semi合集-English.pdf - 第6779页
SEMI S2-0703a E © SEMI 1991, 2004 8 initiated early in the d esign phase, and updated as th e design matures . NOTICE: Section 6.8.1 below will be withdrawn upon July 1, 2006 publication and replaced by the new Section 6…
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5.2.65 sievert (Sv) — unit of dose equivalent. Most
instruments used to measure ionizing radiation read in
dose equivalent (rems or sieverts). 1 Sv = 100 rems.
5.2.66 standard temperature and pressure — for
ventilation measurements, either dry air at 21C (70F)
and 760 mm (29.92 inches) Hg, or air at 50% relative
humidity, 20C (68F), and 760 mm (29.92 inches) Hg.
5.2.67 supervisory alarm — as applied to fire detection
or suppression systems; an alarm indicating a
supervisory condition.
5.2.68 supervisory condition — as applied to fire
detection or suppression systems; condition in which
action or maintenance is needed to restore or continue
proper function.
5.2.69 supplemental exhaust — local exhaust
ventilation that is used intermittently for a specific task
of finite duration.
5.2.70 supplier — party that provides equipment to,
and directly communicates with, the user. A supplier
may be a manufacturer, an equipment distributor, or an
equipment representative. (See also the definition for
user.)
5.2.71 testing — the term “testing” is used to describe
measurements or observations used to validate and
document conformance to designated criteria.
5.2.72 trouble alarm — as applied to fire detection or
suppression systems; an alarm indicating a trouble
condition.
5.2.73 trouble condition — as applied to fire detection
or suppression systems; a condition in which there is a
fault in a system, subsystem, or component that may
interfere with proper function.
5.2.74 user — party that acquires equipment for the
purpose of using it to manufacture semiconductors.
(See also the definition for supplier.)
5.2.75 velocity pressure (VP) — the pressure required
to accelerate air from zero velocity to some velocity V.
Velocity pressure is proportional to the kinetic energy
of the air stream. Associated equation:
VP = (V/4.043)
2
, where V = air velocity in m/s, and VP
= velocity pressure in mm water gauge (w.g.).
[U.S. units: VP = (V/4005)
2
, where
V = velocity in feet per second, and
VP = velocity pressure in inches water gauge (w.g.)]
5.2.76 volumetric flow rate (Q) — in the context of
Section 22 and Appendix 2 of this guideline, Q = the
volume of air exhausted per unit time. Associated
equation: Q = VA, where V = air flow velocity, and A
= the cross-sectional area of the duct or opening
through which the air is flowing at standard conditions.
5.2.77 wet station — open surface tanks, enclosed in a
housing, containing chemical materials used in the
manufacturing of semiconductor materials. Synonyms:
wet sink, wet bench, wet deck.
6 Safety Philosophy
6.1 A primary objective of the industry is to eliminate
or control hazards during the equipment’s life cycle
(i.e., the installation, operation, maintenance, service,
and disposal of equipment).
6.2 The assumption is made that operators,
maintenance personnel, and service personnel are
trained in the tasks that they are intended to perform.
6.3 The following should be considered in the design
and construction of equipment:
regulatory requirements;
industry standards;
this guideline; and
good engineering and manufacturing practices.
6.4 This guideline should be applied during the design,
construction, and evaluation of semiconductor
equipment, in order to reduce the expense and
disruptive effects of redesign and retrofit.
NOTICE: Section 6.5 below will be withdrawn
upon July 1, 2006 publication and replaced by the
new Section 6.5 including: figures and tables as
shown in Delayed Revisions Section 2. The EH&S
Committee has voted that implementation of the
information is OPTIONAL before the effective date.
6.5 No reasonably foreseeable single-point failure
condition or operational error should allow exposure of
personnel, facilities, or the community to hazards that
could result in death, significant injury, or significant
equipment damage.
NOTE 7: The intent is to control single fault conditions that
result in significant risks (i.e., Critical, High, or Medium risks
based on the example risk assessment matrix in SEMI S10).
6.6 Equipment safety features should be fail-safe or of
a fault-tolerant design and construction.
6.7 Components and assemblies should be used in
accordance with their manufacturers’ ratings and
specifications, where using them outside the ratings
would create a safety hazard.
6.8 A hazard analysis should be performed to identify
and evaluate hazards. The hazard analysis should be
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initiated early in the design phase, and updated as the
design matures.
NOTICE: Section 6.8.1 below will be withdrawn
upon July 1, 2006 publication and replaced by the
new Section 6.8.1 including: figures and tables as
shown in Delayed Revisions Section 2. The EH&S
Committee has voted that implementation of the
information is OPTIONAL before the effective date.
6.8.1 The hazard analysis should include consideration
of:
the application or process;
the hazards associated with each task;
anticipated failure modes;
the probability of occurrence and severity of a
mishap;
the level of expertise of exposed personnel and the
frequency of exposure;
the frequency and complexity of operating,
servicing and maintenance tasks; and
safety critical parts.
NOTE 8: EN 1050 contains examples of hazard analysis
methods.
6.8.2 The risks associated with hazards should be
characterized using SEMI S10.
6.9 The order of precedence for resolving identified
hazards should be as follows:
6.9.1 Design to Eliminate Hazards — From the initial
concept phase, the supplier should design to eliminate
hazards.
NOTE 9: It is recommended that the supplier continue to
work to eliminate identified hazards.
6.9.2 Incorporate Safety Devices — If identified
hazards cannot be eliminated or their associated risk
adequately controlled through design selection, then the
risk should be reduced through fixed, automatic, or
other protective safety design features or devices.
NOTE 10: It is recommended that provisions be made for
periodic functional checks of safety devices, when applicable.
6.9.3 Provide Warning Devices — If design or safety
devices cannot effectively eliminate identified hazards
or adequately reduce associated risk, a means should be
used to detect the hazardous condition and to produce a
warning signal to alert personnel of the hazard.
6.9.4 Provide Hazard Warning Labels — Where it is
impractical to eliminate hazards through design
selection or adequately reduce the associated risk with
safety or warning devices, hazard warning labels should
be provided. See Section 10 for label information.
6.9.5 Develop Administrative Procedures and Training
— Where hazards are not eliminated through design
selection or adequately controlled with safety or
warning devices or warning labels, procedures and
training should be used. Procedures may include the use
of personal protective equipment.
6.9.6 A combination of these approaches may be
needed.
7 General Provisions
7.1 This guideline should be incorporated by reference
in equipment purchase specifications. The user and
supplier should agree on deviations from this guideline.
The intent is for the user to purchase equipment
conforming with SEMI S2, not to design the equipment.
7.2 The equipment must comply with laws and
regulations that are in effect at the location of use. All
equipment requiring certification or approval by
government agencies must have this certification or
approval as required by regulations.
NOTE 11: It is recommended that the supplier request from
the user information regarding local laws and regulations.
7.3 The manufacturer should maintain an
equipment/product safety program to identify and
eliminate hazards or control risks in accordance with
the order of precedence (see Section 6.9).
7.3.1 The supplier should provide the user’s designated
representative with bulletins that describe safety related
upgrades or newly identified significant hazards
associated with the equipment. This should be done on
an ongoing basis as needed.
7.4 Model-specific tools and accessories necessary to
operate, maintain, and service equipment safely should
be provided with the equipment or specified by the
supplier.
NOTE 12: The official values in this guideline are expressed
in The International System of Units (SI). Values that:
are expressed in Inch-Pound (also known as “US
Customary” or “English”) units,
are enclosed in parentheses, and
directly follow values expressed in SI units
are not official, are provided for reference only, and
might not be exact conversions of the SI values.
8 Evaluation Process
8.1 This section describes the evaluation of equipment
to this guideline, the contents of the evaluation report,
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and supporting information needed to perform the
evaluation.
8.2 General — The evaluating party (see Section 8.4)
should evaluate the equipment according to this
guideline and create a written evaluation report.
NOTE 13: The intent is that the “should” provisions of this
guideline be used as the basis for evaluating conformance.
The intent is also that the “may,” “suggested,” “preferred,”
“recommended,” and “NOTE” provisions of this guideline not
be used for evaluating conformance.
8.2.1 Conformance to specific sections of SEMI S2
may be achieved by instructions included in the
supplier’s equipment installation instructions (reference
SEMI E6) or other documentation.
8.3 Evaluation Report Contents: General — The
evaluation report should include only the manuals
(Section 9.6) and the design-specific sections (Sections
10 through 27). The Appendices should be used in the
evaluation, and referenced in the report, only as they
pertain to the specific application.
8.3.1 For each numbered section, the evaluation report
should state one of the following, and provide
supporting rationale:
“Conforms” — equipment conforms to the section
or to the intent of the section.
“Does not Conform” — equipment conforms to
neither the section nor to the intent of the section.
“N/A” — section is not applicable to equipment.
8.3.1.1 The results of a risk assessment indicating no
significant risk may be used in determining that the
equipment conforms to the intent of a section.
8.3.1.2 The evaluation report should include a
determination per SEMI S10 of the level of risk
associated with nonconformance findings.
8.3.1.3 Supporting rationale may include test data or
documented engineering rationale.
8.4 Evaluation Report Contents: Other Information —
The evaluation report should also include:
manufacturer’s model number;
serial number of unit(s) evaluated;
the date(s) that the equipment was evaluated;
a system/equipment description including
configuration, options, and essential diagrams; and
a statement of the qualifications of the evaluating
party. An in-house body, independent laboratory,
or product safety consulting firm (“third party”)
meeting the provisions of SEMI S7 may be used to
supply testing or evaluation of conformance to this
document.
8.5 Supporting Information Provided to Evaluator —
The following documentation should be provided to, or
developed by, the evaluator, as necessary to
demonstrate conformance to the provisions of this
guideline.
NOTE 14: It is recommended that the manufacturer’s typical
configuration and process be used for evaluation purposes.
Alternatively, a process agreed upon between the user and the
supplier may be used.
NOTE 15: Special options or configurations that may pose
additional hazards and are not included in the initial
evaluation may need a separate review. It is recommended
that upgrades, retrofits, and other changes that affect the
safety design of the equipment be evaluated for conformance.
8.5.1 General Information
Written system description, including hardware
configuration and function(s), power requirements,
power output, and other information necessary to
understand the design and operation of the
equipment.
Engineering data used to provide the rationale that
the equipment and subassembly seismic
anchorages are designed to satisfy the applicable
design loads (see Section 19, Seismic Protection).
Descriptions of the purpose and function of safety
devices, such as: emergency off devices (EMOs),
interlocks, pressure relief devices, and limit
controls.
A hazard analysis (see Section 6.8).
Ergonomics evaluation (see Section 16).
A list of safety critical parts and, for each one,
evidence of certification, or documentation
showing that the component is suitable for its
application.
A residual fire risk assessment as described in
Section 14.2.
Tests results, certifications, and design
specifications that are necessary to evaluate the
equipment with respect to fire safety. Descriptions
of the fire detection and suppression equipment and
controls should also be provided.
8.5.2 Industrial Hygiene Information
8.5.2.1 An industrial hygiene report, which should
include, as applicable:
ventilation assessment (see Section 22);