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SEMI E6-0303 © SEMI 1982, 2003 8 11 Physical Characteristics Data Sheet 11.1 Include in Data Sh eet 300, Physical Characteristics the requested information for physical attributes such as size, we ight, layout, clearance…

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SEMI E6-0303 © SEMI 1982, 2003 7
10.2.18 Other Conditions (200R) — Include in other
any special environmental conditions such as lighting,
ESD, electromagnetic, or audible noise conditions for
the equipment components.
10.2.19 Environmental Conditions Comments (200S)
— Enter any comments necessary to clarify or add to
information given for this equipment component.
Data Sheet 200 – Environmental Conditions (See SEMI E6 Section 10)
200 Environmental Conditions
A B C D E F G
1
Equipment
Component
Maximum
Installation
Distance from
Mainframe
Minimum
Cleanroom
Classification
Cleanroom
Classification
Standard
Target Room
Temperature
Minimum Room
Temperature
Maximum
Room
Temperature
2
text meters text text degrees C degrees C degrees C
3
4
5
6
200 Environmental Conditions
H I J K L M N
1
Room
Temperature
Fluctuation
Heat Loading
Idle Average
Heat Loading
Process Average
Target Room
Relative
Humidity
Minimum Room
Relative
Humidity
M
aximum Room
Relative
Humidity
Room Relative
Humidity
Fluctuation
2
degrees /hour watts watts % % % %/hour
3
4
5
6
200 Environmental Conditions
O P Q R S
1
Vibration
Sensitivity
Vibration
Generation
Other Vibrations
Requirements
Other Conditions Environmental Conditions Comments
2
text text text text text
3
4
5
6
SEMI E6-0303 © SEMI 1982, 2003 8
11 Physical Characteristics Data Sheet
11.1 Include in Data Sheet 300, Physical
Characteristics the requested information for physical
attributes such as size, weight, layout, clearances, and
floor loading data.
11.2 Data Sheet 300, Physical Characteristics contains
the following items.
11.2.1 Equipment Component (300A) — Enter the
name of the equipment component for the data in this
row. The name should be the same name used in Data
Sheet 200.
11.2.2 Shipping and Receiving Information Reference
(300B) — Enter reference for document containing all
relevant shipping and receiving information. (See
Section 7.1.2 and Related Information 2.)
11.2.3 Number of Shipping Containers (300C) — Enter
the total number of containers or crates used to ship the
equipment and all supplier provide support equipment.
11.2.4 Move-in, Placement and Assembly Instructions
Reference (300D) — Enter reference for document
containing all installation instruction. (see Section 7.1.3
and Related Information 3.)
11.2.5 Number of Cleanroom Move-in Pieces (300E)
— Enter the total number of pieces of equipment to be
moved into the manufacturing cleanroom.
11.2.6 Biggest Move-in Piece Length, Width, Height,
Weight (300F, 300G, 300H, 300I) — Enter the size and
weight of the largest single move-in piece of the
equipment.
11.2.7 Installation ESH Information Reference (300J)
— Enter reference for document containing all relevant
environmental, safety, and health information related to
equipment installation. (See related SEMI Safety
Guidelines)
11.2.8 Assembled Length, Width, Min. Height, Max
Height, Weight (300K, 300L, 300M, 300N): 300O) —
Enter the size and weight of the equipment component.
Minimum and maximum height should include travel of
any provided leveling feet.
11.2.9 Operational Clearance Front, Right, Left, Back,
Top Bottom (300P, 300Q, 300R, 300S, 300T) 300U) —
Enter the operational clearances on all sides of
equipment necessary for safety, operation, and
maintenance. (Right and left should be as viewed from
the front)
11.2.10 Floor Loading Diagram Reference (300V) —
Enter the reference for the floor-loading diagram
showing the static weight loads at each equipment
support point.
11.2.11 Drawing References (300W) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing
equipment. For example: Equipment Footprint Drawing
YYYYY. Submit referenced material to equipment
purchaser with this data sheet.
NOTE 6: Information regarding 300mm equipment may be
found in SEMI E72 and SEMI E63.
11.2.12 Physical Conditions Comments (300X) —
Enter any comments necessary to clarify or add to
information given for this equipment component.
SEMI E6-0303 © SEMI 1982, 2003 9
Data Sheet 300 – Physical Characteristics (See SEMI E6 Section 11)
300 Physical Characteristics
A B C D E F G
1
Equipment
Component
Shipping and
Receiving
Information
Reference
Number of
Shipping
Containers
Move-in,
Placement and
Assembly
Instructions
Reference
Number of
Cleanroom
Move-in Pieces
Biggest Move-in
Piece Length
Biggest Move-in
Piece Width
2
text text # text # mm mm.
3
4
5
6
300 Physical Characteristics
H I J K L M N
1
Biggest Move-in
Piece Height
Heaviest Move-
in Piece
Weight
Instillation ESH
Information
Reference
A
ssembled
Length
A
ssembled
Width
Minimum
A
ssembled
Height
Maximum
A
ssembled
Height
2
mm kg text mm mm mm mm
3
4
5
6
300 Physical Characteristics
O P Q R S T U
1
Assembled
Weight
Operational
Clearance Front
Operational
Clearance Right
Operational
Clearance Left
Operational
Clearance Back
Operational
Clearance Top
Operational
Clearance
Bottom
2
kg mm mm mm mm mm mm
3
4
5
6
300 Physical Characteristics
V W X
1
Floor Loading
Diagram Reference
Drawing References Physical Characteristics Comments
2
text text text
3
4
5
6