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SEMI P41-0304 E © SEMI 2004 5 Table 4 Description of Each Defect Sectio n Item Element or Attribute Mandatory or Optional Data Type Description Defect Repeatable Element Mandatory - Top element of each defect inform atio…

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SEMI P41-0304
E
© SEMI 2004 4
Item
Element or
Attribute
Mandatory or
Optional
Data type Description
defect_type Attribute Mandatory String Defect type.
InspectionOperator Element Optional String Inspection Operator name.
ReticleJudgment Element Optional String Reticle disposition.
RepairSummary Repeatable
Element
Mandatory - Top element of repaired defect summary.
beginning_date Attribute Optional String Beginning time of defect repair.
ending_date Attribute Optional String Ending time of defect repair.
RepairTool Element Mandatory - Top element of repair tool information.
tool_name Attribute Optional String General name of tool.
tool_no Attribute Optional String Tool management number in mask fab.
ToolCoordinateInformation Element Mandatory - Top element of tool work stage coordinate
information. Subsequent structures are in Table
5. Refer to Figure 9.
RepairMethod Element Mandatory String Method of defect repairing.
DirectionInformation Element Mandatory - Top element of direction for Mask and tool work
stage. Subsequent structures are in Table 6. Refer
to Figure 10.
NumberRepairProcessing Element Mandatory - Element of number of repair processed.
TotalRepairProcess Element Mandatory Integer Number of repaired defects in total.
CalssifyRepairProcess Repeatable
Element
Mandatory Integer Number of defect types.
defect_type Attribute Mandatory String Defect type.
RepairOperator Element Optional String Repair operator name.
RepairJudgment Element Optional String Judegement of repair process.
EvaluationSummary Repeatable
Element
Mandatory - Top element of evaluated defect summary.
beginning_date Attribute Optional String Beginning time of evaluation.
ending_date Attribute Optional String Ending time of evaluation.
EvaluationTool Element Mandatory - Top element of evaluation tool information.
tool_name Attribute Optional String General name of tool.
tool_no Attribute Optional String Tool management number in mask fab.
ToolCoordinateInformation Element Mandatory - Top element of tool work stage coordinate
information. Subsequent structures are in Table
5. Refer to Figure 9.
EvaluationMethod Element Mandatory String Method of defect evaluation.
DirectionInformation Element Mandatory - Top element of direction for Mask and tool work
stage. Subsequent structures are in Table 6. Refer
to Figure 10.
NumberEvaluationProcessing Element Mandatory - Element of number of evaluation process.
TotalEvaluationProcess Element Mandatory Integer Number of evaluated defects in total.
CalssifyEvaluationProcess Repeatable
Element
Mandatory Integer Number of defect types.
defect_type Attribute Mandatory String Defect type.
EvaluationOperator Element Optional String Evaluation operator name.
EvaluationJudgment Element Optional String Judgment of evaluation process.
SEMI P41-0304
E
© SEMI 2004 5
Table 4 Description of Each Defect Section
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
Defect Repeatable
Element
Mandatory - Top element of each defect information.
defect_type Attribute Mandatory String Defect type.
date_stamp Attribute Optional String Date classified.
DefectInformation Element Mandatory - Top element of defect information.
origin Attribute Mandatory String Origin point name of this reference position.
DefectPosition Element Mandatory - Element of defect position.
unit Attribute Mandatory String Unit system.
DefectPosition_X Element Mandatory Float X coordinate value of defect position.
DefectPosition_Y Element Mandatory Float Y coordinate value of defect position.
DefectSize Element Mandatory - Element of defect size.
unit Attribute Mandatory String Unit system.
DefectSize_X Element Mandatory Float X size value of defect.
DefectSize_Y Element Mandatory Float Y size value of defect.
DefectJudgment Element Mandatory String Judgment of defect.
ImageData Repetable
Element
Mandatory - Image data of defect. Subsequent structures are
in Table 7.
DefectRepair Repetable
Element
Mandatory - Top element of defect repair.
date_stamp Attribute Optional String Repair processing date.
RepairRecipe Element Mandatory - Element of repair recipe.
recipe_name Attribute Optional String Repair recipe name.
RepairCondition Element Mandatory String Repair conditions.
RepairResult Element Mandatory String Repair results.
ImageData Repetable
Element
Mandatory - Image data of repaired defect. Subsequent
structures are in Table 7.
DefectEvaluate Repetable
Element
Mandatory - Top element of defect evaluation.
date_stamp Attribute Optional String Evaluation processing date.
EvaluateRecipe Element Mandatory - Element of evaluation recipe.
recipe_name Attribute Optional String Evaluation recipe name.
EvaluateCondition Element Mandatory String Evaluation condition.
EvaluateResult Element Mandatory String Evaluation result.
ImageData Repetable
Element
Mandatory - Image data of evaluated defect. Subsequent
structures are in Table 7.
Table 5 Description of Tool Coordinate Section
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
CoordinateSystem Element Mandatory String Coordinate system of tool.
ToolOriginPointInformation Element Mandatory - Element of origin point information.
ToolOriginPoint Element Mandatory String Tool origin point information.
ToolOriginPosition Element Mandatory - Element of origin position.
unit Attribute Mandatory String Unit system.
ToolOriginPosition_X Element Mandatory Float X coordinate value of tool origin position.
SEMI P41-0304
E
© SEMI 2004 6
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
ToolOriginPosition_Y Element Mandatory Float Y coordinate value of tool origin position.
ToolStageCorrectionInformation Element Mandatory - Top element of tool work stage correction
information.
ToolStageCorrection Element Mandatory - Element of correction information.
unit Attribute Mandatory String Unit system.
ToolStageCorrection_X Element Mandatory Float Correction information of X coordinates.
ToolStageCorrection_Y Element Mandatory Float Correction information of Y coordinates.
ToolStageSkew Element Mandatory - Element of skew correction information.
unit Attribute Mandatory String Unit system.
ToolStageSkewCorrection Element Mandatory Float Skew correction information.
MaskOriginPointInformation Element Mandatory - Top element of mask origin position.
MaskOriginPoint Element Mandatory String Mask origin point information.
MaskOriginPosition Element Mandatory - Element of mask origin position.
unit Attribute Mandatory String Unit system.
MaskOriginPosition_X Element Mandatory Float X coordinate value of mask origin position.
MaskOriginPosition_Y Element Mandatory Float Y coordinate value of mask origin position.
ToolOffset Element Mandatory - Element of relative position information on tool
origin and mask origin.
unit Attribute Mandatory String Unit system.
ToolOffset_X Element Mandatory Float X offset value of relative position of tool origin
and mask origin.
ToolOffset_Y Element Mandatory Float Y offset value of relative position of tool origin
and mask origin.
ToolStageAccuracy Element Optional - Tool work stage positioning accuracy
information.
unit Attribute Optional String Unit system.
Table 6 Description of Mask Direction Information Section
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
ReferenceMark Element Mandatory String Information on the reference mark for expressing
direction of mask.
MarkRotation Element Mandatory String Information of rotation direction on mask.
MaskMirror Element Mandatory String Information of mirror direction information on
mask.
MaskFlip Element Mandatory String Information of flip direction information on
mask.
Table 7 Description of Image Data Section
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
ImageReferenceAddress Element Optional String Reference address information of image data.
ImageInformation Element Mandatory - Element of image data information.
ImageFormat Element Mandatory String Image data format information.
ImageMagnification Element Mandatory Float Image data magnification information.
ImagePixelNumber_X Element Mandatory Integer Number of pixels in X.
ImagePixelNumber_Y Element Mandatory Integer Number of pixels in Y.