semi合集-English.pdf - 第6735页

TETRA E THYLORTH OSIILICA T E (TEOS) SEMI C45-0301 © SEMI 1991, 20 01 3 Table 1 Impurity Limits and Other Requirements f or Tetraethylorthosilicate Previ ous SEMI Reference # -- C7 .13-95 Grade 1 Tier A (Specif ication) …

SEMI C45-0301 © SEMI 1991, 2001 TETRAETHYLORTHOSIILICATE (TEOS)2

Coulometric Karl Fischer water analyzer. Results are

obtained in ppm by dividing the micrograms of water

found in the sample by weight of TEOS in grams.

8.4 Trace Metals Analysis The following method

has given satisfactory results in determining trace metal

impurities at the specified value for each of the

following trace metals: aluminum (Al), arsenic (As),

calcium (Ca), chromium (Cr), copper (Cu), iron (Fe), lead

(Pb), magnesium (Mg), manganese (Mn), nickel (Ni),

potassium (K), sodium (Na), tin (Sn), titanium (Ti), and

zinc (Zn). Alternate methods may be used as long as

appropriate studies demonstrate recovery between 75–

125% of a known sample spike for half of the value of

each specified item.

8.4.1 Special Reagents  All water used in the Trace

metals Analysis and Boron Analysis should be a

deionized water meeting the criteria for Type E1.1 in

ASTM D5127.

8.4.1.1 Mixed Acid  1% HF - 2% HNO

prepared by

dilution of ultra pure acids with appropriate weights of

deionized water.

8.4.1.2 Standards



Composite standard solutions

containing 0, 1, 2, and 4 ppb multi-element standards

are prepared by diluting with mixed acid of appropriate

weights for ICP-MS. Single-element standards are

prepared (Ca, Fe, K, Na) for GFAA.

8.4.2 Sample Preparation  In a clean environment,

place 100 g of sample in a clean PFA Teflon closed

bottle equipped with an inlet and outlet tube and

evaporate under a nitrogen purge at approximately

110°C. When dry, close the inlet and the outlet tube

and digest the residue at 100°C for 30 minutes with 7

mL of mixed acid solution. Cool and transfer the con-

tents with deionized water. Dilute the transferred con-

tents with deionized water to a final volume of 14 mL.

8.4.3 Analysis  Analyze the samples by graphite

furnace atomic absorption (GFAA) for sodium,

calcium, potassium, and iron. Analyze the sample for

all other metallic elements by inductively coupled

plasma mass spectrometry (ICP-MS).

8.5 Boron Analysis  The following method has

given satisfactory results in the determination of trace

levels of boron (B). Alternate methods may be used as

long as appropriate studies demonstrate recovery

between 75–125% of a known sample spike for half of

the specified value.

8.5.1 Standard  Standards of 0, 2, and 4 ppm boron

are prepared by dilution of an aqueous boron stock

solution with deionized water meeting the criteria for

Type E1.1 in ASTM D5127.

8.5.2 Sample Preparation  A 100 g sample of TEOS

is extracted with 10 mL of deionized water, that meets

the criteria for Type E1.1 in ASTM D5127, by

vigorously shaking the solution for minimum of 10

minutes on a mechanical shaker. Allow the layers to

separate and remove the aqueous portion to a separate

container.

8.5.3 Analysis  The 10 mL water extract is analyzed

for boron by inductively coupled plasma atomic

emission spectroscopy (ICP-AES) at 249.68 nm.

9 Grade 2 Procedures

9.1 This section does not apply to this chemical.

10 Grade 3 Procedures

10.1 This section does not apply to this chemical.

11 Grade 4 Procedures

11.1 This section does not apply to this chemical.

12 Grade 5 Procedures

12.1 This section does not apply to this chemical.

13 VLSI Grade Procedures

13.1 This section does not apply to this chemical.

14 Tier A Procedures

14.1 Standardized test methods are being developed

for all parameters at the purity levels indicated. Until

standardized test methods are published, test

methodology shall be determined by user and producer.

The Chemical Reagent Committee considers a test

method to be valid only if there is a documented

recovery study showing a recovery of 75–125%.

Recovery is for a known sample spike at 50% of the

specified level.

15 Tier B Procedures

15.1 This section does not apply to this chemical.

16 Tier C Procedures

16.1 This section does not apply to this chemical.

17 Tier D Procedures

17.1 This section does not apply to this chemical.

TETRAETHYLORTHOSIILICATE (TEOS) SEMI C45-0301 © SEMI 1991, 20013

Table 1 Impurity Limits and Other Requirements for Tetraethylorthosilicate

Previous SEMI Reference # -- C7.13-95

Grade 1 Tier A

(Specification) (Guideline)

Assay 99.99% min 99.99% min

Water (see NOTE 1) 20 ppm max 20 ppm max

Color APHA 5 max 5 max

Aluminum (Al) 1 ppb max 1 ppb max

Arsenic (As) 1 ppb max 1 ppb max

Barium (Ba) -- 1 ppb max

Bismuth (Bi) -- 1 ppb max

Boron (B) 10 ppb max 10 ppb max

Calcium (Ca) 1 ppb max 1 ppb max

Chromium (Cr) 1 ppb max 1 ppb max

Cobalt (Co) -- 1 ppb max

Copper (Cu) 1 ppb max 1 ppb max

Gallium (Ga) -- 1 ppb max

Gold (Au) -- 1 ppb max

Iron (Fe) 1 ppb max 1 ppb max

Lead (Pb) 1 ppb max 1 ppb max

Lithium (Li) -- 1 ppb max

Magnesium (Mg) 1 ppb max 1 ppb max

Manganese (Mn) 1 ppb max 1 ppb max

Mercury (Hg) -- 1 ppb max

Nickel (Ni) 1 ppb max 1 ppb max

Potassium (K) 1 ppb max 1 ppb max

Silver (Ag) -- 1 ppb max

Sodium (Na) 1 ppb max 1 ppb max

Strontium (Sr) -- 1 ppb max

Tin (Sn) 1 ppb max 1 ppb max

Titanium (Ti) 1 ppb max 1 ppb max

Zinc (Zn) 1 ppb max 1 ppb max

Particles in bottles:

size, #/mL

≥ 0.3 µm, 50 max ≥ 0.3 µm, 50 max

NOTE 1: Chemical Property: Water reacts with TEOS to form Ethanol.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI C46-0699

GUIDELINE FOR 25% TETRAMETHYLAMMONIUM HYDROXIDE

This guideline was technically approved by the Global Process Chemicals Committee and is the direct

responsibility of the North American Process Chemicals Committee. Current edition approved by the North

American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;

to be published June 1999. This document replaces SEMI C7.14 in its entirety. Originally published in

1991.

1 Purpose

1.1 The purpose of this document is to standardize

requirements for 25% tetramethylammonium hydroxide

used in the semiconductor industry and testing

procedures to support those standards. Test methods

have been shown to give statistically valid results. This

document also provides guidelines for grades of 25%

tetramethylammonium hydroxide for which a need has

been identified. In the case of the guidelines, the test

methods may not have been statistically validated yet.

2 Scope

2.1 The scope of this document is all grades of 25%

tetramethylammonium hydroxide used in the

semiconductor industry.

3 Limitations

3.1 None.

4 Referenced Documents

4.1 None.

5 Terminology

5.1 None.

6 Physical Property (for information only)

Not applicable.

7 Requirements

7.1 The requirements for 25% tetramethylammonium

hydroxide for Tier A are listed in Table 1.

8 Grade 1 Procedures

8.1 This section does not apply to this chemical.