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SEMI G77-0699 © SE MI 1999 3 horizontal datum plane y 46 = 7 1 ± 1 y 44 ≤ 53 z 49 ≤ 8 z 48 ≥ 15 facial datum plane z 47 = 210 (330 ) ± 1 y 5 ≤ 200 y 1 = 193 ± 0.25 z 43 = 1 z 8 ≥ 15 top of x,y dimension control area robo…

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SEMI G77-0699 © SEMI 1999 2
4.6 robotic handling flange horizontal projection
on the top of the frame cassette for lifting and rotating
the frame cassette.
4.7 tape frame the frame which applies the wafer
tape to the wafer and retains the wafer.
4.8 wafer tape an adhesive plastic tape which
retains the wafer or diced chip. It is used between the
mounting process and die-bonding process.
5 Ordering Information
5.1 Intended use This document is intended to
specify 300 mm wafer frame cassettes over a
reasonable lifetime of use, not just those in new
condition. For this reason, the purchaser needs to
specify a time period as well as the number and type of
uses to which the frame cassettes will be put. It is under
these conditions that the frame cassettes must remain in
compliance with the requirements listed in Section 6.
6 Requirements
6.1 Dimensions The frame cass ette dimensions are
shown in Figures 1 through 5 and listed in Table 1. In
all figures, the heaviest lines are used for surfaces that
have tolerances (not surfaces that have only maximum
or only minimum dimensions).
6.2 Tape Frame Orientation The tape frames must
be horizontal when the frame cassette is placed on the
load port.
6.3 Center of Tape Frames When a tape frame is
stored in the frame cassette, the center of the tape frame
should be within the radius of 2 mm from the center of
the junction of the bilaterial datum plane and the facial
datum plane.
6.4 Top and Rear Covers Both top and rear covers
are required. With the covers in place, the frame
cassette must conform to all dimensions listed in Table
1.
6.5 Number of Slots The frame cassette has an
option of either 13 or 25 slots.
6.6 Kinematic Couplings (optional) The physical
alignment mechanism from the frame cassette to the
tool load port (or a nest on a vehicle or in a stocker)
consists of features (not specified in this document) on
the top entity that mate with three or six pins
underneath as defined in SEMI E57. Most of the
dimensions of the frame cassette are determined with
respect to the three orthogonal datum planes defined in
that standard: the Horizontal Datum Plane, the facial
datum plane, and the bilateral datum plane.
6.6.1 The three features that mate with the pins must
provide a lead-in capability that corrects a frame
cassette misalignment of up to 10 mm in any horizontal
direction, although 15 mm is recommended for
ergonomic reasons. However, it is recommended that
robotics placing cassettes on kinematic couplings use as
little of this lead-in capability as possible to avoid wear.
6.7 Human Handles (optional) All handles for use
by humans must either be contained within the
maximum outer dimensions of the frame cassette, be
detached when not in use, or be retractable into the
maximum outer dimensions when not in use. Handles
for use by humans (if present) must follow SEMI S8
and shall require the use of both hands (each using a
full wrap-around grip, given the minimum clearance
requirement in SEMI E15.1). Automation handling
features shall not be considered for dual purpose unless
they are designed to meet SEMI S8.
6.8 Robotic Handling Flange (optional) On the top
of the frame cassette is an optional robotic handling
flange for manipulating the frame cassette.
6.9 Bottom Rails On the bottom of the frame
cassette are two rails, one on each side for use with
roller conveyors.
6.10 Frame Restraint The frame cassette must
provide a feature that prevents tape frames from
slipping out of the cassette during transport. The feature
must conform to all dimensions listed in Table 1.
6.11 Frame Cassette Sensing Pads (optional)
When the cassette is fully down, the frame cassette
sensing pads (see Figure 5) must be z2 above the
horizontal datum plane. It is recommended that the
areas surrounding all of the frame cassette sensing pads
be designed in conjunction with the features that mate
with the kinematic coupling pins so that a mechanical
sensor pin cannot interfere with the lead-in function of
the kinematic couplings.
6.12 Cassette Stacking (optional) The frame
cassette may have optional features to allow two 13
capacity cassettes to be stacked on top of each other.
This option is only available for cassettes without a
robotic handling flange.
SEMI G77-0699 © SEMI 19993
horizontal
datum plane
y
46 = 71
±
1
y
44
≤
53
z
49
≤
8
z
48
≥
15
facial
datum plane
z
47
= 210
(330 )
±
1
y
5
≤
200
y
1 = 193
±
0.25
z
43 = 1
z
8
≥
15
top of x,y
dimension
control area
robotic handling
flange (optional)
human handle
(optional)
+0
-1
rear cover
y
2 =193
±
0.25
top cover
z
1
≤ 183
(303 )
bottom
rail
Figure 1
Side View of Frame Cassette
horizontal
datum
plane
x
46 = 71
±
1
x
44
≤
53
z49
≤
8z48
≥
15
bilateral
datum plane
z43 = 1
z41
≥
1
z8
≥
15
z47
= 210
(330 ) ±
1
x57
≤
187
x
1
≤
203.5
x
56 = 194.75
±
0.25
x2
≤
240(at human handle)
z4 = 33
z3
≤
23
z7
≥
10
robotic handling
flange (optional)
human handle
(optional)
x
4 = 191.5
±
0.3
187
≥
x
3
≥
177
+0
-1
z9 = 215
(stacking)
13 slot cassette
stacking (optional)
Figure 2
Front View of Frame Cassette
SEMI G77-0699 © SEMI 1999 4
horizontal
datum plane
bilateral
datum plane
z
4 = 33
bottom nominal
tape frame
seating plane
z
5 = 10
z
12 = 0
±
0.5
(height of tape frame bottom)
z
6
≥
5
z
3
≤
23
z
8
≥
15
z
43 = 1
+
0
−
1
z
41
≥
1
Figure 3
Detail of Film Frame Supports
bilateral
datum plane
facial
datum
plane
y
1 = 193
±
0.25
x
1
≤
203.5
x
2
≤
240 (at human handle)
human
handle
(optional)
x
41 = 30
± 1
x
42 = 50
±
1
y47
≥
58
y
46 = 71
±
1
y
45
= 65.3
±
1
x
45
= 65.3
±
1
x
43 = 50
±
1
x
44
≤
53
x
46 = 71
±
1
x
47
≥
58
y
44
≤
53
y
41 = 30
±
1
(16x)
θ = 45
±
0.5
°
y5
≤
200
front side where tape
frames are accessed
top flange
(optional)
rear cover
Figure 4
Top View of Frame Cassette