
! can be listed. The value for the Top Cell is given by the PLACEMENT_TOP_CELL keyword in the
! MASK_GROUP section above.
!
! This example lays out each component of the Mask using the "CELL_INSTANCE" keyword.
! Each Ultratech Field is represented by a "FLD_x" designation for a Cell Instance, where "x" is
! the field number. The general idea is to designate a cell for each Field separately and to let
! the MASK_PATTERNS cell hold the remaining data. In this example the FLD_1 cell contains Field 1,
! the FLD_2 cell holds Field 2, and the MASK_PATTERNS cell holds Barcode, BOJ, EOJ, Fiducial,
! and Logo data. Other types of Patterns could also be included in the MASK_PATTERNS cell.
!
!
!----------CELLS--------------------------