semi合集-English.pdf - 第6654页
HYDROCHLO R IC A C ID SEM I C27-0301 © SEMI 1978, 2001 5 Previous SEMI Ref erence # C1.7-95 C7.2-94 C 11.6-1 296 C8.2- 92 C 12.2-9 6 Grade 1 Grade 2 V LSI Grade Tier B Tier C (Specif ication) (Specif ication) (Guideline)…
SEMI C27-0301 © SEMI 1978, 2001 HYDROCHLORIC ACID4
Recovery is for a known sample spike at 50% of the
specified level.
16 Tier C Procedures
16.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and producer.
The Process Chemicals Committee considers a test
method to be valid if there is a documented recovery
study showing a recovery of 75−125%. Recovery is for
a known sample spike at 50% of the specified level.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
Table 1 Impurity Limits and Other Requirements for Hydrochloric Acid
Previous SEMI Reference # C1.7-95 C7.2-94 C11.6-1296 C8.2-92 C12.2-96
Grade 1 Grade 2 VLSI Grade Tier B Tier C
(Specification) (Specification) (Guideline) (Guideline) (Guideline)
Assay (HCl) 36.5–38.0% 36.5–38.0 % 36–38% 37.0–38.0% 37.0–38.0%
Color (APHA) 10 max 10 max 10 max 10 max 10 max
Extractable Organic Substances 5 ppm max -- -- 500 ppb max --
Residue after Ignition (as SO
4
) -- -- 3 ppm max -- --
Free Halogen (as Cl
2
) To pass test To pass test -- 500 ppb max 500 ppb max
Free Chlorine (Cl
2
) -- -- 0.5 ppm max -- --
Bromide (Br) -- -- 50 ppm max -- --
Phosphate (PO
4
) 0.05 ppm max 50 ppb max 0.05 ppm max 50 ppb max 50 ppb max
Sulfate (SO
4
) 0.5 ppm max 500 ppb max 0.5 ppm max 100 ppb max 30 ppb max
Sulfite (SO
3
) 0.8 ppm max 800 ppb max 0.7 ppm max 100 ppb max 100 ppb max
Aluminum (Al) 0.3 ppm max 10 ppb max 0.05 ppm max 1 ppb max 100 ppt max
Antimony (Sb) -- 5 ppb max 0.005 ppm max -- 100 ppt max
Arsenic (As) -- 10 ppb max 0.005 ppm max -- 100 ppt max
Arsenic and Antimony (as As) 0.005 ppm max -- -- 1 ppb max --
Barium (Ba) -- 10 ppb max 0.05 ppm max 1 ppb max 100 ppt max
Beryllium (Be) -- 10 ppb max 0.02 ppm max 1 ppb max --
Bismuth (Bi) -- 10 ppb max 0.02 ppm max 1 ppb max --
Boron (B) 0.1 ppm max 10 ppb max 0.02 ppm max 1 ppb max 100 ppt max
Cadmium (Cd) -- 10 ppb max 0.005 ppm max 1 ppb max --
Calcium (Ca) 0.3 ppm max 10 ppb max 0.2 ppm max 1 ppb max 100 ppt max
Chromium (Cr) 0.2 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Cobalt (Co) -- 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Copper (Cu) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Gallium (Ga) -- 10 ppb max 0.02 ppm max 1 ppb max --
Germanium (Ge) -- 10 ppb max -- 1 ppb max --
Gold (Au) 0.3 ppm max 5 ppb max 0.02 ppm max 1 ppb max --
Indium (In) -- -- 0.02 ppm max -- --
Iron (Fe) 0.2 ppm max 10 ppb max 0.1 ppm max 1 ppb max 100 ppt max
Lead (Pb) 0.1 ppm max 10 ppb max 0.02 ppm max 1 ppb max 100 ppt max
Lithium (Li) -- 10 ppb max 0.02 ppm max 1 ppb max --
Magnesium (Mg) 0.3 ppm max 10 ppb max 0.05 ppm max 1 ppb max 100 ppt max
Manganese (Mn) 0.3 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Mercury (Hg) -- -- 0.02 ppm max -- --
Molybdenum (Mo) -- 10 ppb max 0.02 ppm max 1 ppb max --
Nickel (Ni) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Niobium (Nb) -- 10 ppb max -- 1 ppb max --
HYDROCHLORIC ACID SEMI C27-0301 © SEMI 1978, 20015
Previous SEMI Reference # C1.7-95 C7.2-94 C11.6-1296 C8.2-92 C12.2-96
Grade 1 Grade 2 VLSI Grade Tier B Tier C
(Specification) (Specification) (Guideline) (Guideline) (Guideline)
Platinum (Pt) -- -- 0.02 ppm max -- --
Potassium (K) 0.3 ppm max 10 ppb max 0.05 ppm max 1 ppb max 100 ppt max
Silicon (Si) -- -- -- 1 ppb max --
Silver (Ag) -- 5 ppb max 0.02 ppm max 1 ppb max --
Sodium (Na) 0.3 ppm max 10 ppb max 0.1 ppm max 1 ppb max 100 ppt max
Strontium (Sr) -- 10 ppb max 0.02 ppm max 1 ppb max --
Tantalum (Ta) -- 10 ppb max -- 1 ppb max 100 ppt max
Thallium (Tl) -- 10 ppb max 0.02 ppm max 1 ppb max --
Tin (Sn) 0.3 ppm max 10 ppb max 0.02 ppm max 1 ppb max 100 ppt max
Titanium (Ti) 0.3 ppm max 10 ppb max 0.05 ppm max 1 ppb max 100 ppt max
Vanadium (V) -- 10 ppb max 0.02 ppm max 1 ppb max --
Zinc (Zn) 0.3 ppm max 10 ppb max 0.05 ppm max 1 ppb max 100 ppt max
Zirconium (Zr) -- 10 ppb max 0.02 ppm max 1 ppb max --
Particles in bottles
(size, #/mL)
≥ 1.0 µm, 25 max ≥ 0.5 µm, 25 max ≥ 0.5 µm, 250 max ≥ 0.5 µm, 10 max
≥ 0.2 µm, TBD
(See NOTE 1.)
NOTE 1: Due to the limitations of current particle counters, particle size and number are to be agreed upon between supplier and user. See SEMI
C1, Section 3.9 for particle counting methodology.
Table 2 Composition of Standard
Substance Amount in 500 mL of 2,2,4-trimethylpentane
solution
Concentration in ppm for 5 mL of standard in 100
mL (120 g) of HCl
µL
mg
Benzene 6.8 6 0.5
Chlorobenzene 5.5 6 0.5
1,2-Dichloroethane 20 25 2.0
Chloroform 34 50 4.0
DDT (see NOTE 1) 25 2.0
Total 9.0
Allowance for CCl
4
1.0
Total 10.0
NOTE 1: 1,1,1-Trichloro-2,2-bis (p-chlorophenyl) ethane, dichlorodiphenyltrichloroethane.
NOTICE: SEMI makes no warranties or representations as to the suitability of the specifications and guidelines set
forth herein for any particular application. The determination of the suitability of the specifications and guidelines is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These specifications
and guidelines are subject to change without notice.
The user’s attention is called to the possibility that compliance with these specifications and guidelines may require
use of copyrighted material or of an invention covered by patent rights. By publication of these specifications and
guidelines, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection
with any item mentioned in these specifications and guidelines. Users of these specifications and guidelines are
expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such
rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
HYDROFLUORIC ACID SEMI C28-0705 © SEMI 1978, 2005 1
SEMI C28-0705
SPECIFICATIONS FOR HYDROFLUORIC ACID
This specification was technically approved by the global Liquid Chemicals Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on May 20, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1978; previously
published July 2004.
NOTICE: This document was completely rewritten in 2005.
1 Purpose
1.1 The purpose of this document is to standardize requirements for hydrofluoric acid used in the semiconductor
industry and testing procedures to support those standards. Test methods have been shown to give statistically valid
results.
2 Scope
2.1 The scope of this document is all grades of hydrofluoric acid used in the semiconductor industry.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 None.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
4.2 ASTM Standards
1
ASTM D5127 — Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry
4.3 Other Documents
Dionex Technical Note 45 — Determination of Trace Anions in Concentrated Hydrofluoric Acid
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 25C 1.15 g/mL
7 Requirements
7.1 The requirements for hydrofluoric acid for Grades 1, 2, 3 and 4 are listed in Table 1.
8 Grade 1 Procedures
NOTE 1: Each laboratory is responsible for verifying the validity of the method within its own operation.
1 American Society for Testing and Materials, 100 Barr Harbor Drive, West Conshohocken, Pennsylvania 19428-2959, USA. Telephone:
610.832.9585, Fax: 610.832.9555. Website: www.astm.org