semi合集-English.pdf - 第6622页
SEMI C19-0301 © SEMI 1978, 2001 A C ET O N E 4 Previous SEMI Refe rence # C1.2-96 Grade 1 (Specificatio n) Zinc (Z n) 0.1 ppm max Particles in bottles: size, #/ mL ≥ 1.0 µ m, 10 ma x NOTICE: SEMI makes no warranties or r…
ACETONE SEMI C19-0301 © SEMI 1978, 20013
8.11.3 Analysis
8.11.3.1 Using the prepared sample and reagent blank,
analyze group I elements potassium (K) and sodium
(Na) by atomic absorption spectroscopy and all other
elements by plasma emission spectrometry. Apply, if
necessary, a reagent blank correction to the final
determined value of the sample.
NOTE 3: Due to the uncertainty of acid concentration in the
liquid residue the final concentration can be estimated to be
approximately 2% (v/v).
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 This section does not apply to this chemical.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
Table 1 Impurity Limits and Other Requirements for Acetone
Previous SEMI Reference # C1.2-96
Grade 1
(Specification)
Assay ([CH
3
]
2
CO) 99.5% min
Color (APHA) 10 max
Acidity
0.3 µeq/g max
Alkalinity
0.5 µeq/g max
Residue after Evaporation 5 ppm max
Water (H
2
O) 0.5% max
Solubility in Water To pass test
Chloride (Cl) 0.2 ppm max
Phosphate (PO
4
) 0.1 ppm max
Aluminum (Al) 0.1 ppm max
Arsenic and Antimony (as As) 0.01 ppm max
Boron (B) 0.1 ppm max
Calcium (Ca) 0.1 ppm max
Chromium (Cr) 0.1 ppm max
Copper (Cu) 0.1 ppm max
Gold (Au) 0.1 ppm max
Iron (Fe) 0.1 ppm max
Lead (Pb) 0.1 ppm max
Magnesium (Mg) 0.1 ppm max
Manganese (Mn) 0.1 ppm max
Nickel (Ni) 0.1 ppm max
Potassium (K) 0.1 ppm max
Sodium (Na) 0.1 ppm max
Tin (Sn) 0.1 ppm max
Titanium (Ti) 0.1 ppm max
SEMI C19-0301 © SEMI 1978, 2001 ACETONE4
Previous SEMI Reference # C1.2-96
Grade 1
(Specification)
Zinc (Zn) 0.1 ppm max
Particles in bottles:
size, #/mL
≥1.0 µm, 10 max
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
AMMONIUM FLUORIDE 40% SEMI C20-1101 © SEMI 1978, 20011
SEMI C20-1101
SPECIFICATION AND GUIDELINES FOR AMMONIUM FLUORIDE 40%
This specification and these guidelines were technically approved by the Global Process Chemicals
Committee and are the direct responsibility of the North American Process Chemicals Committee. Current
edition approved by the North American Regional Standards Committee on August 27, 2001. Initially
available at www.semi.org September 2001; to be published November 2001. This document replaces SEMI
C1.3, C7.18, and C11.2 in their entirety. Originally published in 1978, 1995, and 1994 respectively.
Previously published March 2001.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for ammonium fluoride 40% used in the
semiconductor industry and testing procedures to
support those standards. Test methods have been shown
to give statistically valid results. This document also
provides guidelines for grades of ammonium fluoride
40% for which a need has been identified. In the case of
the guidelines, the test methods may not have been
statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of
ammonium fluoride 40% used in the semiconductor
industry.
2.2 The VLSI grade purity level is typically required
by semiconductor devices with geometries of 0.8–1.2
microns.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 None.
4 Referenced Standards
SEMI C1 — Specifications for Reagents
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 25°C1.11 g/mL
7 Requirements
7.1 The requirements for ammonium fluoride 40% for
Grade 1, VLSI Grade, and Tiers A and B are listed in
Table 1.
8 Grade 1 Procedures
8.1 Assay — Accurately weigh 3 g of sample in a
polyethylene weighing bottle. Transfer with water to a
polyethylene beaker and dilute to 100 mL. Add 40 mL
of neutralized formaldehyde solution and stir
magnetically for 15 minutes or allow to stand for 1/2
hour. Titrate with standardized 1 N sodium hydroxide
to a slight pink color.
%Assay
=
mL
×
N
of NaOH
×
3.704
Weight of sample g
()
NOTE 2: Neutralized formaldehyde solution: Dilute 20 mL of
37% formaldehyde solution with 20 mL of water, add 0.1 mL
of phenolphthalein indicator solution, and titrate with 0.1 N
sodium hydroxide to a slight pink color.
8.2 Color — Dilute 2.0 mL of platinum-cobalt stock
solution (APHA No. 500) to 100 mL with water.
Compare this standard (APHA No. 10) with 100 mL of
sample in Nessler tubes. View vertically over a white
background. The sample must be no darker than the
standard.
8.3 pH of a 1% solution — Dilute 2.5 mL (2.8 g) of
sample to 100 mL with carbon dioxide- and ammonia-
free water. Using a pH meter determine the pH at 25°C
1 to 2 minutes after immersion of electrodes. The pH
range 6.0–7.5 corresponds to 0.2% free hydrogen
fluoride (HF) to 0.2% ammonium hydroxide (NH
4
OH)
in the original solution.
8.4 Chloride — Mix 2.2 mL (2.5 g) of sample with 20
mL of water containing 0.5 g of boric acid. Add 1 mL
of nitric acid and 1 mL of silver nitrate reagent solution,
and allow to stand for 5 minutes. Any turbidity
produced should be no greater than that produced when
0.01 mg of chloride ion (Cl) is treated as the sample.
8.5 Nitrate — To 2 mL of water in a white plastic
beaker, add 0.9 mL (1 g) of sample, 1 mL of sulfuric
acid, 0.05 mL of 0.01 N (0.002 M) potassium
permanganate, mix, and decolorize with sodium