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SEMI G85-0703 © SEMI 2001, 2003 4 Name Item or Attribute Defined In Mandatory or Optional Default Value BinQuality Attribute Map Data Items Optional “” BinDescription Attribute Map Data Items Optional “” FrameId Attribut…

SEMI G85-0703 © SEMI 2001, 2003 3

might be used for example to represent versions of the

map after each process step.

7.6.4 The Row items are defined as XML CDATA

section. The example below shows the Data item for a

binary map with two rows and two columns.

<Data>

</Data>

7.6.4.1 A CDATA section contains data that should not

be parsed by the XML parser. After <! [CDATA[, only

the string ]]> will be interpreted by the XML parser. If

this string occurs in the actual data (for example in an

ASCII map) then it must be replaced by the string

]]> so that the XML parser will not interpret it as the

end of the CDATA section.

7.6.4.2 Each Row item specifies the BinCode for each

column in the row in a format that depends on the

BinType attribute.

7.6.4.3 The Row items must match the actual rows on

the substrate being mapped. The first row is the

topmost row as viewed with the substrate oriented

according to the value of Orientation.

7.6.4.4 The number of Row items must match the

Rows attribute if specified.

7.6.4.5 The number of columns in each Row item must

match the Columns attribute if specified.

Table 1 Items and Attributes Used

Name Item or

Attribute

Defined In Mandatory or

Optional

Default Value

xmlns Attribute Map Data Format Mandatory Must be “http://www.semi.org”

NullBin Attribute Map Data Items Mandatory No default

Map Item Map Data Format Mandatory No default

Device Item Map Data Format Mandatory No default

Data Item Map Data Format Mandatory No default

Row Item Map Data Format Mandatory No default

FormatRevision Attribute Map Data Items Optional Latest version of this standard

ProductId Attribute Map Data Items Optional “”

LotId Attribute Map Data Items Optional “”

Orientation Attribute Map Data Items Mandatory 0

WaferSize Attribute Map Data Items Optional 0

DeviceSizeX Attribute Map Data Items Optional 0

DeviceSizeY Attribute Map Data Items Optional 0

StepSizeX Attribute Map Data Items Optional 0

StepSizeY Attribute Map Data Items Optional 0

CassetteId

MagazineId

Attribute Map Data Items Optional “”

Rows Attribute Map Data Items Optional Can be derived from number of Row items

Columns Attribute Map Data Items Optional Can be derived from Row items

BinType (See Note 3.) Attribute Map Data Items Mandatory “ASCII”

ReferenceDevice Item Map Data Format Mandatory

(See Note 1.)

No default

ReferenceDeviceX Attribute Map Data Items Mandatory

(See Note 1.)

No default

ReferenceDeviceY Attribute Map Data Items Mandatory

(see Note 1)

No default

RefDevicePosX Attribute Map Data Items Optional 0.0

RefDevicePosY Attribute Map Data Items Optional 0.0

MapName Attribute Map Data Items Optional “”

MapVersion Attribute Map Data Items Optional “”

BinCode Attribute Map Data Items Optional 0

BinCount Attribute Map Data Items Optional 0

SEMI G85-0703 © SEMI 2001, 2003 4

Name Item or

Attribute

Defined In Mandatory or

Optional

Default Value

BinQuality Attribute Map Data Items Optional “”

BinDescription Attribute Map Data Items Optional “”

FrameId Attribute Map Data Items Optional “”

SupplierName Attribute Map Data Items Optional “”

OriginLocation Attribute Map Data Items Mandatory 0 (Center topside)

CreateDate Attribute Map Data Items Optional “”

Status Attribute Map Data Items Optional “”

Bin Item Map Data Format Optional No default

SlotNumber Attribute Map Data Items Optional 0

SubstrateNumber Attribute Map Data Items Optional 0

GoodDevices Attribute Map Data Items Optional 0

SubstrateType Attribute Map Data Items Mandatory

SubstrateId Attribute Map Data Items Mandatory

LastModified Attribute Map Data Items Optional

NOTE 1: There must be at least one ReferenceDevice item containing the ReferenceDeviceX and ReferenceDeviceY attributes.

NOTE 2: A substrate must have one and only one of these identifiers depending on the substrate type.

NOTE 3: Since XML is an ASCII only format BinType may only take the ASCII representation values “ASCII”, “Decimal”, “HexaDecimal”,

and not “Binary”.

SEMI G85-0703 © SEMI 2001, 2003 5

APPENDIX 1

EXAMPLE MAP DATA FILES

NOTICE: The material in this appendix is an official part of SEMI G85 and was approved by full letter ballot procedures on

March 12, 2003.

2 These examples are for a wafer map identified by WaferId. Other substrate types may also be represented. See Table 1.

A1-1 Simple ASCII Wafer Map

A1.1 This example illustrates the simplest possible

wafer map. It uses ASCII bin codes and contains only

the required data items.

<? xml version=" 1.0" ? >

<Map xmlns: " http://www.semi.org"

SubstrateType=" Wafer"

SubstrateId=" ZSDGS88DF" >

<Device

Orientation=" 0"

BinType=" Ascii"

NullBin=" "

OriginLocation=" 1" >

<Data >

</Data>

</Device>

</Map>

A1-2 Detailed Binary Wafer Map

A1-2.1 The example below illustrates the use of binary

bin codes and contains not only the required data items,

but also some data items provided by the supplier.

<? xml version=" 1.0" ? >

<Map xmlns: " http://www.semi.org"

SubstrateType=" Wafer"

SubstrateId =" ZSDGS88DF"

FormatRevision=" SEMI G85-0703" >

<Device

ProductId=" 854CS1C"

LotId=" wksfd87dcj37"

Orientation=" 0"

DeviceSizeX=" 343.8"

DeviceSizeY=" 373.1"

Rows=" 6"

Columns=" 6"

BinType=" HexaDecimal"

FrameId=" KJKSDFK45"

NullBin=" FF"

SupplierName=" Company X"

OriginLocation=" 1"

CreateDate=" 2002110112000000"

LastModified=" 2003010612000000"

Status=" Product" >

<ReferenceDevice

ReferenceDeviceX=" 2"

ReferenceDeviceY=" -3"

RefDevicePosX=" 2"

RefDevicePosY=" 2"

<ReferenceDevice

ReferenceDeviceX=" 4"

ReferenceDeviceY=" -5"

RefDevicePosX=" 2"

RefDevicePosY=" 2"

<Bin

BinCode=" 02"

BinQuality=" Pass"

BinDescription=" 500MHz"