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SEMI G81-0703 © SEMI 2000, 2003 3 Item Name Data Type Size Description StepSizeX Float 4 The distance in m icrons from a reference point on one devi ce to the sam e reference point on the adjacent device in the X directi…

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SEMI G81-0703 © SEMI 2000, 2003 2
6.2 Also this document does not define communication protocol at all. If an implementation requires transfer data
items defined in the following chapter, it is necessary to prepare a custom communication protocol document or to
comply with the appropriate SEMI communication standards.
6.3 This document places no special requirements on the transmission, file naming conventions, storage, or
archiving of substrate maps.
7 Description
7.1 The substrate map data item specifications defined in this document are shown in Table 2. The columns in this
table are described in the following sections.
7.1.1 Item Name Column — the name by which the data item is referenced.
7.1.2 Data Type Column — the type of the data as defined in Table 1.
Table 1 Data Types and Sizes
Type Size Definition
String 0–32767 A string of ASCII characters from zero to “Size” characters in length.
Integer 1,2,4 An integer value that may be represented by “Size” bytes. E.g., if Size = 2 then the value may
be –32768 to 32767.
Float 4 IEEE single-precision 32-bit floating point type [IEEE 754-1985]
7.1.2.1 Generic data type definitions are used so that the data item definitions may be shared by several other
standards, which may have their own distinct data type representations.
7.1.3 Size Column — the maximum number of characters that may be used to represent the data.
7.1.4 Description Column — describes what the data item is and what value restrictions it has.
7.2 Coordinate System Conventions
7.2.1 Whenever reference is made to rows, columns, X or Y they are defined as follows.
7.2.2 The X axis is the horizontal axis from left to right when the substrate is rotated according to [Orientation] in
Table 2. Columns increase along the X axis. Column zero is the column just before the left (or right, depending on
OriginLocation) column containing measured devices.
7.2.3 The Y axis is the vertical axis from bottom to top when the substrate is rotated according to [Orientation] in
Table 2. Rows increase along the Y axis. Row zero is the row just before the extreme top (or bottom depending on
OriginLocation) row containing measured devices.
7.2.4 Columns increase along the X-axis. Rows increase along the Y-axis.
Table 2 Substrate Map Data Items
Item Name Data Type Size Description
FormatRevision String 256 Specifies the exact name and revision of the format used to represent substrate map
data. This field can be used by a parser to automatically determine the format of the
remaining substrate map data.
ProductId String 256 Product identifier
LotId String 32 Production lot identifier for this data.
Orientation Integer 2 The orientation of the substrate in relation to the map data.
This variable will increase in the right (clockwise) direction from 0° .
This item may be used to specify that the map data be rotated. Since the map data is
rectangular, only the values 0, 90, 180, and 270 are allowed in that case.
WaferSize Integer 2 Diameter of Wafer in millimeters.
DeviceSizeX Float 4 Device size on X axis in microns
DeviceSizeY Float 4 Device size on Y axis in microns
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Item Name Data Type Size Description
StepSizeX Float 4 The distance in microns from a reference point on one device to the same reference
point on the adjacent device in the X direction. StepSizeX – DeviceSizeX is equal to
the “street” width between device in the X direction.
StepSizeY Float 4 The distance in microns from a reference point on one device to the same reference
point on the adjacent device in the Y direction. StepSizeY – DeviceSizeY is equal to
the “street” width between device in the Y direction.
FrameId String 32 A character code that may be printed or encoded on the substrate, which uniquely
identifies the substrate, and can be used to correlate the map with physical substrate.
Rows Integer 2 The number of rows of (measured) device matrix on substrate, that is the number of
devices on the Y-axis of the map data. It is required if the type of the map data is
simple array structure.
Columns Integer 2 The number of columns of (measured) device matrix on substrate, that is the number
of devices on the X-axis of the map data. It is required if the type of the map data is
simple array structure.
MapType String 16 Possible variations of data structure, one of which is to be chosen for passing map
data.
This document allows formats of the three types shown below.
[MapType] = ‘Row’: Row/Column Format
Expression using the coordinate showing the head of a row as well as the number of
devices in the row and the bin data of the relevant row.
Each bin data is attached in succession to each row.
Example: X, Y, N, BIN, BIN, BIN, ..., BIN
(N: Number of devices)
[MapType] = ‘Array’: Array Format
All of a substrate’s bin data is expressed in a one-dimensional array form.
Left to right and top down substrate map data will be set in a one-dimensional array.
Example: BIN, BIN, BIN, ...
[MapType] = ‘Device’: Coordinate Format
Expressed by XY coordinates of each device on a substrate as well as bin data.
Even when using this format, to prevent omission of data, it is best to set bin data for
all devices tested in front end processing.
Example: X, Y, BIN, ..., X, Y, BIN
The MAP coordinates set here are values for the state with the substrate orientation
flat rotated to the angle given by [Orientation].
Appendix 1 contains diagrams that illustrate each [MapType].
NOTE: MAP coordinates can also be negative values.
HeadingDeviceX Integer 2 X coordinate of the heading device of a row in the map data.
This item is used when [MapType] = ‘Row’.
HeadingDeviceY Integer 2 Y coordinate of the heading device of a row in the map data.
This item is used when [MapType] = ‘Row’.
DeviceRow Integer 2 Number of the devices on a row in the map data.
This item is used when [MapType] = ‘Row’.
DeviceX Integer 2 X coordinate of the device in the map data.
This item is used when [MapType] = ‘Device’.
DeviceY Integer 2 Y coordinate of the device in the map data.
This item is used when [MapType] = ‘Device’.
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Item Name Data Type Size Description
BinType String 16 The format in which the bin code for each device will be represented in the [Map].
The choices are as follows:
[BinType] = ‘Ascii’: Single ASCII character (1 byte per device)
[BinType] = ‘Decimal’: 3 digit integer from 000 to 255 (1 byte per device)
[BinType] = ‘HexaDecimal’: 2 digit Hexadecimal value from 00 to FF (1 byte per
device)
[BinType] = ‘Integer2’: 4 digit Hexadecimal value from 0000 to FFFF (2 bytes per
device)
NOTE 1: For readability when [BinType] = ‘Decimal’ there must be spaces added
between each device and each row of devices should be on a new line.
NOTE 2: When [BinType] = ‘Ascii’ or ‘Hexadecimal’ or ‘Integer2’ there must not be
spaces between each device and for readability, each row should be on a new line.
ReferenceDeviceX Integer 2 X coordinate of the reference device to align device matrix on physical substrate with
the map data.
ReferenceDeviceY Integer 2 Y coordinate of the reference device to align device matrix on physical substrate with
the map data.
RefDevicePosX Float 4 Offset in µ m of the center of a reference device in the X-direction from the center of
substrate.
RefDevicePosY Float 4 Offset in µ m of the center of a reference device in the Y-direction from the center of
substrate.
MapName String 32 A name that describes the purpose of the bin codes in the map. Possible examples
include: “CellStatus”, “DefectCode”, “MarkGrade”, “PackageGrade”, “SortGrade”.
MapVersion String 32 The version is used to distinguish between multiple versions of maps for the same
substrate with the same MapName.
BinCode Integer 1 A bin category from 0 to 255, other that the value assigned to [NullBin], that may be
assigned to a device. It should be represented according to [BinType].
NOTE: BinCode and NullBin may take on values from 0 to 255 is represented as
Ascii, Decimal, Hexadecimal, or Binary, according to BinType. See definition of
BinType for more information.
BinCount Integer 4 The number of devices on the substrate with the specified [BinCode].
BinQuality String 16 Describes the quality of the specified [BinCode]. The following values are reserved
for the data item:
“Pass” – Indicates a quality that has commercial value
“Fail” – Indicates a quality that does not have commercial value
Other values defined by an application.
BinDescription String 256 A description of the specified [BinCode], e.g. “100MHz”.
NullBin Integer 1 Code to indicate no device or not measured device in [Data]. It should be represented
according to [BinType].
SupplierName String 256 Name of the supplier of the substrate.
OriginLocation Integer 1 Coordinate system on substrate to address devices. Location of the datum point or the
origin of the coordinates shall be one of the following:
0 = Center device* – top side
1 = Upper right – top side
2 = Upper left – top side
3 = Lower left – top side**
4 = Lower right – top side
5 = Center device* – bottom side
6 = Upper right – bottom side
7 = Upper left – bottom side
8 = Lower left – bottom side
9 = Lower right – bottom side
* Center device is X = (row count + 1), Y = (column count + 1)/2.
** Default value is 3 (= Lower left – top side) if this item is not present.