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SEMI S2-0703a E © SEMI 1991, 2004 4 5.2.5 capture velocity — the air velocity that at any point in fro n t of the exha usted hood or at the exha usted hood opening is n ecessary to overcome opposing air currents and to c…

SEMI S2-0703a

EN 775 — Manipulating industrial robots--Safety

EN 1050 — Safety of Machinery--Risk Assessment

EN 1127-1 — Explosive atmospheres -- Explosion

prevention and protection -- Part 1: Basic concepts and

methodology

4.4 DIN Standards

DIN V VDE 0801 — Principle for Computers in

Safety-Related Systems

4.5 IEC Standards

IEC 61010-1 — Safety Requirements for Electrical

Equipment for Measurement, Control, and Laboratory

Equipment, Part 1: General Requirements

IEC 61508 — Functional Safety of

Electrical/Electronic/Programmable Electronic Safety-

Related Systems

4.6 ISO Standards

ISO 10218 — Manipulating industrial robots—Safety

ISO 13849-1 (EN 954-10) — Safety of Machinery -

Safety-Related Parts of Control Systems

4.7 NFPA

Standards

NFPA 12 — Standard on Carbon Dioxide

Extinguishing Systems

NFPA 13 — Standard for Installation of Sprinkler

Systems

NFPA 72 — National Fire Alarm Code

NFPA 497 — Recommended Practice for the

Classification of Flammable Liquids, Gases, or Vapors

and of Hazardous (Classified) Locations for Electrical

Installations in Chemical Process Areas

NFPA 704 — Identification of the Fire Hazards of

Materials

NFPA 2001 — Standard on Clean Agent Fire

Extinguishing Systems

4.8 Other Standards and Documents

ACGIH, Industrial Ventilation Manual

3 Available from Deutches Institut für Normung e.V., Beuth Verlag

GmbH, Burggrafenstrasse 4-10, D-10787 Berlin, Germany, website:

www.din.de

4 International Electrotechnical Commission, 3, rue de Varembé,

Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:

41.22.919.02.11; Fax: 41.22.919.03.00 Website: www.iec.ch

5 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

6 National Fire Protection Association, 1 Batterymarch Park, Quincy,

MA 02269, Website: www.nfpa.org

ASHRAE Standard 110 — Method of Testing

Performance of Laboratory Fume Hoods

Burton, D.J., Semiconductor Exhaust Ventilation

Guidebook

Uniform Building Code

™

(UBC)

Uniform Fire Code

™11

NOTICE: As listed or revised, all documents cited

shall be the latest publications of adopted standards.

5 Terminology

NOTICE: New Acronyms and Definitions will be

added in alphabetical order to the Terminology

Section upon July 1, 2006 publication as shown in

Delayed Revisions Sections 1 and 2. The EH&S

Committee has voted that implementation of the

information is OPTIONAL before the effective date.

5.1 Abbreviations and Acronyms

5.1.1 ACGIH

— American Conference of

Governmental Industrial Hygienists (ACGIH is a

registered trademark of the American Conference of

Governmental Industrial Hygienists.)

5.1.2 ASHRAE — American Society of Heating,

Refrigeration, and Air Conditioning Engineers

5.2 Definitions

5.2.1 abort switch — a switch that, when activated,

interrupts the activation sequence of a fire detection or

fire suppression system.

5.2.2 accredited testing laboratory — an independent

organization dedicated to the testing of components,

devices, or systems; competent to perform evaluations

based on established safety standards; and recognized

by a governmental or regulatory body.

5.2.3 baseline — for the purposes of this document,

“baseline” refers to operating conditions, including

process chemistry, for which the equipment was

designed and manufactured.

5.2.4 breathing zone — imaginary globe, of 600 mm

(two foot) radius, surrounding the head.

7 ACGIH, 1330 Kemper Meadow Road, Cincinnati, Ohio 45240,

USA, www.acgih.org

8 ASHRAE, 1791 Tullie Circle, NE, Atlanta, Georgia 30329, USA,

www.ashrae.org

9 IVE, Inc., 2974 South Oakwood, Bountiful, Utah 84010, USA,

www.eburton.com

10 International Conference of Building Officials, 5360 Workman

Mill Road, Whittier, California 90601-2298, USA, www.icbo.org

11 International Fire Code Institute, 5360 Workman Mill Road,

Whittier, California 90601-2298, USA, www.ifci.org

SEMI S2-0703a

5.2.5 capture velocity — the air velocity that at any

point in front of the exhausted hood or at the exhausted

hood opening is necessary to overcome opposing air

currents and to capture the contaminated air at that

point by causing it to flow into the exhausted hood.

5.2.6 carcinogen — confirmed or suspected human

cancer-causing agent as defined by the International

Agency for Research on Cancer (IARC) or other

recognized entities.

5.2.7 chemical distribution system — the collection of

subsystems and components used in a semiconductor

manufacturing facility to control and deliver process

chemicals from source to point of use for wafer

manufacturing processes.

5.2.8 cleanroom — a room in which the concentration

of airborne particles is controlled to specific limits.

5.2.9 coefficient of entry (C

) — the ratio of actual

airflow into the exhausted hood to the theoretical

airflow if all hood static pressure could be converted

into velocity, as would be the case if the hood entry loss

factor (K or F

) were zero. C

= (VP/SP

)

0.5

where VP

= duct velocity pressure and SP

= hood static pressure

(see also Appendix 2).

5.2.10 combustible material — for the purpose of this

guideline, a combustible material is any material that

does propagate flame (beyond the ignition zone with or

without the continued application of the ignition

source) and does not meet the definition in this section

for noncombustible material. (See also the definition for

noncombustible material.)

5.2.11 equipment — a specific piece of machinery,

apparatus, process module, or device used to execute an

operation. The term “equipment” does not apply to any

product (e.g., substrates, semiconductors) that may be

damaged as a result of equipment failure.

5.2.12 face velocity — velocity at the cross-sectional

entrance to the exhausted hood.

5.2.13 facilitization — the provision of facilities or

services.

5.2.14 fail-safe — designed so that a failure does not

result in an increased risk.

NOTE 1: For example, a fail-safe temperature limiting

device would indicate an out-of-control temperature if it were

to fail. This might interrupt a process, but would be preferable

to the device indicating that the temperature is within the

control limits, regardless of the actual temperature, in case of

a failure.

5.2.15 Fail-to-safe equipment control system (FECS)

— A safety-related programmable system of control

circuits designed and implemented for safety functions

in accordance with recognized standards such as ISO

13849-1 (EN 954-1) or IEC 61508, ANSI SP 84. These

systems [e.g. safety Programmable Logic Controller

(PLC), safety-related Input and Output (I/O) modules]

diagnose internal and external faults and react upon

detected faults in a controlled manner in order to bring

the equipment to a safe state.

NOTE 2: A FECS is a subsystem to a (PES) Programmable

Electronic System as defined in IEC61508 -4 Definitions

NOTE 3: Related Information 14 provides additional

information on applications of FECS design.

5.2.16 failure — the termination of the ability of an

item to perform a required function. Failure is an event,

as distinguished from “fault,” which is a state.

5.2.17 fault — the state of an item characterized by

inability to perform a required function, excluding the

inability during preventive maintenance or other

planned actions, or due to lack of external resources.

5.2.18 fault-tolerant — designed so that a reasonably

foreseeable single point failure does not result in an

unsafe condition.

5.2.19 flammable gas — any gas that forms an

ignitable mixture in air at 20 C (68 F) and 101.3 kPa

(14.7 psia).

5.2.20 flammable liquid — a liquid having a flash

point below 37.8 C (100 F).

5.2.21 flash point — the minimum temperature at

which a liquid gives off sufficient vapor to form an

ignitable mixture with air near the surface of the liquid,

or within the test vessel used.

5.2.22 gas cylinder cabinet — cabinet used for housing

gas cylinders, and connected to gas distribution piping

or to equipment using the gas. Synonym: gas cabinet.

5.2.23 gas panel — an arrangement of fluid handling

components (e.g., valves, filters, mass flow controllers)

that regulates the flow of fluids into the process.

Synonyms: gas jungle, jungle, gas control valves, valve

manifold.

5.2.24 gas panel enclosure — an enclosure designed to

contain leaks from gas panel(s) within itself.

Synonyms: jungle enclosure, gas box, valve manifold

box.

5.2.25 hazard — a condition that is a prerequisite to a

mishap.

5.2.26 hazardous production material (HPM) — a

solid, liquid, or gas that has a degree-of-hazard rating in

health, flammability, or reactivity of class 3 or 4 as

ranked by NFPA 704 and which is used directly in

research, laboratory, or production processes that have

as their end product materials that are not hazardous.

SEMI S2-0703a

5.2.27 hazardous voltage — unless otherwise defined

by an appropriate international standard applicable to

the equipment, voltages greater than 30 volts rms, 42.4

volts peak, 60 volts dc are defined in this document as

hazardous voltage.

NOTE 4: The specified levels are based on normal conditions

in a dry location.

5.2.28 hood — in the context of Section 22 and

Appendix 2 of this guideline, “hood” means a shaped

inlet designed to capture contaminated air and conduct

it into an exhaust duct system.

5.2.29 hood entry loss factor (K or F

) — a unitless

factor that quantifies hood efficiency. If the hood is

100% efficient, then K or F

= 0. Related equations:

Q = 4.043A[(SP

/d)/(1+F

)]

0.5

where:

Q = volumetric flow rate in m

/sec,

A = cross sectional area of the duct in m

= hood static pressure in mm water gauge (w.g.),

and d = density correction factor (unitless).

(US units: Q = 4005A[(SP

/d)/(1+F

)]

0.5

where:

Q = volumetric flow rate in cfm.

A = cross sectional area of the duct in ft

= hood static pressure in inches water gauge (w.g.),

and d = density correction factor (unitless).)

5.2.30 incompatible — as applied to chemicals: in the

context of Section 23 of this guideline, describes

chemicals that, when combined unintentionally, may

react violently or in an uncontrolled manner, releasing

energy that may create a hazardous condition.

5.2.31 intended reaction product — chemicals that are

produced intentionally as a functional part of the

semiconductor manufacturing process.

5.2.32 interlock — a mechanical, electrical or other

type of device or system, the purpose of which is to

prevent or interrupt the operation of specified machine

elements under specified conditions.

5.2.33 ionizing radiation — alpha particles, beta

particles, gamma rays, x-rays, neutrons, high-speed

electrons, high-speed protons, and other particles

capable of producing ions in human tissue.

5.2.34 laser — any device that can be made to produce

or amplify electromagnetic radiation in the wavelength

range from 180 nm to 1 mm primarily by the process of

controlled stimulated emission.

5.2.35 laser product — any product or assembly of

components that constitutes, incorporates, or is intended

to incorporate a laser or laser system (including laser

diode), and that is not sold to another manufacturer for

use as a component (or replacement for such

component) of an electronic product.

5.2.36 laser source — any device intended for use in

conjunction with a laser to supply energy for the

excitation of electrons, ions, or molecules. General

energy sources, such as electrical supply mains, should

not be considered to be laser energy sources.

5.2.37 laser system — a laser in combination with an

appropriate laser energy source, with or without

additional incorporated components.

5.2.38 likelihood — the expected frequency with

which a mishap will occur. Usually expressed as a rate

(e.g., events per year, per product, or per substrate

processed).

5.2.39 local exhaust ventilation — local exhaust

ventilation systems operate on the principle of

capturing a contaminant at or near its source and

moving the contaminant to the external environment,

usually through an air cleaning or a destructive device.

It is not to be confused with laminar flow ventilation.

Synonyms: LEV, local exhaust, main exhaust,

extraction system, module exhaust, individual exhaust.

5.2.40 lower explosive limit — the minimum

concentration of vapor in air at which propagation of

flame will occur in the presence of an ignition source.

Synonyms: LEL, lower flammability limit (LFL).

5.2.41 maintenance — planned or unplanned activities

intended to keep equipment in good working order.

(See also the definition for service.)

5.2.42 mass balance — a qualitative, and where

possible, quantitative, specification of mass flow of

input and output streams (including chemicals, gases,

water, deionized water, compressed air, nitrogen, and

by-products), in sufficient detail to determine the

effluent characteristics and potential treatment options.

5.2.43 material safety data sheet (MSDS) — written or

printed material concerning chemical elements and

compounds, including hazardous materials, prepared in

accordance with applicable standards.

NOTE 5: Examples of such standards are USA government

regulation 29 CFR 1910.1200, and Canadian WHMIS

(Workplace Hazardous Material Information System).

5.2.44 mishap — an unplanned event or series of

events that results in death, injury, occupational illness,

damage to or loss of equipment or property, or

environmental damage.