semi合集-English.pdf - 第6736页

25% TETRAMETHYLAMMONIUM HYDROXIDE SEMI C46-0699 © SEMI 1991, 1999 1 SEMI C46-0699 GUIDELINE FOR 25 % TETRAMETHYL A MM ONIUM HYDROXI DE This guideline wa s technically approved by the Global Process Che micals Committee a…

100%1 / 7923
TETRAETHYLORTHOSIILICATE (TEOS) SEMI C45-0301 © SEMI 1991, 20013
Table 1 Impurity Limits and Other Requirements for Tetraethylorthosilicate
Previous SEMI Reference # -- C7.13-95
Grade 1 Tier A
(Specification) (Guideline)
Assay 99.99% min 99.99% min
Water (see NOTE 1) 20 ppm max 20 ppm max
Color APHA 5 max 5 max
Aluminum (Al) 1 ppb max 1 ppb max
Arsenic (As) 1 ppb max 1 ppb max
Barium (Ba) -- 1 ppb max
Bismuth (Bi) -- 1 ppb max
Boron (B) 10 ppb max 10 ppb max
Calcium (Ca) 1 ppb max 1 ppb max
Chromium (Cr) 1 ppb max 1 ppb max
Cobalt (Co) -- 1 ppb max
Copper (Cu) 1 ppb max 1 ppb max
Gallium (Ga) -- 1 ppb max
Gold (Au) -- 1 ppb max
Iron (Fe) 1 ppb max 1 ppb max
Lead (Pb) 1 ppb max 1 ppb max
Lithium (Li) -- 1 ppb max
Magnesium (Mg) 1 ppb max 1 ppb max
Manganese (Mn) 1 ppb max 1 ppb max
Mercury (Hg) -- 1 ppb max
Nickel (Ni) 1 ppb max 1 ppb max
Potassium (K) 1 ppb max 1 ppb max
Silver (Ag) -- 1 ppb max
Sodium (Na) 1 ppb max 1 ppb max
Strontium (Sr) -- 1 ppb max
Tin (Sn) 1 ppb max 1 ppb max
Titanium (Ti) 1 ppb max 1 ppb max
Zinc (Zn) 1 ppb max 1 ppb max
Particles in bottles:
size, #/mL
≥ 0.3 µm, 50 max ≥ 0.3 µm, 50 max
NOTE 1: Chemical Property: Water reacts with TEOS to form Ethanol.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
25% TETRAMETHYLAMMONIUM HYDROXIDE SEMI C46-0699 © SEMI 1991, 19991
SEMI C46-0699
GUIDELINE FOR 25% TETRAMETHYLAMMONIUM HYDROXIDE
This guideline was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;
to be published June 1999. This document replaces SEMI C7.14 in its entirety. Originally published in
1991.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for 25% tetramethylammonium hydroxide
used in the semiconductor industry and testing
procedures to support those standards. Test methods
have been shown to give statistically valid results. This
document also provides guidelines for grades of 25%
tetramethylammonium hydroxide for which a need has
been identified. In the case of the guidelines, the test
methods may not have been statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of 25%
tetramethylammonium hydroxide used in the
semiconductor industry.
3 Limitations
3.1 None.
4 Referenced Documents
4.1 None.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Not applicable.
7 Requirements
7.1 The requirements for 25% tetramethylammonium
hydroxide for Tier A are listed in Table 1.
8 Grade 1 Procedures
8.1 This section does not apply to this chemical.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and producer.
The Process Chemicals Committee considers a test
method to be valid only if there is a documented
recovery study showing a recovery of 75 - 125%.
Recovery is for a known sample spike at 50% of the
specified level.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
SEMI C46-0699 © SEMI 1991, 1999 25% TETRAMETHYLAMMONIUM HYDROXIDE2
Table 1 Impurity Limits and Other Requirements for 25% Tetramethylammonium Hydroxide
Previous SEMI Reference # C7.14-91
Tier A
(Guideline)
Assay (wt %) 25.0 ± 0.1
Carbonate (as CO
3
2) 300 ppb max
Total Halides (as Cl
-1
) 5 ppb max
Color (APHA) 10 max
Aluminum (Al) 10 ppb max
Antimony (Sb) 10 ppb max
Arsenic (As) 10 ppb max
Barium (Ba) 10 ppb max
Beryllium (Be) 10 ppb max
Bismuth (Bi) 10 ppb max
Boron (B) 10 ppb max
Cadmium (Cd) 10 ppb max
Calcium (Ca) 10 ppb max
Chromium (Cr) 10 ppb max
Cobalt (Co) 10 ppb max
Copper (Cu) 10 ppb max
Gallium (Ga) 10 ppb max
Germanium (Ge) 10 ppb max
Gold (Au) 5 ppb max
Iron (Fe) 5 ppb max
Lead (Pb) 10 ppb max
Lithium (Li) 10 ppb max
Magnesium (Mg) 10 ppb max
Manganese (Mn) 10 ppb max
Molybdenum (Mo) 10 ppb max
Nickel (Ni) 10 ppb max
Potassium (K) 5 ppb max
Silver (Ag) 10 ppb max
Sodium (Na) 5 ppb max
Strontium (Sr) 10 ppb max
Thallium (Tl) 10 ppb max
Tin (Sn) 10 ppb max
Zinc (Zn) 10 ppb max
Zirconium (Zr) 10 ppb max
Particles in bottles:
size, #/mL
≥0.5 µm, 50 max