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SEMI P22-0699 © SEMI 1993 , 1999 5 Figure 15 Figure 16 Truncation On Opa que Pattern Truncation O n Clear Pattern Figure 17 Figure 18 Misplacement On Opaque Pattern Misplacement On Clear Pattern Figure 19 Figure 20 Trans…

SEMI P22-0699 © SEMI 1993, 1999 4

Figure 9 Figure 10

Oversize On Opaque Pattern Oversize On Clear Pattern

Figure 11 Figure 12

Undersize On Opaque Pattern Undersize On Clear Pattern

Figure 13 Figure 14

Elongation On Opaque Pattern Elongation On Clear Pattern

SEMI P22-0699 © SEMI 1993, 19995

Figure 15 Figure 16

Truncation On Opaque Pattern Truncation On Clear Pattern

Figure 17 Figure 18

Misplacement On Opaque Pattern Misplacement On Clear Pattern

Figure 19 Figure 20

Transmission Defect On Clear Pattern Transmission Defect On Opaque Pattern

Figure 21 Figure 22

Missing Opaque Pattern Missing Clear Pattern

Figure 23 Figure 24

Dot Randomly Shaped Edge Extension Randomly Shaped

Figure 25 Figure 26

Misplacement On Opaque Pattern Opaque Bridge