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SEMI P10-0705 © SEMI 1990, 2005 232 complexType XYCoordType diagram complexType XyrType diagram NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any partic…

SEMI P10-0705 © SEMI 1990, 2005 231

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SEMI P10-0705 © SEMI 1990, 2005 232

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NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacture's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publications of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI P11-0997 © SEMI 1991, 19971

SEMI P11-0997

DETERMINATION OF TOTAL NORMALITY FOR ALKALINE

DEVELOPER SOLUTIONS

1 Scope

1.1 An acid-base potentiometric titration to single or

multiple inflection points is performed on an automatic

recording titrator using standardized hydrochloric acid

as the titrant. The normality (meq/mL) is then

calculated by the titrator using the data obtained.

2 Apparatus

2.1 Autotitrator

2.2 Glass combination electrode

2.3 Class A grade volumetric pipets in 1 to 25 mL

sizes

2.4 250 mL beakers

3 Reagents

3.1 1.0 N Hydrochloric acid (from concentrate or

ready to use 1.0 N)

3.2 Primary Standard — High-purity sodium

carbonate is available from most chemical supply

houses, but must be dried at 400 degree centigrade

before use. TMAH (tris (hydroxymethyl)

aminomethane) is also available from the National

Institute of Standards and Technology (Standard

Reference Material 723a) for this purpose.

3.3 Buffer solutions, pH 4.0, 7.0, 10.0.

4 Procedure

4.1 Standardize the 1.0 N Hydrochloric acid with the

primary standard.

4.2 Standardize the titrator by performing a two point

calibration with pH 4.0, 7.0, and 10.0 buffer.

4.3 Pipette an appropriate aliquot (1 to 25 mL) of

sample into a 250 mL beaker containing a magnetic stir

bar. Sample size should be determined according to the

expected normality and the amount of titrant to be

dispensed that will give the optimum precision and

accuracy. Generally this is between one-half and three-

quarters the capacity of the burette. (See the instrument

manual for the recommended optimum range.)

4.4 Add deionized water to bring the volume to

approximately 150 mL.

4.5 Without delay (to prevent carbon dioxide

absorption), begin stirring without a vortex and titrate

to beyond the inflection endpoint.

4.6 Determine the exact endpoint and record the

volume of titrant consumed at the middle of the

inflection endpoint. This will be done automatically on

most newer digital titrators. On analog titrators, the

inflection point can be determined by using the first

derivative mode, or accurately determining the middle

of the inflection.

5 Calculation

5.1 Calculate the normality of the sample by the

following equation.

ormality (N) =

Volume of titrant (mL) × Normality of titrant (N.HCL)

Sample Volume (mL)

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.