semi合集-English.pdf - 第659页
SEMI E85-0705 © SEMI 1999, 2005 13 Figure 7 AMHS Interb ay Load Por t Option F (Carri er Oriented perpendicular to face plane) (Top and Bottom Access)
SEMI E85-0705 © SEMI 1999, 2005 12
Active Transport Delivers a Carrier to an Internal Stocker Position
Front View
NOTE 2: Interbay transport or
vehicle uses primary set of
kinematic pins.
Top View
NOTE 1: Stocker robot
uses conveyor flanges.
A
6
A
8
H
2
H
4
NOTE 3: Interbay transport or
vehicle uses primary set of
kinematic pins.
Option E
Passive
Vehicle
Stocker
Transport
Vehicle
H
2
Horizontal
Datum Plane
D
5
H
4
D
10
Side View
Option E
(Conveyor Flange Pick-Up)
H2 (min)
H4 (min)
A6 (max)
A8 (min)
D5
(range)
D10 (min)
(See
#1
.)
(deg)
FOUP 40 170 165 245
(80 wide)
250 ± 50 150 or 230 0
Open Cassette 50 180 123 203
(80 wide)
250 ± 50 150 or 230 2
#1
User to specify which dimension (see ¶6.3.3).
Figure 6
AMHS Interbay Load Port Option E (Conveyor Flange Pick-Up)
SEMI E85-0705 © SEMI 1999, 2005 13
Figure 7
AMHS Interbay Load Port Option F (Carrier Oriented perpendicular to face plane)
(Top and Bottom Access)
SEMI E85-0705 © SEMI 1999, 2005 14
Figure 8
AMHS Interbay Load Port Option F’ (Carrier Oriented perpendicular to face plane)
(Top Access Only)