semi合集-English.pdf - 第658页

SEMI E85-0705 © SEMI 1999, 2005 12 Active Transport Delivers a Carrier to an Internal Stocker Position Front View NOTE 2: Interba y transport or vehicle us es prim ary se t of kinem atic pins. Top View NOTE 1: S tocker r…

100%1 / 7923
SEMI E85-0705 © SEMI 1999, 2005 11
Active Transport Delivers a Carrier to an Internal Stocker Position
Stocker
Transport
Vehicle
H
2
Horizontal
Datum Plane
D
5
H
4
D
10
Option D
Passive
Vehicle
Front View
NOTE 2: Interbay transport or
vehicle uses primary set of
kinematic pins.
NOTE 3: Interbay transport must
maintain same exclusion volume as
depicted in Figure 1 (Section 7.6).
Top View
NOTE 1: Stocker robot
uses secondary set of
kinematic pins.
A
2
Side View
Option D
(Kinematic Coupling Pin Pick-Up)
H2 (min) H4 (min)
A2
(range)
A3 (min)
D5
(range)
D10 (min)
#1

(deg)
FOUP 100 170 213 +2/
-0
225
250 ± 50 150 or 230 0
Open Cassette 110 180 213 +2/
-0
225
250 ± 50 150 or 230 2
#1
User to specify which dimension (see ¶6.3.2).
Figure 5
AMHS Interbay Load Port Option D (Kinematic Coupling Pin Pick-Up)
SEMI E85-0705 © SEMI 1999, 2005 12
Active Transport Delivers a Carrier to an Internal Stocker Position
Front View
NOTE 2: Interbay transport or
vehicle uses primary set of
kinematic pins.
Top View
NOTE 1: Stocker robot
uses conveyor flanges.
A
6
A
8
H
2
H
4
NOTE 3: Interbay transport or
vehicle uses primary set of
kinematic pins.
Option E
Passive
Vehicle
Stocker
Transport
Vehicle
H
2
Horizontal
Datum Plane
D
5
H
4
D
10
Side View
Option E
(Conveyor Flange Pick-Up)
H2 (min)
H4 (min)
A6 (max)
A8 (min)
D5
(range)
D10 (min)
(See
#1
.)

(deg)
FOUP 40 170 165 245
(80 wide)
250 ± 50 150 or 230 0
Open Cassette 50 180 123 203
(80 wide)
250 ± 50 150 or 230 2
#1
User to specify which dimension (see ¶6.3.3).
Figure 6
AMHS Interbay Load Port Option E (Conveyor Flange Pick-Up)
SEMI E85-0705 © SEMI 1999, 2005 13
Figure 7
AMHS Interbay Load Port Option F (Carrier Oriented perpendicular to face plane)
(Top and Bottom Access)