semi合集-English.pdf - 第662页
SEMI E85-0705 © SEMI 1999, 2005 16 NOTE 1: T ransfer from bo th sides is conc urrentl y possible, wi th all 3 secondar y kinematic coupl ings used, or t he top ro botic fl ange. NOTE 2: Figure 8 and all exclusi on zone d…
SEMI E85-0705 © SEMI 1999, 2005 15
Option A
E84 plug zones
Top View
Front View
Stocker
HDP
Side View
225 mm (2)
200 mm
225 mm (2)
300 mm
HDP
BDP
300 mm
200 mm
Stocker facial
plane
Figure 9
Drawing of Example Available Area for Connector on Stocker for Option A
SEMI E85-0705 © SEMI 1999, 2005 16
NOTE 1: Transfer from both sides is concurrently
possible, with all 3 secondary kinematic couplings
used, or the top robotic flange.
NOTE 2: Figure 8 and all exclusion zone dimensions for
Option F only apply if bottom access is required.
Figure 10
Exclusion Zone Detail – Option F
SEMI E85-0705 © SEMI 1999, 2005 17
Table 2 Dimensional Requirements for 300 mm AMHS Interbay Load Ports (Open Cassette Only)
Dim Definition Option A Option B Option C Option D Option E Option F
(deg)
tilt of the open cassette when placed
to the load port
2 SEMI E15.1 2 2 2 2
A1 minimum width of the load port cavity
or cut-out in the stocker measured
from the bilateral datum plane to the
nearest obstruction on the stocker
375 mm N/A 600 mm for
HT only
#1
N/A N/A N/A
A2 width of the exclusion zone for center
pickup using the secondary kinematic
coupling pins (symmetric about the
bilateral datum plane)
213 +2/-0
mm
SEMI E15.1 213 +2/-0
mm
213 +2/-0
mm
213 +2/-0
mm
213+2/-0
mm
A3 Minimum width if the exclusion zone
(starting at a distance D10 from the
FDP) for center pickup using the
secondary kinematic coupling pins
(symmetric about the bilateral datum
plane)
N/A N/A 225 mm 225 mm N/A N/A
A6 maximum protrusion of the interbay
transport measured from the bilateral
datum plane of the transport (start of
the exclusion volume for fork-lift or
conveyor rail transfer)
N/A SEMI E15.1 N/A N/A 123 mm N/A
A8 minimum width of the exclusion
volume for the fork-lift or conveyor
rail transfer mechanism measured
from the bilateral datum plane (end of
the exclusion volume for fork-lift or
conveyor rail transfer)
N/A N/A N/A N/A 203 mm
(80 wide)
N/A
C3 height of the nearest stocker obstacle
above the carrier during transfer
measured from the HDP of the
transport the maximum height of
the carrier. This creates an exclusion
zone for use of the top robotic flange..
100 mm SEMI E15.1 N/A N/A N/A N/A
C5 distance from the facial datum plane
of the transport to the internal stocker
boundary
N/A SEMI E15.1 250 ± 50
mm
N/A N/A 250 ± 50
mm
D distance from the stocker boundary to
the facial datum plane on the stocker
load port (A,B)
270 mm 250 +0/-10
mm
N/A N/A N/A N/A
D1 maximum distance or protrusion of
any load port feature measured from
the facial datum plane on the load port
(inside the stocker cut-out)
150 mm SEMI E15.1
200 +10/-4
mm
N/A N/A N/A TBD
D10 distance measured from the facial
datum plane (FDP) where the depth of
the center exclusion zone lowers from
H2 to H4 in the interbay transport
system (C,D)
N/A SEMI E15.1 150 mm or
230 mm
#1
150 mm or
230 mm
#1
150 mm or
230 mm
#1
150 mm or
230 mm
#1
D5 distance from the facial datum plane
of the interbay transport system
(vehicle) to the stocker boundary
N/A SEMI E15.1 N/A 250 ± 50
mm
250 ± 50
mm
TBD