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SEMI C16-0299 © SEMI 1997, 2005 1 SEMI C16-0299 (Reapproved 0305) GUIDE FOR PRECISION AND DA TA REPORTING PRACTICES This guide was technicall y approved by the Global Liquid Chemicals Committee and is the direct responsi…

SEMI C10-0305 © SEMI 1998, 2005 9

7 Quality Assurance

7.1 Each laboratory that uses this method should do so in accordance with the established quality assurance

protocols in place. The MDL, of specified trace contaminants, should be determined whenever a major recalibration

of the method and/or instrument is required. The new values should then be used whenever results are reported. A

schedule of periodic verification of the MDL, for key trace contaminants, should be incorporated into the program.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

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consent of SEMI.

SEMI C16-0299 © SEMI 1997, 2005 1

SEMI C16-0299 (Reapproved 0305)

GUIDE FOR PRECISION AND DATA REPORTING PRACTICES

This guide was technically approved by the Global Liquid Chemicals Committee and is the direct

responsibility of the North American Liquid Chemicals Committee. Current edition approved by the North

American Regional Standards Committee on November 4, 2004. Initially available at www.semi.org January

2005; to be published March 2005. Originally published in 1997; previously published February 1999.

1 Purpose

1.1 To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process

Chemicals or Gases SEMI specification.

2 Scope

2.1 This guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases

specification or verification of performance to such a SEMI specification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards

3.1 SEMI Standard

SEMI C1  Specifications for Reagents

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

None.

5 Standards

5.1 For each standard used in the study, the following should be reported:

5.1.1 Preparation method before analysis (e.g., dilution, evaporation).

5.1.2 Sample matrix.

5.1.3 Concentration.

5.1.4 n = number of determinations made on the standard.

5.1.5 The average of the n determinations.

5.1.6 The standard deviation of the n measurements (if n > 1).

5.1.7 Range of values observed (if n > 1).

5.1.8 Traceability of the standard.

5.1.9 If standard was produced internally, how was it produced.

6 Samples

6.1 For all reported sample results, including recovery studies, use as many of the reporting requirements for

standards as are applicable.

SEMI C16-0299 © SEMI 1997, 2005 2

7 Detection Limits

7.1 If a detection limit is reported, the specific method or published variant by which the detection limit was

obtained, should be named. The level of the lowest standard used in determination of a detection limit should be

reported.

8 Internal Standards

8.1 For procedures calling for concentration of an analyte by cryogenic trapping, acid extraction, distillation,

hydrolization, etc., a recovery study as per Method Validation (§3.14 of SEMI C1) is required. For a method to be

viable, a recovery in the range of 75–125% is recommended.

9 Calibration Models

9.1 The span of the calibration data should include the relevant specification.

9.2 The form of the calibration model (line through origin, line, etc.) should be stated. The assumption of linearity,

underlying reliance on two point (zero and span) calibrations for analytical instruments, should be justified by

reporting the basis for such an assumption.

9.3 A list of which standards were used to develop the calibration model should be provided.

9.4 Information on which fitting technique was used (i.e., regression using ordinary least squares, weighted least

squares, partial least squares) should be provided.

9.5 Identify which, if any, transformations were applied to the calibration data prior to the fitting of the calibration

model.

9.6 Identify which response was modeled to establish calibration (i.e., peak area, peak height, response factor).

9.7 A list of the types of standards employed (i.e., internal standards, external standards, method of standard

addition) should be provided.

9.8 Report how the calibration data is incorporated in producing the results of an analysis (i.e., zero and span

correction, graph).

10 Method Precision

10.1 An estimate of method precision should be provided at the level of the specification. Any known interferants

or factors which may affect method precision should be stated.

11 Summary

11.1 Since only a minimal set of guidelines is provided, those using this guide are encouraged to provide more

detail or use more stringent guidelines than those suggested.