semi合集-English.pdf - 第5803页

SEMI P23-0200 © SEMI 1993 , 2000 26 50 um 50 um De ta i l 1 u m 1 u m 9.7 14 . 0 0.67 5 4.85 7. 0 <1 .5 01> 1.35 <1 .6 2> 7.0 ( a rctan 1 / 2 ) < 2 6. 565 deg. > 1 0 . 8 4 5 4 . 8 1 O P ; Film Pattern ;…

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SEMI P23-0200 © SEMI 1993, 200025
50 um
50 um
Detail
1 um
1 um
14.0
5.258.75
7.0
2.5
2.0
2.5
3.0
2..0
2.0
7.0
1.5
(45deg.)
<1.590>
3.25
M
N
; Film Pattern
; Defect Position
Figure 20
Sub Cell
Wiring (Type F)
SEMI P23-0200 © SEMI 1993, 2000 26
50 um
50 um
Detail
1 um
1 um
9.7
14.0
0.675
4.857.0
<1.501>
1.35
<1.62>
7.0
( arctan 1/2 )
< 26.565 deg. >
1
0
.
8
4
5
4
.
8
1
O
P
; Film Pattern
; Defect Position
Figure 21
Sub Cell
Wiring (Type F)
SEMI P23-0200 © SEMI 1993, 200027
50 um
50 um
Detail
1 um
1 um
A
5.5
14.0
1.5
12.5
2.0
2.0
1.5
7.0
3.5
E
F
C
D
B
A
; Film Pattern
; Defect Position
Figure 22
Sub Cell
Contact Hole Pattern