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SEMI P39-0304 E2 © SEMI 2004 8 7.6.6 TYPE 4 is an N-col umn (N > 1) by 1-row vector with (potentiall y) non-uniform horizont al spacing bet w een the elements. x-dimension is N - 2. Th e ( x-offset , y-offs et) (cumul…

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Table 5 Delta Examples
Bit Pattern Type Meaning
11111001 00100011 1-delta
 = -2300
11111000 00100011 1-delta
 = +2300
10011000 00101010 2-delta
x = +1350
10011011 00101010 2-delta
y = -1350
11001101 00000001 3-delta
x = -25, y = +25
11010111 00000111 3-delta
x = +122, y = -122
11101001 00000011 01111010 g-delta
2
x = +122, y = +61
11101100 00000101 g-delta
1
x = -46, y = -46
10111011 00000001 10110111 00001111 g-delta
2
x = -46, y = -987
7.6 Repetitions
7.6.1 A repetition represents an “array” of cell placements, geometries, or text elements. The repetition is part of
the PLACEMENT, <geometry>, or TEXT record itself. A repetition consists of an unsigned-integer which
encodes the type, followed by any related repetition parameters:
Table 6 Repetition Types
TYPE
Format
0
re-use the previous repetition definition
1 x-dimension y-dimension x-space y-space
2 x-dimension x-space
3 y-dimension y-space
4
x-dimension x-space
1
... x-space
N-1
5
x-dimension grid x-space
1
... x-space
N-1
6
y-dimension y-space
1
... y-space
M-1
7
y-dimension grid y-space
1
... y-space
M-1
8 n-dimension m-dimension n-displacement m-displacement
9 dimension displacement
10
dimension displacement
1
... displacement
P-1
11
dimension grid displacement
1
... displacement
P-1
7.6.1.1 x-dimension, y-dimension, x-space, y-space, dimension, n-dimension, m-dimension, and grid are all
unsigned-integers. displacement, n-displacement, and m-displacement are g-deltas.
7.6.2 TYPE 0 indicates that the previous repetition description, stored in modal variable repetition, is to be re-used.
(See Section 10 on page 11.) No additional values are stored with this type.
7.6.3 TYPE 1 is an N-column (N > 1) by M-row (M > 1) matrix with uniform horizontal and vertical spacing
between the elements. x-dimension is N - 2 and y-dimension is M - 2. The (x-offset, y-offset) (cumulative spacing
in the (horizontal,vertical) direction) of element (i,j) of the repetition (i = 0, ..., N-1 and j = 0, ..., M-1) is
(i * x-space, j * y-space).
7.6.4 TYPE 2 is an N-column (N > 1) by 1-row vector with uniform horizontal spacing between the elements. x-
dimension is N - 2. The (x-offset, y-offset) (cumulative spacing in the (horizontal,vertical) direction) of element i of
the repetition (i = 0, ..., N-1) is (i * x-space, 0).
7.6.5 TYPE 3 is a 1-column by M-row (M > 1) vector with uniform vertical spacing between the elements. y-
dimension is M - 2. The (x-offset, y-offset) (cumulative spacing in the (horizontal,vertical) direction) of element j of
the repetition (j = 0, ..., M-1) is (0, j * y-space).
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7.6.6 TYPE 4 is an N-column (N > 1) by 1-row vector with (potentially) non-uniform horizontal spacing between
the elements. x-dimension is N - 2. The (x-offset, y-offset) (cumulative spacing in the (horizontal,vertical) direction)
of element i of the repetition (i = 0, ..., N-1) is (x-space
0
+ ... + x-space
i
, 0), with x-space
0
= 0.
7.6.7 TYPE 5 is identical to TYPE 4, except that all offset values must be multiplied by grid during expansion of
the repetition.
7.6.8 TYPE 6 is a 1-column by M-row (M > 1) vector with (potentially) non-uniform vertical spacing between the
elements. y-dimension is M - 2. The (x-offset, y-offset) (cumulative spacing in the (horizontal,vertical) direction) of
element j of the repetition (j = 0, ..., M-1) is (0, y-space
0
+ ... + y-space
j
), with y-space
0
= 0.
7.6.9 TYPE 7 is identical to TYPE 6, except that all offset values must be multiplied by grid during expansion of
the repetition.
7.6.10 TYPE 8 is an N (N > 1) by M (M > 1) repetition with uniform and (potentially) diagonal displacements
between the elements. n-dimension is N - 2 and m-dimension is M - 2. Defining n-displacement in terms of its
components nx-space and ny-space (and similarly for m-displacement), the (x-offset, y-offset) (cumulative spacing
in the (horizontal,vertical) direction) of element (i,j) of the repetition (i = 0, ..., N-1 and j = 0, ..., M-1) is
(i * nx-space + j * mx-space, i * ny-space + j * my-space).
7.6.11 TYPE 9 is a P-element (P > 1) repetition with uniform and (potentially) diagonal displacements between the
elements. dimension is P - 2. Defining displacement in terms of its components x-space and y-space, the (x-offset,
y-offset) (cumulative spacing in the (horizontal,vertical) direction) of element k of the repetition (k = 0, ..., P-1) is
(k * x-space, k * y-space).
7.6.12 TYPE 10 is a P-element (P > 1) repetition with (potentially) non-uniform and arbitrary two-dimensional
displacements between the elements. dimension is P - 2. Defining displacement
k
in terms of its components x-
space
k
and y-space
k
, the (x-offset, y-offset) (cumulative spacing in the (horizontal,vertical) direction) of element k
of the repetition (k = 0, ..., P-1) is (x-space
0
+ ... + x-space
k
, y-space
0
+ ... + y-space
k
) with x-space
0
= y-space
0
=
0).
7.6.13 TYPE 11 is identical to TYPE 10, except that all offset values must be multiplied by grid during expansion
of the repetition.
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Figure 5
Repetition Types
7.6.14 EXCEPTION HANDLING
— A repetition type outside the range of 0 to 11 should be treated as a fatal error.
A repetition type of 0 may not be the first repetition type used within a cell.
7.7 Point Lists
7.7.1 A point-list represents a list of geometric coordinates for polygons or paths, and consists of an unsigned-
integer denoting its type, followed by a list of deltas, in one of several formats. The initial vertex at (x,y) is supplied
by the POLYGON or PATH record and is not part of the point-list; vertex-count (an unsigned-integer) is the
number of points or deltas, excluding the initial vertex and any implicit vertices
.
Table 7 Point List Types
Type Format Description
0
vertex-count [ 1-delta [ ... 1-delta ] ] Implicit manhattan delta point-list (horizontal-first)
1
vertex-count [ 1-delta [ ... 1-delta ] ] Implicit manhattan delta point-list (vertical-first)
2
vertex-count [ 2-delta [ ... 2-delta ] ] Explicit manhattan delta point-list
3
vertex-count [ 3-delta [ ... 3-delta ] ] Explicit octangular delta point-list
4
vertex-count [ g-delta [ ... g-delta ] ] Explicit all-angle delta point-list
5
vertex-count [ g-delta [ ... g-delta ] ] Explicit all-angle double-delta point-list
7.7.2 A point-list of type 0 consists of a list of 1-deltas, representing alternating horizontal and vertical relative
displacements, with the first displacement implicitly horizontal
. When describing a polygon point-list in this form,
the final two displacements are omitted, since they can be unambiguously implied from the current point, the last