semi合集-English.pdf - 第5984页

SEMI P42-0304 © SEMI 2004 17 < / S h o t P o s i t i o n > </ShotInform ation> <ShotInforma tion> <ShotID>S7</ShotID> <ShotAreaID>AREA-A</ShotAreaID> <ShotLocation> <C&g…

SEMI P42-0304 © SEMI 2004 16

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SEMI P42-0304 © SEMI 2004 17

</ShotPosition>

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<ShotPosition>

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<UnitType>um</UnitType>

</ShotPosition>

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(To be repeated)

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<ShotAreaID>AREA-A</ShotAreaID>

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</ShotLocation>

<ShotPosition>

SEMI P42-0304 © SEMI 2004 18

<X>50000</X>

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