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SEMI G59-94 © SEMI 1994, 2002 4 SCIC ng/cm 2 () = Sample Concentration − Background Concentration æ è ç ö ø ÷ × Extraction Volume(mL) Total Interleaf(or Leadframe) Surface Area(cm 2 ) 14 Report The report, wh en used by …

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SEMI G59-94 © SEMI ,1994, 2002 3
11.1.3 Store the multi-ingredient standard solution and
the calibration solutions in the correct flasks and label
with the ion type and concentration.
NOTE 5: New Standard solutions for calibration are required
every 24 hours. Ensure that the flasks are cleaned with water
before refilling with a new solution.
11.2 Calibration
11.2.1 Set up the chromatograph and regenerate the
columns according to the manufacturer’s instructions
(ASTM D 4327 provides further details).
11.2.2 Run the eluent through the chromatograph until
a stable baseline chromatograph is obtained.
11.2.3 Select the injection volume recommended by
the manufacturer for each ion type and inject it into the
chromatograph. Record the chromatograph for each ion
type, and make the calibration curve for each ion (ion
concentration versus peak height or area).
NOTE 6: Peak height or area under the ion’s characteristic
curve is proportional to the concentration.
12 Procedure — Container Extraction Method
NOTE 7: The size of the extraction vessels depends on the
expected volume of water and the leadframes. The vessels
must be at least threequarters filled with water and
leadframes.
NOTE 8: The vessels must be from the same manufacturing
batch.
12.1 Extraction Vessels — Cleaning
12.1.1 Fill three vessels three-quarters of the way full
in order to reduce the amount of air in the vessel and
attach the caps.
12.1.2 Place the vessels in a water bath at > 95°C for
30 ± 2 minutes.
12.1.3 Remove the vessels from the bath and rinse out
five (5) times with DI water.
12.2 Interleaf Contamination Extraction
12.2.1 Place the interleaf sample in one of the cleaned
vessels.
NOTE 9: The interleafing may be cut in order to ease loading
into the vessels.
12.2.2 Add 100 mL of DI water and cap the vessels.
Place a similar amount of water into the other cleaned
vessel and attach the cap.
NOTE 10: 100 mL is the recommended volume of water;
however, the samples must be covered with water.
12.3 Leadframe Contamination Extraction
12.3.1 Place five (5) leadframe strips in one of the
vessels cleaned per Section 12.1.
NOTE 11: The leadframes may be cut as required to ease
entry into the vessel.
12.3.2 Cover with DI water and cap.
NOTE 12: 25 mL is the recommended volume of water for a
small volume of leadframe samples, 100 mL for a large
volume. The samples must be covered with water.
12.3.3 Place a similar volume of water in one of the
vessels cleaned per Section 12.1.
12.4 Extration
12.4.1 Place the three (3) vessels into the water bath at
T ≥ 95°C, for 30 ± 2 minutes.
12.4.2 Remove the vessels from the bath and allow to
cool.
12.4.3 Remove the leadframes and interleafing
material from their respective vessel and recap.
13 Measurements and Calculations
13.1 Chromatograph Preparation and Calibration
13.1.1 Prepare the chromatograph for operation by
regenerating the columns according to the
manufacturer’s recommendations.
13.1.2 Run the eluent through the chromatograph until
a stable baseline calibration is established.
13.2 Testing
13.2.1 Inject the recommended sample size of solution
from the interleaf extraction into the chromatograph
and obtain the chromatogram.
13.2.2 Repeat 13.1 and then inject the recommended
sample size from the leadframe extraction and obtain
the chromatogram.
13.2.3 Repeat 13.1 and then inject the recommended
sample size from the water-only vessel and obtain the
chromatogram of the background sample.
NOTE 13: The time from extraction to insertion of the sample
into the chromatograph shall not exceed eight (8) hours.
13.3 Results
13.3.1 Sample concentrations are determined from the
calibration curves for each ion type.
13.3.2 The surface concentration of ionic contaminants
(SCIC) for each ion type is given by the following
equation:
SEMI G59-94 © SEMI 1994, 2002 4
SCIC ng/cm
2
()
=
Sample
Concentration
−
Background
Concentration
æ
è
ç
ö
ø
÷ ×
Extraction
Volume(mL)
Total Interleaf(or Leadframe) Surface Area(cm
2
)
14 Report
The report, when used by a vender to certify a user’s
requirement, or by a user at incoming inspection, shall,
at least, contain the following information. Additional
information shall be agreed between user and supplier.
14.1 Vendor’s lot numbers for leadframes and interleaf
material, and date of shipment.
14.2 Sample conditioning conditions.
14.3 Test conditions.
15 Related Documents
15.1 SEMI Specifications
SEMI G52 — Standard Test Method for Measurement
of Ionic Contamination on Semiconductor Leadframes
(Proposed)
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their responsibility.
Copyright by SEMI ® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden, without express writte
n
consent of SEMI.
SEMI G60-94 © SEMI 1994, 2002 1
SEMI G60-94 (Reapproved 0302)
TEST METHOD FOR THE MEASUREMENT OF ELECTROSTATIC
PROPERTIES OF SEMICONDUCTOR LEADFRAME INTERLEAFING
MATERIALS
The test method was technically approved by the Global Assembly and Packaging Committee and is the
direct responsibility of the Japanese Assembly and Packaging Committee. Current edition approved by the
Japanese Regional Standards Committee on November 26, 2001. Initially available at www.semi.org on
December 2001; to be published March 2002. Origianlly published in 1994.
1 Purpose
1.1 This test method describes a procedure to
determine the electrostatic properties of interleaf
materials in film or sheet form by measuring the
magnitude and polarity of an induced charge and the
time required for complete dissipation of the charge.
NOTE 1: The method is independent of volume or insulation
resistivities.
2 Scope
2.1 This test method is suitable for all interleaf
materials and may be used by vendors at outgoing
inspection, or customers at incoming inspection.
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 None
4 Terminology
4.1 electrostatic properties — For the purposes of this
document, electrostatic properties are defined as the
ability of a material, when grounded, to dissipate a
charge induced onto the surface of that material.
4.2 interleaf (for semiconductor leadframes) — A
paper or plastic film placed between layers of
semiconductor leadframe strips to prevent
transformation.
5 Summary of Method
The method involves charging the interleaf material to a
high voltage and observing the time required for the
charge to be dissipated using an electrometer.
6 Significance
6.1 This procedure evaluates the electrostatic build up
and dissipation properties of the interleaf materials
which may affect the reliability and efficiency of
devices.
7 Interferences
7.1 The interleaf material and the leadframes must only
be touched while wearing double-layer gloves with
polyethylene outer gloves in order to avoid
contamination which may change the electrostatic
properties.
7.2 The test is not valid if the interleafing material is
dusty.
8 Equipment
8.1 Aluminum panel measuring 127 mm × 76.2 mm ×
3.2 mm (5" × 3" × 1/8" ).
8.2 High voltage source, 0 to 15 KV, positive and
negative.
8.3 Electrometer with a full scale reading of 0.01, 0.1,
1.0, 10, and 100, or a recording oscilloscope with a
response of 1 microsecond per division, or equivalent.
8.4 Fabricated electrostatic test chamber with
electrostatic test unit, illustrated in Figure 1.
8.5 Single channel, pen type recorder with speeds of
12.7 mm, 25.4 mm, 50.8 mm, 101.6 mm, and 203.2 mm
(0.5" , 1.0" , 2.0" , 4.0" , and 8.0" ) per minute and per
second.
8.6 Four RG 114/U cables for connections between the
detector and the electrometer and between the
electrometer and the recorder. The nominal lengths of
the cables are:
8.6.1 127 mm (5" ) for the connections between the
detector and the output connector on the electrostatic
test chamber.
8.6.2 863.6 mm (34" ) between the electrostatic test
chamber and the electrometer exclusive of the
connectors.
8.6.3 800.1 mm (31.5" ) between the electrometer and
the recorder (2 required).