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SEMI S2-0703a E © SEMI 1991, 2004 11  descriptions o f the emergency off (EM O) and interloc k functions;  a list of hazardous materi als (e.g., lubricants, cleaners, coolants) required for maintenance, ancillary equip…

SEMI S2-0703a

 chemical inventory and hazard analysis (see

Section 23);

 ionizing radiation assessment (see Section 24);

 non-ionizing radiation assessment (see Section 25);

 laser assessment (see Section 26); and

 audio sound pressure level assessment (see Section

27).

8.5.3 Environmental Information (see Section 21) —

Documentation substantiating the following:

 consideration or inclusion of features that conserve

resources (e.g., energy, water, deionized water,

compressed gases, chemicals, and packaging);

 consideration of features that would promote

equipment and component reuse or refurbishing, or

material recycling upon decommissioning;

 consideration or inclusion of features for resource

recycling or reuse;

 chemical selection methods and criteria (see

Section 21.2.3);

 consideration of integrating effluent and emission

controls into the equipment; and

 efforts to reduce wastes, effluents, emissions, and

by-products.

NOTE 16: For purposes of Section 8.5.3, documentation may

include design notes, metrics (whether normalized or not),

meeting minutes, pareto evaluations, or other analyses.

9 Documents Provided to User

9.1 This section describes the documents that the

supplier provides to the user.

9.2 Evaluation Report — Upon request by the user, the

supplier should provide the user with a summary of the

SEMI S2 evaluation report (see Section 8) or the full

report.

9.2.1 Nonconformances noted in the report should be

addressed by the supplier, by providing either an action

plan or a justification for acceptance. The justification

should include countermeasures in place and a risk

characterization per SEMI S10.

9.3 Seismic Information — Refer to Section 19 of this

document.

9.4 Environmental Documentation — The

manufacturer should provide the user with the

following environmental documentation as applicable:

9.4.1 Energy consumption information, including idle,

average, and peak operating conditions, for the

manufacturer’s most representative (“baseline”)

process.

9.4.2 Mass balance, including idle, average, and peak

operating conditions, for the manufacturer’s most

representative (“baseline”) process.

NOTE 17: The mass balance may include resource

consumption rates, chemical process efficiencies, wastewater

effluent and air emission characterization, solid and hazardous

waste generation (quantity and quality), and by-products.

9.4.3 Information regarding routes of unintended

release (of effluents, wastes, emissions, and by-

products) and methods and devices to monitor and

control such releases. This should include information

on features to monitor, prevent, and control unintended

releases (see Section 21.2.4).

9.4.4 Information regarding routes of intended release

(of effluents, wastes, and emissions) and features to

monitor and control such releases (see Section 21.2.5).

9.4.5 A list of items that become solid waste as a result

of the operation, maintenance, and servicing of the

equipment, and that are constructed of or contain

substances whose disposal might be regulated (e.g.,

berylium-containing parts, vapor lamps, mercury

switches, batteries, contaminated parts, maintenance

wastes).

9.5 Industrial Hygiene Information — Refer to

Sections 22–27 of this document.

9.6 Manuals

9.6.1 The supplier should provide the user with

manuals based on the originally intended use of the

equipment. The manuals should describe the scope and

normal use of the equipment, and provide information

to enable safe facilitization, operation, maintenance,

and service of the equipment.

9.6.2 The manuals should conform to SEMI S13.

NOTE 18: Fire suppression agents, and chemicals used to

test fire detection or suppression systems, fall under the

MSDS provisions of SEMI S13 when they are provided with

the equipment.

NOTE 19: Hazardous energies within fire detection or

suppression systems fall under the hazardous energy control

provisions of SEMI S13 when fire detection or suppression

systems are provided with the equipment.

9.6.3 In addition to the provisions of SEMI S13, the

manuals should include:

 specific written instructions on routine Type 4

tasks, excluding troubleshooting (refer to Section

13.3);

 instructions for energy isolation (“lockout/tagout”)

(refer to Section 17.2);

SEMI S2-0703a

 descriptions of the emergency off (EMO) and

interlock functions;

 a list of hazardous materials (e.g., lubricants,

cleaners, coolants) required for maintenance,

ancillary equipment or peripheral operations,

including anticipated change-out frequency,

quantity, and potential for contamination from the

process;

 a list of items that become solid waste as a result of

the operation, maintenance, and servicing of the

equipment, and that are constructed of or contain

substances whose disposal might be regulated (e.g.,

berylium-containing parts, vapor lamps, mercury

switches, batteries, contaminated parts,

maintenance wastes); and

 maintenance and troubleshooting procedures

needed to maintain the effectiveness of safety

design features or devices (i.e., engineering

controls).

9.6.4 Information should be provided regarding

potential routes of unintended releases (see Section

21.2.4).

9.6.5 Recommended decontamination and

decommissioning procedures should be provided in

accordance with SEMI S12, and should include the

following information:

 identity of components and materials of

construction, in sufficient detail to support

recycling, refurbishment, and reuse decisions (see

Section 8.5.3); and

 residual hazardous materials, or parts likely to

become contaminated with hazardous materials,

that may be in the equipment prior to

decommissioning.

NOTE 20: It is recommended that the manual state that

changes to the typical process chemistry or to the equipment

could alter the anticipated environmental impact.

9.6.6 Maintenance Procedures with Potential

Environmental Impacts — The supplier’s

recommended maintenance procedures should:

 identify procedural steps during which releases

might occur, and the nature of the releases; and

 identify waste characteristics and methods to

minimize the volume of effluents, wastes, or

emissions generated during maintenance

procedures.

9.7 Fire Protection Documentation — The equipment

supplier should provide:

 a summary fire protection report as described in

Section 14.3;

 descriptions of optional fire risk mitigation features

(see Section 14.3.2);

NOTE 21: It is recommended that this be provided prior to

purchase.

 fire detection system operations, maintenance, and

test manuals;

 fire suppression system operations, maintenance,

and test manuals;

 acceptance documents provided by licensed

designers and installers (see Sections 14.4.4.12 and

14.4.5.16); and

 a list of any special apparatus needed to test the fire

detection or suppression features of the equipment.

The list should note whether the apparatus is

included with the equipment, or is sold separately.

10 Hazard Warning Labels

10.1 Where it is impractical to eliminate hazards

through design selection or to adequately reduce the

associated risk with safety or warning devices, hazard

warning labels should be provided to identify and warn

against hazards.

10.2 Labels should be durable and suitable for the

environment of the intended use.

10.3 Labels should conform to SEMI S1.

EXCEPTION: Some hazard label formats and content

are dictated by law (e.g., laser labeling and chemical

hazard communication labeling in certain countries of

use) and may not conform to SEMI S1.

11 Safety Interlock Systems

11.1 This section covers safety interlocks and safety

interlock systems.

NOTE 22: If a fire detection or suppression system is

provided with the equipment, see Section 14 for additional

information.

11.2 Where appropriate, equipment should use safety

interlock systems that protect personnel, facilities, and

the community from hazards inherent in the operation

of the equipment.

NOTE 23: Safety critical parts whose primary function is to

protect the equipment (e.g., circuit breakers, fuses) are

typically not considered to be safety interlocks.

11.3 Safety interlock systems should be designed such

that, upon activation of the interlock, the equipment, or

relevant parts of the equipment, is automatically

brought to a safe condition.

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11.4 Upon activation, the safety interlock should alert

the operator immediately.

EXCEPTION: Alerting the operator is not expected if a

safety interlock triggers the EMO circuit (see Section

12) or otherwise removes power to the user interface.

NOTE 24: An explanation of the cause is preferred upon

activation of a safety interlock.

11.5 Safety interlock systems should be fault-tolerant

and designed so that the functions or set points of the

system components cannot be altered without

disassembling, physically modifying, or damaging the

device or component.

EXCEPTION: When safety interlock systems having

adjustable set points or trip functions are used, access

should be limited to maintenance or service personnel

by requiring a deliberate action, such as using a tool or

special keypad sequences, to access the adjustable

devices or to adjust the devices.

NOTE 25: This section does not address the defeatability of

safety interlocks. See Section 11.7 for additional information.

NOTICE: Section 11.6 below will be withdrawn

upon July 1, 2006 publication and replaced by the

new Section 11.6 including: figures and tables as

shown in Delayed Revisions Section 2. The EH&S

Committee has voted that implementation of the

information is OPTIONAL before the effective date.

11.6 Electromechanical devices and components are

preferred. Solid-state devices and solid state

components may be used, provided that the safety

interlock system, or relevant parts of the system, are

evaluated for suitability for use in accordance with

appropriate standard(s). The evaluation for suitability

should take into consideration abnormal conditions

such as overvoltage, undervoltage, power supply

interruption, transient overvoltage, ramp voltage,

electromagnetic susceptibility, electrostatic discharge,

thermal cycling, humidity, dust, vibration, and jarring.

EXCEPTION: Where the severity of a reasonably

foreseeable mishap is deemed to be Minor per SEMI

S10, a software-based interlock may be considered

suitable.

NOTE 26: Where a safety interlock is provided to safeguard

personnel from a Severe or Catastrophic mishap as

categorized by SEMI S10, consideration of positive-opening

type switches is recommended.

NOTE 27: Evaluation for suitability for use may also include

reliability, self-monitoring, and redundancy as addressed

under standards such as NEMA ICS 1.1 and UL 991.

NOTE 28: Solid-state devices include operational amplifiers,

transistors, and integrated circuits.

11.6.1 FECS may be used in conjunction with

electromechanical or solid state devices and

components provided the programmable safety control

system conforms to an appropriate standard for

electronic safety systems. Components of the FECS

should be tested and certified according to the

requirements of the standard used. Examples of

recognized electronic safety systems standards include

IEC 61508 ISO 13849-1 (EN 954-1), ANSI/ISA

SP84.01 DIN/V/VDE-0801.

NOTE 29: Paragraph 13.4.3 states additional assessment

criteria for safety-related components and assemblies.

NOTE 30: A FECS is a subsystem of a (PES) Programmable

Electronic System. IEC 61508 is the preferred standard for

complex PES.

NOTE 31: Related Information 14 provides additional

information on applications of FECS design.

11.7 The safety interlock system should be designed to

minimize the need to override safety interlocks during

maintenance activities.

11.7.1 Safety interlocks that safeguard personnel

during operator tasks should not be defeatable without

the use of a tool.

11.7.2 When maintenance access is necessary to areas

protected by interlocks, defeatable safety interlocks

may be used, provided that they require an intentional

operation to bypass.

11.7.2.1 Upon exiting or completing the maintenance

mode, all safety interlocks should be automatically

restored.

11.7.2.2 If a safety interlock is defeated, the

maintenance manual should identify administrative

controls to safeguard personnel or to minimize the

hazard.

11.8 The restoration of a safety interlock should not

initiate equipment operation or parts movement where

this can give rise to a hazardous condition.

11.9 Switches and other control device contacts should

be connected to the ungrounded side of the circuit so

that a short circuit to ground does not result in the

interlocks being satisfied.

11.10 Where a hazard to personnel is controlled

through the use of an enclosure, the enclosure should

either: require a tool to gain access and be labeled

regarding the hazard against which it protects

personnel; or be interlocked. In addition to enclosures,

physical barriers at the point of hazard should be

included where inadvertent contact is likely.

NOTE 32: Where the removal of a cover exposes a hazard,

consider additional labels. See Section 10 for guidance.