semi合集-English.pdf - 第5684页

SEMI P10-0705 © SEMI 1990, 2005 179 END_PLACEMENT FDP_2 END_PATTERN_GROUP_INSTANCE FLD_2_PG END_CEL L FLD_2 ! CELL_ID MASK_PATTERNS !--This refers to CELL_INSTANCE !MASK_PATTERNS END_CELL_OP TIONS MASK_PATTERNS ! PATTERN…

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SEMI P10-0705 © SEMI 1990, 2005 178
CELL_ID UT_1X_TOP_CELL !-- refers to PLACEMENT_TOP_CELL
END_CELL_OPTIONS UT_1X_TOP_CELL
!
CELL_INSTANCE FLD_1 !--Field 1 cell within TOP_CELL
END_CELL_INSTANCE_OPTIONS FLD_1
START_PLACEMENT F1
LOCATION -32000.0, 28000.0
END_PLACEMENT F1
END_CELL_INSTANCE FLD_1
!
CELL_INSTANCE FLD_2 !--Field 2 cell within TOP_CELL
END_CELL_INSTANCE_OPTIONS FLD_2
START_PLACEMENT F2
LOCATION 25500.0, 28500.0
END_PLACEMENT F2
END_CELL_INSTANCE FLD_2
!
CELL_INSTANCE MASK_PATTERNS !--Other data cell with TOP_CELL
END_CELL_INSTANCE_OPTIONS MASK_PATTERNS
END_CELL_INSTANCE MASK_PATTERNS
END_CELL UT_1X_TOP_CELL
!
!
! Each CELL_ID below lists the components in that cell, using the PATTERN_GROUP_INSTANCE keyword,
! along with placement data.
!
! Field 1
CELL_ID FLD_1 !--This refers to CELL_INSTANCE FLD_1
END_CELL_OPTIONS FLD_1
!
PATTERN_GROUP_INSTANCE FLD_1_PG
START_PLACEMENT FDPN1
LOCATION -20000.0, 20000.0
STEPPING_DISTANCE 10000.0, 0.0
STEPPING_COUNT 2, 1
END_PLACEMENT FDP_1
END_PATTERN_GROUP_INSTANCE FLD_1_PG
END_CELL FLD_1
!
! Field 2
CELL_ID FLD_2 !--This refers to CELL_INSTANCE FLD_2
END_CELL_OPTIONS FLD_2
!
PATTERN_GROUP_INSTANCE FLD_2_PG
START_PLACEMENT FDP_2
LOCATION 50000.0, 20000.0
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
SEMI P10-0705 © SEMI 1990, 2005 179
END_PLACEMENT FDP_2
END_PATTERN_GROUP_INSTANCE FLD_2_PG
END_CELL FLD_2
!
CELL_ID MASK_PATTERNS !--This refers to CELL_INSTANCE
!MASK_PATTERNS
END_CELL_OPTIONS MASK_PATTERNS
!
PATTERN_GROUP_INSTANCE BARCODES
START_PLACEMENT BC_1
LOCATION 85500.000, 113350.000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT BC_1
END_PATTERN_GROUP_INSTANCE BARCODES
!
PATTERN_GROUP_INSTANCE BOJ
START_PLACEMENT BJ_1
LOCATION 119000, 88000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT BJ_1
START_PLACEMENT BJ_2
LOCATION 9700, 37000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT BJ_2
END_PATTERN_GROUP_INSTANCE BOJ
!
PATTERN_GROUP_INSTANCE EOJ
START_PLACEMENT EJ_1
LOCATION 119000, 88000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT EJ_1
START_PLACEMENT EJ_2
LOCATION 9800, 3800
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT EJ_2
END_PATTERN_GROUP_INSTANCE EOJ
!
PATTERN_GROUP_INSTANCE FIDUCIAL
START_PLACEMENT FD_1
LOCATION 63500, 63500
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT FD_1
END_PATTERN_GROUP_INSTANCE FIDUCIAL
SEMI P10-0705 © SEMI 1990, 2005 180
!
PATTERN_GROUP_INSTANCE LOGO
START_PLACEMENT LG_1
LOCATION 10000, 7500
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT LG_1
END_PATTERN_GROUP_INSTANCE LOGO
!
END_CELL MASK_PATTERNS
!------------------------------------------
!
! The PATTERN_GROUP_ID section relates patterns to specific groups of Masks. The LEVEL_ID
! value MUST agree with a specific MASK_ID value. When multiple Masks are ordered, there
! will be multiple LEVEL_ID sections within each PATTERN_GROUP_ID section.
!
! The PATTERN_NAME values should agree with those listed in the DATA_MEDIUM section.
!
!----------PATTERN_GROUPS-----------------
! Field 1
PATTERN_GROUP_ID FLD_1_PG !refers to PATTERN_GROUP_INSTANCE FLD_1_PG
END_PATTERN_GROUP_OPTIONS FLD_1_PG
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME01.1$
START_PATTERN_OPTIONS FLD_1_1
PATTERN_ADDRESS_SIZE 0.25
SCALE_FACTOR 1.0
DIGITIZED_DATA_DARK T
UNSCALED_PATTERN_SIZE 15000.0, 15000.0
MIRROR_PATTERN F
END_PATTERN_OPTIONS FLD_1_1
END_PATTERN_DEFINITION 1000001
END_PATTERN_GROUP FLD_1_PG
!
! Field 2
PATTERN_GROUP_ID FLD_2_PG !refers to PATTERN_GROUP_INSTANCE FLD_2_PG
END_PATTERN_GROUP_OPTIONS FLD_2_PG
!
LEVEL_ID 100001
PATTERN_NAME FILENAME01.2$
START_PATTERN_OPTIONS FLD2_2
PATTERN_ADDRESS_SIZE 0.25
SCALE_FACTOR 1.0
DIGITIZED_DATA_DARK F
UNSCALED_PATTERN_SIZE 15000.0, 15000.0
MIRROR_PATTERN F
END_PATTERN_OPTIONS FLD2_2