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SEMI P33-0998 © SEMI 1998 5 Figure 5 Substrate Ide ntification by Co rner Chamfer(Non-Critical Si de) Figure 6 Dimension of Corner Cha mfer
SEMI P33-0998 © SEMI 1998 4
Table 2 Specifications for Beveled and Rounded Edge Dimensions
T AABBCC
Nominal Minimum Maximum Minimum Maximum Minimum Maximum Units
9.00 0.20 0.60 0.20 0.60 2.00 3.00 mm
NOTE: “D” is radius of curvature of concerns.
Figure 3
Beveled Edge Dimensions
Figure 4
Square Quality Area
SEMI P33-0998 © SEMI 19985
Figure 5
Substrate Identification by Corner Chamfer(Non-Critical Side)
Figure 6
Dimension of Corner Chamfer
SEMI P33-0998 © SEMI 1998 6
Figure 7
Measurements for Calculation of Parallelism with Approximate Positions
Figure 8
Corner Diagonally Opposite of Chamfer