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SEMI G23-0996 © SE MI 1980, 1996 4 NOTICE: These st andards do not purport to addres s safety issues, if any, ass o ciated with their use. It is the responsibility of t he user of these standards to establish appropriate…
SEMI G23-0996 © SEMI 1980, 19963
NOTE 4: The angle between the potential terminal probe and
the current terminal probe has to be maintained at a right
angle (90°). This is to nullify the mutual interference caused
by the magnetic flux.
13.2 Measurement of the Resultant Inductance
13.2.1 Place the sample on the insulator such as
Teflon.
13.2.2 Set the probe at the bottom of the pin of the
trace being measured and at the closest traces belonging
to the short circuit as shown in Figure 6.
Figure 6
Probing Method
NOTE 5: The probes H
p
and H
c
are attached/placed onto the
pins to be measured and the probes L
p
and L
c
are
attached/placed onto the short circuit.
14 Calculation
14.1 The inductance of the internal trace is calculated
as follows:
Internal Inductance (nH) = Measured Inductance —
Residual Inductance
14.2 Round the second digit after th e decimal point to
the unit of 0.1 nH.
15 Report
The following information shall be reported:
• Brief description of the package
• Measurement instrument or system
• Measurement frequency
• Measurement pin numbers
• Inductance — Raw data as well as the average in
case of multiple measurements.
16 Accuracy
Using the same samples, four different packaging
manufactures were tested. The following results were
obtained:
Repeatability — ± 0.2 nH
Reproductibility — ± 0.5 nH
17 Related Documents
SEMI G24 — Test Method for Measuring the Lead-to-
Lead and Loading Capacitance of Package Leads
SEMI G25 — Test Method for Measuring the
Resistance of Package Leads
SEMI G23-0996 © SEMI 1980, 1996 4
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer's
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI G24-89 © SEMI 1984, 19961
SEMI G24-89
TEST METHOD FOR MEASURING THE LEAD-TO-LEAD AND LOADING
CAPACITANCE OF PACKAGE LEADS
1
1 This test method applies to measurements in the range of 1 to 100 pico farands.
1 Purpose
This document defines the equipment, materials, and
procedures used to measure the lead-to-lead and
loading capacitance of package leads. Semiconductor
packages are shown as examples; however, other
packaging elements can be measured by this method.
2 Equipment and Materials
2.1 Capacitance meter which uses a two probe plus
guard method with two coax cables, or a meter which
utilizes a four probe plus guard method. The four probe
method requires four cables to be modified to connect
to two probes at the probe end of the cables. Both
methods require an 18 awg. or larger insulated wire for
the guard connection. Keep cables at minimum length
(1 meter) unless specified by individual equipment.
Coaxial cables must be used to connect the probes to
the meter. Meter accuracy ± 2%. The probe shields
must be connected together. This connection should be
short, approximately one to two inches.
2.2 Probe station with two coax probes and one
regular probe. Recommendation: Micromanipulator,
two (2) each coax probe model 44-FPC-6000 with #5
collet, and one each OON-FPC-6000 with #3 collet, or
equivalent.
3 Procedure: Lead-to-Lead Capacitance(See
Figure 1)
3.1 Set the instrument to measure at 1 Mhz. If the
equipment has a cable length selection switch, adjust
the switch to the appropriate coax cable length.
Figure 1
Lead-to-Lead Capacitance
3.2 Connect together all the pins in close proximity to
those being measured, for multi-layer ceramic package
pins should be chosen to connect all traces adjacent to
traces being measured. Example: Eight surrounding
pins are connected for the 68 lead pin grid; twelve
surrounding pins are connected together for the 124 pin
grid; eight surrounding pins are connected together for
all flat packs (see Figure 1). If there are power planes
and/or large power buses in the package, their pins must
be connected together with the eight or 12 surrounding
pins discussed above.
3.3 Place the guard probe down on the cavity side of
any one of the eight or 12 leads discussed in Section
3.2, to ensure that they will not affect the measurement.
3.4 Place one coaxial probe approximately 1/8 inch
above the cavity side of one of the leads to be
measured.
3.5 Place the other coaxial probe approximately 1/8
inch above the cavity side of the other lead to be
measured.
3.6 Nulling Procedure — If using an instrument that
auto-zeros, such as the H.P.4275A, follow the
instrument instructions for capacitance measurement. If
this type of instrument is not being used, take the
reading on the instrument at this point.