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SEMI E83-1000 © SEMI 1999 , 2000 2 Table 1 Dimension al Requirements Symbol Value, mm ( in.) Tolerance (mm) Type a11 0 deg. +/- 0. 25 deg. angle ∅ d11 15.0 (. 591) +/- 0.2 diameter d12 33.0 (1.299) +/- 0.2 distance d13 3…

SEMI E83-1000 © SEMI 1999, 20001

SEMI E83-1000

SPECIFICATION FOR 300 mm PGV MECHANICAL DOCKING FLANGE

This Provisional Specification was technically approved by the Global Physical Interfaces & Carriers

Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee.

Current edition approved by the North American Regional Standards Committee on July 14, 2000. Initially

available at www.semi.org August 2000; to be published October 2000. Originally published June 1999.

1 Purpose

1.1 This specification is intended to promote

consistent interface features between Person Guided

Vehicles and SEMI E15.1 equipment.

2 Scope

2.1 This specification defines a mechanical standard

for the stationary (equipment) side of the docking

flange used by 300 mm Person Guided Vehicles

(PGVs). This flange is to be mounted to the floor within

the volume defined by SEMI E64 at SEMI E15.1 and

SEMI E64 compliant equipment.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This standard does not define the PGV (active)

side of the docking interface or carrier transfer. The

PGV and the PGV side of the docking interface designs

should comprehend the physical limitations of

equipment to which they are being applied.

4 Referenced Standards

4.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Provisional Specification for 300 mm

Tool Load Port

SEMI E64 — Provisional Specification for 300mm

Cart to SEMI E15.1 Docking Interface Port

5 Terminology

5.1 Acronyms and Abbreviations

5.1.1 PGV — Person Guided Vehicle (cart)

5.2 Definitions

5.2.1 carrier — Any cassette, box, pod, or boat that

contains wafers (per SEMI E15).

5.2.2 cart — A floor based carrier transfer vehicle (per

SEMI E64).

5.2.3 docking — The act of locating a floor-based

carrier transport vehicle for carrier transfer to/from

equipment (per SEMI E64).

5.2.4 facial datum plane — A vertical plane that

bisects the wafers and that is parallel to the front side of

the carrier (where wafers are removed or inserted). On

tool load ports, it is also parallel to the load face plane

specified in SEMI E15 on the side of the tool where the

carrier is loaded and unloaded (per SEMI E57).

5.2.5 load face plane — The furthest physical vertical

boundary plane from carrier centroid on the side(s) of

the equipment where loading of the tool is intended (per

SEMI E15).

5.2.6 load port — The interface location on a tool

where carriers are placed to allow the tool to process

wafers (per SEMI E15).

5.2.7 transfer — To either load or unload (per SEMI

E15).

6 Requirements

6.1 The dimensions that define the universal docking

flange are listed in Table 1 and shown on Figure 1.

6.1.1 The minimum length of the docking flange is

defined by 2×w11. This minimum length is intended to

fit under the shadow of the smallest possible width

SEMI E15.1 compatible load port. The PGV and PGV

docking must provide full functionality given a

minimum length docking flange. No maximum length

has been specified.

6.1.2 One vertical pin (labeled VP in Figure 2) is

intended to be used for horizontal registration of the

PGV to the docking flange. This pin is also intended as

a feature for an active mechanism on the PGV to lock

on to.

6.2 There are three surfaces on the flange and a verti-

cal pin that can be used as the initial docking contacts

point(s) with the PGV. These have been identified as

surfaces A, B and C and pin VP as shown in Figure 2.

These features are the primary load bearing features

during the act of docking, no other features or surfaces

shall be used as initial docking contact points.

SEMI E83-1000 © SEMI 1999, 2000 2

Table 1 Dimensional Requirements

Symbol Value, mm (in.) Tolerance (mm) Type

a11 0 deg. +/- 0.25 deg. angle

∅d11

15.0 (.591) +/- 0.2 diameter

d12 33.0 (1.299) +/- 0.2 distance

d13 39.0 (1.535) +/- 0.2 distance

d14 62.0 (2.441) +/- 0.2 distance

d15 80.0 (3.150) +/- 0.2 distance

d16 237.5 (9.350) +/- 2.5 distance

d17 68.0 (2.677) minimum distance

h11 24.0 (.945) +/- 0.2 distance

h12 39.0 (1.535) +/- 0.2 distance

h13 40.0 (1.575) +/-0.2 distance

h14 83.0 (3.268) +/-0.2 distance

h15 20.0 (.787) maximum distance

r11 2.0 (.079) +/-0.2 radius

r13 4.0 (.157) +/-0.2 radius

r14 5.0 (.197) +/-0.2 radius

w11 200 (7.874) minimum distance

Figure 1

Side Elevation View I

6.3 The flange must be installed such that the vertical

pin (VP) is capable of being aligned with the load port

bilateral datum plane (as defined in SEMI E15.1) and

surface A is a distance of d16 from the load port facial

datum plane (as defined in SEMI E15.1). The angle of

incidence between surface A and the facial datum plane

should be capable of adjustment to a11 listed in Table

6.3.1 The docking flange is to be physically isolated

from the equipment and should be mounted such that

the equipment and equipment load port are protected

from the impact incurred during docking.

Figure 2

Side Elevation View II

6.4 When the flange is removed, no mounting

hardware shall remain protruding from the floor.

6.5 Surfaces A, B, B’ and C shown on Figure 2 must

exist per tolerances listed in Table 1.

Figure 3

Front Elevation View

NOTICE:. SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

SEMI E83-1000 © SEMI 1999, 20003

RELATED INFORMATION 1

APPLICATION NOTES

NOTE: This related information is not an official part of SEMI E83, but was approved for publication by full letter ballot

procedures on July 14, 2000.

R1-1 The intent of this standard is to provide manually

guided 300mm carrier transport PGVs a standard flange

for docking and to facilitate a safe, quick, and

repeatable PGV to load port carrier transfer method or

mechanism. Standardization of features on the flange is

intended to allow for interoperability between PGV

designs and the docking flange.

R1-2 SEMI E64 defines Zone L as an exclusion zone

in SEMI E15.1 compliant tools. It is intended that the

docking flange be mounted in this zone.

R1-3 The docking interface flange includes features to

allow for the following minimum functionality of the

PGV to flange docking procedure:

• Stopping PGV motion

• Guidance of PGV to flange

• x, y & theta alignment of the PGV to the flange

• Locking of PGV to flange

• Docking parallel or perpendicular to the flange

R1-4 The PGV side of the interface may include

additional features to allow for all or some of the

following functionality:

• Compliance to the docking flange

• To dampen impact of docking forces

R1-5 No features on the standard docking flange

provide an adjustable feature to indicate the height

(dimension as H defined by SEMI E15.1) the load port

horizontal datum plane has been adjusted to.

R1-6 It is likely that the alignment error and tolerance

stack up between the docking interface flange and the

equipment load port will not provide sufficient

accuracy alone for accurate pick/placement of a pod

onto the kinematic couplings on the load port.

R1-7 Possible sources of alignment error are:

• Cleanroom floor height and level

• PGV wheels and framework

• Installation accuracy of docking interface flange

• Stability of mounting

R1-8 It may be necessary to use additional alignment

methods to improve accuracy of pod placement onto the

kinematic couplings.

R1-9 It is expected that the interface device be floor

mounted. Thus, the equipment must not require the use

of support pedestals or other support structures under

the floor below Zone L.

R1-10 The docking flange should sustain docking

impact for the lifetime of the flange without any

performance degradation.

• Assume 90kg (200lb) PGV moving at 0.3m/s

(1ft/sec)

• Assume 250,000 docking cycles within a flange

lifetime

• Recommended to design for 3x safety factor for

single docking cycle

R1-11 Flange must be quick remove, replace, align and

calibrate.

R1-12 Surface B' (shown on Figure 2) allows docking

mechanism designs to grab onto the docking flange

without using the docking pin for support.

R1-13 The method of attaching the vertical pin to the

flange is not defined in this standard. Docking flange

designers should be aware of the docking forces

incurred on this pin and design the attachment method

accordingly.

R1-14 The method of attaching the flange to the floor

is not defined in this standard. Docking flange

designers should be aware of the docking forces

incurred on the flange and/or pin and design the

attachment method accordingly.

R1-15 This standard specifies the radii of certain edges

found on the docking flange. It is recommended that

edges that do not have a specified radius are radiused or

broken to eliminate sharp edges.

R1-16 It is left to user to define the needed flange

length (w2×2) at the time of placing an order.