semi合集-English.pdf - 第6790页
SEMI S2-0703a E © SEMI 1991, 2004 19 agent is effective, the options shou ld be specified to the user so that the user m ay specify which age nt should be provided with the equipment. The supplier shou ld also specify if…
SEMI S2-0703a
E
© SEMI 1991, 2004 18
allowing the completion of processing of substrates
in the equipment;
prevention of processing of additional substrates
until the trouble or supervisory condition is
cleared; and
providing, through an external interface, a signal to
the facility monitoring system or a constantly
attended location.
NOTE 56: Some local jurisdictions require that such alarms
signal the building/facility fire alarm systems.
14.4.4.7 The fire detection system should be capable of
operating at all times, including when the equipment is
inoperable (e.g., equipment controller problems) or in
maintenance modes (e.g., some or all of the
equipment’s hazardous energies are isolated (“locked
out”). For the purpose of this section, “inoperable”
includes the equipment states after an EMO is activated
and after the equipment has had its hazardous energies
isolated (i.e., has been “locked out”). Therefore, the
detection system should not require hazardous voltages
(e.g., line alternating current) to operate anything other
than the equipment within the detection system’s
control enclosure. Sensors and other devices outside
the detection system’s control enclosure should not
require hazardous voltage.
EXCEPTION: Operability is not required during
maintenance of the fire detection system.
14.4.4.7.1 Power at a hazardous voltage may be
supplied to the detection system controller enclosure
after the equipment EMO is activated or after the
equipment has had its hazardous energies isolated only
if the wiring providing the hazardous voltage is
separated from other wiring and is suitably labeled.
14.4.4.7.2 If the hazardous voltage supply to the
detection system controller is not disconnected by the
energy isolation method that removes the other
hazardous voltages from the equipment, there must also
be separate hazardous energy isolation capability for
the hazardous voltage supplies to the detection system
controller enclosure.
14.4.4.8 A battery or other regulatory agency
acceptable emergency power alternative, capable of
sustaining the detection system for 24 hours, should be
provided.
NOTE 57: Back-up power must be provided in accordance
with local regulations. The requirements for back-up power
vary among jurisdictions.
14.4.4.9 The fire detection system should remain active
following EMO activation.
14.4.4.10 There may be cases where the internal power
supply for a detection system cannot supply power for
the full length of extended maintenance procedures
(i.e., procedures longer than the expected duration of
the back-up power supply). In such cases, the supplier
should provide written procedures for either removing
the fire hazard or safely supplying power to the fire
detection system.
14.4.4.11 Activation of the fire detection system
should shut down the equipment within the shortest
time period that allows for safe equipment shutdown.
This includes shutdown of any fire-related hazard
source that could create additional fire risks for the
affected module or component.
NOTE 58: See Sections 14.4.3.3 and 14.4.3.4 for related
provisions.
EXCEPTION 1: A non-recycling, deadman abort
switch is acceptable on detection systems that are used
for equipment shutdown, but not on those used for
activation of a suppression system.
EXCEPTION 2: Activation of the fire detection system
should not remove power from fire and safety systems.
14.4.4.12 The equipment design and configuration
should not prevent licensed parties from certifying the
design and installation of fire detection systems.
NOTE 59: This is not meant to suggest installation by
licensed parties; however, some jurisdictions require fire
detection and suppression system installers to be licensed as
specified by the jurisdiction.
14.4.5 Fire Suppression — The following criteria
apply to any fire suppression system determined to be
appropriate by the fire risk assessment.
NOTE 60: As a fire detection system is generally required to
provide the initiating sequence for the suppression system, it
is the intention of this guideline that this be the same fire
detection system described in Section 14.4.4.
14.4.5.1 The fire suppression system, which includes
nozzles, actuators, and their associated controls, should
be certified by an accredited testing laboratory and
suitable for the application and for the environment in
which it to be used.
NOTE 61: Such certifications typically require that the
components of fire suppression systems are readily
identifiable and distinguishable from other components in the
equipment. This includes adequate labeling of piping.
14.4.5.2 The fire suppression agent should be accepted
for the application by an accredited testing laboratory.
The suppression agent selection process should include
an evaluation of the amount and storage location of the
suppression agent and of potential damage to a
cleanroom and the environment. The least damaging
effective agent should be selected. If more than one
SEMI S2-0703a
E
© SEMI 1991, 2004 19
agent is effective, the options should be specified to the
user so that the user may specify which agent should be
provided with the equipment. The supplier should also
specify if the user may provide the agent.
14.4.5.3 The fire suppression agent and delivery
system should be designed and installed in accordance
with the appropriate international or national standard
(e.g., NFPA 12, NFPA 13, NFPA 2001). It may be
preferable for the equipment supplier to specify the
location and performance of suppression system
components, but not provide them, so that the user may
better integrate the suppression in the equipment with
that in the facility. This alternative should be negotiated
explicitly with the user.
14.4.5.4 The assessment of the equipment to SEMI S2
should include the risks associated with the suppression
systems.
NOTE 62: This includes risks (e.g., chemical exposure,
noise, and asphyxiation) introduced by the incorporation of
the suppression system.
14.4.5.5 Activation of the fire suppression system
should alarm audibly and visually at the equipment.
This may be done by the same system that initiates
activation.
14.4.5.6 If the discharge is likely to present a risk to
personnel, the alarm should provide adequate time to
allow personnel to avoid the hazard of the agent
discharge.
14.4.5.6.1 If there is a confined space in the equipment,
the asphyxiation hazard posed by the suppression
system should be assessed.
14.4.5.7 The fire suppression system should be capable
of operating at all times, including when equipment is
inoperable and during equipment maintenance.
NOTE 63: For the purpose of this section, “inoperable”
includes the equipment state after the EMO is activated.
EXCEPTION: Most suppression systems contain
sources of hazardous energy. These sources should be
capable of being isolated (i.e., “locked out”) to protect
personnel.
14.4.5.8 The fire suppression system should remain
active following EMO activation.
14.4.5.9 There may be cases where the internal power
supply for a suppression system cannot supply power
for the full length of extended maintenance procedures
(i.e., procedures longer than the expected duration of
the back-up power supply). In such cases, the supplier
should provide written procedures for either removing
the fire hazard or safely supplying power to the fire
suppression system.
14.4.5.10 Allowances can be made to provide for the
deactivation of an automatic discharge of the
suppression system when in the maintenance mode.
Such deactivation switches should be supervised (i.e., if
the suppression system is deactivated, there should be
an indication to the user and the resumption of
production in the equipment should be prevented.)
NOTE 64: Hazardous energies associated with the fire
suppression system may be isolated (i.e., “locked out”) using
an energy isolation procedure (see Section 17) during
equipment maintenance.
NOTE 65: The permissibility of deactivation of suppression
systems varies among jurisdictions.
14.4.5.11 A back-up power supply, capable of
sustaining the suppression system for 24 hours, should
be included where the suppression system requires
independent power from the detection system used to
activate the suppression.
NOTE 66: The requirements for back-up power vary among
jurisdictions.
14.4.5.12 The fire suppression system should be
capable of interfacing with the facility’s alarm system.
This may be done via the fire detection system.
14.4.5.13 Activation of the fire suppression system
should shut down the equipment within the shortest
time period that allows for safe equipment shutdown.
NOTE 67: See Sections 14.4.3.3 and 14.4.3.4 for related
provisions.
EXCEPTION: Activation of the fire suppression system
should not remove power from fire and safety systems.
14.4.5.14 The fire suppression system should be
capable of manual activation, which should shut down
the equipment and activate an alarm signal locally and
at a constantly attended location.
14.4.5.15 The fire suppression system should be tested
on a representative sample of the equipment. The test
procedure should include a suppression agent discharge
test, unless precluded for health or environmental
reasons. This test may be performed at the equipment
supplier’s or other similar facility, but should be
performed under conditions that adequately duplicate
any factors (e.g., equipment exhaust) that may reduce
the effectiveness of the suppression. This representative
sample need not be fully operational, but should
duplicate those factors (e.g., exhaust, air flow) that
could negatively affect the performance of the system.
14.4.5.16 Procedures for controlling access to the
suppression agent source (e.g., protecting agent
cylinders from disconnection by unauthorized
personnel) should be provided.
SEMI S2-0703a
E
© SEMI 1991, 2004 20
14.4.5.17 The equipment design and configuration
should not prevent licensed parties from certifying the
design and installation of fire suppression systems.
NOTE 68: This is not meant to suggest installation by
licensed parties; however, some jurisdictions require fire
detection and suppression system installers to be licensed as
specified by the jurisdiction.
14.4.5.18 Installation of Piping for Fire Suppression
Agent — The fire suppression piping system should be:
made from corrosion-resistant components,
designed to minimize water accumulation around
components and control other conditions that
promote corrosion, and
designed so mechanical inspections are easily
performed.
14.4.5.19 Piping should be designed, installed, and
tested to ensure that it is capable of containing the high
pressures generated by the discharge of the suppression
agent.
14.4.5.20 The supplier should provide information
necessary for proper field installation of piping.
14.5 Warnings and Safe Work Practices — Warnings
and safe work practices related to fire detection and
suppression features of the equipment (e.g., restrictions
on using open flames within range of active fire
detection systems, hazardous stored energy in
pressurized suppression systems) should be part of the
documentation provided by the supplier.
14.6 Maintenance and Testing of Fire Detection and
Suppression Systems — The equipment supplier should
provide detailed maintenance and testing procedures for
the fire systems provided with each piece of equipment.
These procedures should include testing frequency, as
well as details of special equipment required for testing.
14.6.1 Chemical generating test apparatus (e.g., canned
smoke) should be avoided for cleanroom applications.
NOTE 69: Information about UV/IR generating sources used
for testing fire detection systems may require consideration of
Section 25 (Non-Ionizing Radiation).
14.6.2 The maintenance testing procedure should
include testing of the facility interface and verifying
that all the equipment fire detection and suppression
systems are functional.
14.6.3 The detection and suppression systems should
be designed so that preventative maintenance of
components does not degrade their performance (e.g.,
by resulting in displacement or destruction of sensors).
14.6.4 Supplier should document the sound pressure
level generated during suppression agent discharge, if
the test is performed.
14.6.5 Materials or procedures used for testing and
maintenance of the fire detection and suppression
system should not degrade the equipment’s ability to
perform its intended function.
14.6.6 Suppliers should describe hazardous energies
present in fire detection and suppression systems, and
provide instructions for their proper isolation (see
Section 17.2).
14.7 Environmental — Suppliers should provide
guidance to users regarding the impact on emissions of
any fire suppression agents used in the equipment.
15 Heated Chemical Baths
15.1 Refer to SEMI S3 for the minimum safety design
considerations for heated chemical baths. Each heated
chemical bath should have the following:
grounded or GFCI-protected heater;
power interrupt;
manual reset;
automatic temperature controller;
liquid level sensor;
fail-safe over-temperature protection;
proper construction materials;
exhaust failure interlock; and
overcurrent protection.
NOTE 70: See Section 14 for fire protection risk assessment
considerations for baths using combustible or flammable
chemicals.
16 Ergonomics and Human Factors
16.1 General — Ergonomics and human factors design
principles should be incorporated into the development
of equipment to identify and eliminate or mitigate
ergonomics- and human factors-related hazards.
16.2 Provisions for Conformance — Equipment should
be assessed to the guidelines set forth in SEMI S8. The
Supplier Ergonomic Success Criteria (SESC; see SEMI
S8), or the equivalent, should be used to document the
assessment.