semi合集-English.pdf - 第649页
SEMI E85-0705 © SEMI 1999, 2005 3 6.3.2 If the user specifies Option D, the user must specify wh ich leng th of exclusion volume will be u sed in the interbay trans port as defined by dimension D10 i n Tables 1 a n d 2. …
SEMI E85-0705 © SEMI 1999, 2005 2
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer
Carriers
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
NOTE 1: For many of the used terms, see SEMI E15.1.
5.1 Abbreviations and Acronyms
5.1.1 AMHS — Automated Material Handling Systems
5.2 Definitions
5.2.1 active interbay transport system — an interbay transport system that transfers the carrier to and from the
stocker interbay load port itself using robotics that are located on the transport.
5.2.2 drive through interbay transport (DT) — an interbay transport system where the track runs internal to the
stocker boundary for the entire width of the stocker (Option C application defined in ¶7.5.3).
5.2.3 external stocker load port — an interbay load port that is external to the stocker equipment boundary similar
to a shelf or ledge on the stocker.
5.2.4 horizontal transfer interbay transport (HT) — an interbay transport system where a section of the track
transfers or slides into an opening in the side of the stocker to present a passive interbay transport system to the
stocker robot (Option C application defined in ¶7.5.3).
5.2.5 interbay load port — the interface location on a stocker where the interbay transport places wafer carriers to
allow the stocker to store the carriers.
5.2.6 interbay transport system — is defined as the track and vehicle (if applicable) that transports the carrier to and
from the interbay stockers.
5.2.7 internal stocker load port — an interbay load port that is recessed from the stocker equipment boundary (a
cavity or cutout in the stocker).
5.2.8 overhead delivery — an interbay transport system that transfers the carrier to and from the stocker interbay
load port itself from directly above the load port (raises and lowers the carrier to the load port).
5.2.9 passive interbay transport system — an interbay transport system that requires the stocker to transfer the
carrier to and from the stocker interbay load port (stocker has robotics that transfers the carrier).
5.2.10 stocker — an AMHS storage device.
6 Ordering Information
6.1 Per §6 of SEMI E15, except for ¶6.1.3 and ¶6.1.4.
6.2 The user and AMHS supplier will jointly own the responsibility of defining the height of the interbay load port
defined by dimension H (the distance from the horizontal datum plan to the raised floor).
6.3 The user must specify which of the options (defined in ¶7.5) is required for each interbay load port. The user
must also specify which carrier will be used: front-opening box or open cassette.
6.3.1 If the user specifies Option C, the user must also specify:
a) Which type of interbay transport system will be used. Dimensions A1 and S do not apply if it is a drive through
(DT) type. Dimensions A1 and S do apply if it is a horizontal transfer (HT) type (defined in ¶7.5.3).
b) Which height of exclusion volume in the stocker will be used defined as dimension T3 in Tables 1 and 2.
c) Which length of center exclusion volume in the interbay transport will be used defined as dimension D10 in
Tables 1 and 2.
SEMI E85-0705 © SEMI 1999, 2005 3
6.3.2 If the user specifies Option D, the user must specify which length of exclusion volume will be used in the
interbay transport as defined by dimension D10 in Tables 1 and 2.
6.3.3 If the user specifies Option E, the user must specify which length of exclusion volume will be used in the
interbay transport as defined by dimension D10 in Tables 1 and 2.
6.3.4 If the user specifies option F, the user must specify top (robotic flange pickup) or bottom access (secondary
kinematic pins pickup).
7 Requirements
7.1 The dimensional requirements for the load port of a storage device and the interbay transport system are given
in Table 1 for front-opening box and Table 2 for open cassette.
7.2 The carriers shown in these figures are intended to represent any type of carrier (open cassette or front-opening
box). Figure 11 is only applicable for open cassette type carriers.
7.2.1 Except for option F, the carrier shall be loaded and unloaded with its front parallel to and away from the load
face plane as illustrated in Figures 1–11.
7.3 The wafers in the front-opening box are to be oriented horizontally face up with zero nominal tilt at the time
they are placed on the load port. The tolerance in the horizontal plane is determined by the registration and
alignment feature between the carrier and the load port, as specified in SEMI E57. The wafers in the front-opening
open cassette are to be oriented horizontally face up with 2 degree nominal tilt at the time they are placed on the
load port.
7.4 Dimension H of the load port is to be specified by the user and the AMHS supplier (¶6.2). The height of the
interbay transport system is to be fully configurable using the track hangers. The precision with which the interbay
transport delivery system height must be maintained is dictated by the needs of the interbay load port.
7.5 AMHS interbay equipment load ports must conform to one of the following configuration options (see ¶6.3).
7.5.1 In Option A, an active transport loads a carrier to an internal stocker position. The stocker interbay load port
must therefore maintain the center exclusion volume below the HDP defined in ¶7.6 and shown in Figures 1 and 10.
This exclusion volume in the stocker load port facilitates carrier delivery from an active interbay transport system.
The interbay transport may transfer the carrier to the passive stocker using the SEMI standard carrier handling
features, which are compatible with the exclusion volumes in the stocker defined in this standard. Examples include
the secondary set of kinematic pins and the top robotic flange. The use of the primary kinematic pins is reserved for
the stocker load port. The two front kinematic pins and a guide are used to interface with a SEMI defined accurate
outer carrier surface defined in SEMI E47.1 (front-opening box) or SEMI E1.9 (open cassette). Refer to Figure 1
and the Related Information for detail. The open volume internal to the stocker above the HDP is defined by
dimensions A1, S, and a clearance C3 above the maximum height of the carrier.
7.5.2 In Option B, an active transport loads a carrier to an external stocker position. The stocker interbay load-port
must therefore maintain the two fork-lift or con-veyor exclusion volumes as defined in SEMI E15.1 to allow for an
active interbay transport system to transfer a carrier to the fork-lift or conveyor rails. The stocker interbay load port
must also be open from above to facilitate delivery from an overhead transport system. The open volume required
for vertical delivery is de-fined by a projection of the stocker load port area. The stocker interbay load port features,
exclusion volumes, and dimensions are defined in SEMI E15.1 with the exception of dimension S and H. This
option is illustrated in Figure 2.
7.5.3 In Option C, a passive transport presents a carrier to an internal stocker position. The passive interbay
transport must therefore maintain the center exclusion volumes defined in ¶7.6 and shown in Figures 3, 4, and 10 in
order to facilitate automatic carrier transfer by the active stocker. The stocker may transfer the carrier to the passive
interbay transport system using the SEMI standard carrier handling features, which are compatible with the
exclusion volumes in the interbay transport system defined in this standard. Examples include the secondary set of
kinematic pins and the top robotic flange. The use of the primary kinematic pins is reserved for the interbay
transport system. The two front kinematic pins and a guide are used to interface with a SEMI defined accurate outer
carrier surface defined in SEMI E47.1 (front-opening box) or SEMI E1.9 (open cassette). Refer to Figure 3 and the
Related Information for detail. The open volume internal to the stocker to allow for the interbay transport to enter is
defined by dimensions T3 and C5. This option is illustrated in Figures 3 and 4.
SEMI E85-0705 © SEMI 1999, 2005 4
7.5.3.1 Option C allows for two different types of interbay transport (¶6.3.1). The first type is a drive though (DT)
interbay transport that will drive through the entire length of the stocker as illustrated in Figure 3. Dimensions A1 is
therefore not applicable for this type of Option C interbay transport delivery. The other type of interbay transport is
a horizontal transfer (HT) were a section of the track slides or advances into a predefined open volume in the side of
the stocker as illustrated in Figure 4. Dimensions A1 and S are applicable for this type of Option C interbay
transport delivery.
7.5.3.2 Option C prime (C’) is different from Option C in that the pins used to transfer the carrier are different. In
Option C’, the transport vehicle uses the two front secondary, and single rear primary kinematic pins. This enables
the stocker end-effector to use the two front primary pins and be of a wider configuration (see Figure 3a). All
elevation dimensions for C’ are the same as for Option C.
7.5.4 In Option D, a passive transport presents a carrier to an external stocker position. The passive interbay
transport must maintain the center exclusion volume shown in Figures 5 and 10 to allow for the stocker to use the
secondary kinematic pins or top robotic flange to transfer the carrier. No open volume internal to the stocker is
required.
7.5.4.1 Option D prime (D’) is different from Option D in that the pins used to transfer the carrier are different. In
Option D’, the transport vehicle uses the two front secondary, and single rear primary kinematic pins. This enables
the stocker end-effector to use the two front primary pins and be of a wider configuration (see Figure 4a). All
elevation dimensions for Option D’ are the same as for Option D.
7.5.5 In Option E, a passive transport presents a carrier to an external stocker position. The passive interbay
transport must maintain the side fork-lift/conveyor rail exclusion volumes shown in Figure 6 to allow the stocker to
use the fork-lift/conveyor rails to transfer the carrier. No open volume internal to the stocker is required.
7.5.6 In option F and F’ the carrier is oriented with the front of the carrier perpendicular to the load face plane by a
passive transport for pickup by an active stocker. In option F the transport uses the kinematic coupling pins (all 3
may be used) and the stocker uses either the secondary kinematic coupling pins (all 3 accessible) or the top robotic
flange for pickup. In Option F’ (F Prime) the transport uses the kinematic coupling pins, the secondary kinematic
coupling pins or the conveyor runners, and the stocker uses the top robotic flange for pickup.
7.6 The center exclusion volume below the horizontal datum plane of the stocker for Option A (¶7.5.1) or interbay
transport system for Options C and D (¶7.5.3 and ¶7.5.4), is defined by dimensions H2, A2, and D (Figure 1 and
10). For Options C (¶7.5.3) and D (¶7.5.4), there are additional requirements that the center exclusion volume,
defined by H2 and A2 extend from the facial datum plane a distance D10 (¶6.3.1 and ¶6.3.2), increase both in depth
de-fined by dimension H4 and in width defined by dimension A3 from the plane defined by dimension D10
extending outwards for the rest of the interbay transport system. The conveyor flange exclusion volume below the
horizontal datum plane of the interbay transport system (¶7.5.4), is defined by dimensions H2, H4, A6, A8, and D10
(Figure 6). The center exclusion volume below the horizontal datum plane of the stocker for option F is defined by
Figure 10, “Exclusion zone detail for option F”. No exclusion volumes are required for option F’ since stocker
access is with the top robotic flange only. These exclusion volumes need to be open only during the carrier handoff
between the stocker and the interbay transport system. For example, the stocker can temporarily occupy these
exclusion volumes when transferring the carrier from the interbay load port to an internal shelf location.
7.7 Clearance C3 in Option A is defined with respect to the maximum dimensions of the carrier (defined in SEMI
E47.1 for a box or in SEMI E1.9 for an open cassette), not to the rectangular wafer carrier envelope (defined in
SEMI E15).
7.8 Dimension S specifies the required range for spacing between carrier centroids.
7.9 For active interbay transports (Option A) and passive interbay transports (Options C, D, and E and F), the
communication method will be defined by SEMI E84 (same as OHT), and the available SEMI E84 connector areas
are defined by the following dimensions, and are illustrated in Figure 9.
Dimensions of the SEMI E84 connector zone are as follows:
Width (measured from BDP) = 225 mm
Depth (measured from Stocker facial plane) = 200 mm
Height (measured from HDP) = 300 mm