semi合集-English.pdf - 第5949页

SEMI P41-0304 E © SEMI 2004 9 Inspection Result Summ ary Inspectio nSummary (beginning_da te,ending_dat e) Inspec tionRec ipe (recipe _name) Inspectio nModeInform ation Inspectio nDetectionSum mary TotalDefect + Classify…

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SEMI P41-0304
E
© SEMI 2004 8
MDML (data_no,date_stamp)
BasicInformation
MaskSize (unit,shape)
MaskSize_X
MaskSize_Y
MaskThickness
MaskAbsorber
DefectInspection (preparation_data)
InspectionTool (tool_name,tool_no)
ToolCoordinateInformation
InspectionMethod
PreparationOperator
ReferenceAreaDB
Subsequent structures are in Figure 5.
DirectionInformation
AreaInformation
LensDistance (unit)
InspectionArea (unit)
InspectionArea_X
InspectionArea_Y
InspectionAreaChip_X
InspectionAreaChip_Y
ChipSize_X
ChipSize_Y
InspectionChipNumber
InspectionChipNumber_X
InspectionChipNumber_Y
+ Reference (origin)
ReferencePointName
ReferencePosition (unit)
ReferencePosition_X
ReferencePosition_Y
+ ImageData
InspectionStartPosition (origin,unit)
InspectionStartPosition_Y
InspectionStartPosition_X
MaskMaterialInformation
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 7.
Subsequent structures are in Figure 3.
Figure 2
Structure of Basic Information Section
SEMI P41-0304
E
© SEMI 2004 9
InspectionResult
Summary
InspectionSummary (beginning_date,ending_date)
InspectionRecipe (recipe_name)
InspectionModeInformation
InspectionDetectionSummary
TotalDefect
+ ClassifyDefect (defect_type)
InspectionOperator
ReticleJudgement
+RepairSummary (beginning_date,ending_date)
RepairTool (tool_name,tool_no)
RepairMethod
ToolCoordinateInformation
Subsequent structures are in Figure 5.
N
unberRepairProcessing
DirectionInformation
TotalRepairProcess
+ ClassifyRepairProcess (dafect_type)
RepairOperator
RepairJudgement
+EvaluationSummary (beginning_date,ending_date)
EvaluationTool(tool_name,tool_no)
EvaluationMethod
ToolCoordinateInformation
N
unberEvaluationProcessing
DirectionInformation
TotalEvaluationProcess
+ ClassifyEvaluationProcess (defect_type)
EvaluationOperator
EvaluationJudgement
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 5.
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 4.
Figure 3
Structure of Result Summary Section
SEMI P41-0304
E
© SEMI 2004 10
+ Defect (defect_type,date_stamp)
DefectInformation (origin)
DefectPosition_X
DefectPosition_Y
DefectSize (unit)
DefectSize_Y
DefectSize_X
DefectJudgement
+ ImageData
DefectPosition (unit)
+ DefectRepair (date_stamp)
RepairRecipe (recipe_name)
RepairCondition
RepairResult
+ ImageData
+ DefectEvaluate (date_stamp)
EvaluateRecipe (recipe_name)
EvaluateCondition
EvaluateResult
+ ImageData
subsequent structures are in Figure 7.
subsequent structures are in Figure 7.
subsequent structures are in Figure 7.
Figure 4
Structure of Each Defect Section