semi合集-English.pdf - 第6791页
SEMI S2-0703a E © SEMI 1991, 2004 20 14.4.5.17 The equipm ent design and configuratio n should not prev ent licensed parties from certifying the design and installation of fire suppression systems. NOTE 68: This is not m…
SEMI S2-0703a
E
© SEMI 1991, 2004 19
agent is effective, the options should be specified to the
user so that the user may specify which agent should be
provided with the equipment. The supplier should also
specify if the user may provide the agent.
14.4.5.3 The fire suppression agent and delivery
system should be designed and installed in accordance
with the appropriate international or national standard
(e.g., NFPA 12, NFPA 13, NFPA 2001). It may be
preferable for the equipment supplier to specify the
location and performance of suppression system
components, but not provide them, so that the user may
better integrate the suppression in the equipment with
that in the facility. This alternative should be negotiated
explicitly with the user.
14.4.5.4 The assessment of the equipment to SEMI S2
should include the risks associated with the suppression
systems.
NOTE 62: This includes risks (e.g., chemical exposure,
noise, and asphyxiation) introduced by the incorporation of
the suppression system.
14.4.5.5 Activation of the fire suppression system
should alarm audibly and visually at the equipment.
This may be done by the same system that initiates
activation.
14.4.5.6 If the discharge is likely to present a risk to
personnel, the alarm should provide adequate time to
allow personnel to avoid the hazard of the agent
discharge.
14.4.5.6.1 If there is a confined space in the equipment,
the asphyxiation hazard posed by the suppression
system should be assessed.
14.4.5.7 The fire suppression system should be capable
of operating at all times, including when equipment is
inoperable and during equipment maintenance.
NOTE 63: For the purpose of this section, “inoperable”
includes the equipment state after the EMO is activated.
EXCEPTION: Most suppression systems contain
sources of hazardous energy. These sources should be
capable of being isolated (i.e., “locked out”) to protect
personnel.
14.4.5.8 The fire suppression system should remain
active following EMO activation.
14.4.5.9 There may be cases where the internal power
supply for a suppression system cannot supply power
for the full length of extended maintenance procedures
(i.e., procedures longer than the expected duration of
the back-up power supply). In such cases, the supplier
should provide written procedures for either removing
the fire hazard or safely supplying power to the fire
suppression system.
14.4.5.10 Allowances can be made to provide for the
deactivation of an automatic discharge of the
suppression system when in the maintenance mode.
Such deactivation switches should be supervised (i.e., if
the suppression system is deactivated, there should be
an indication to the user and the resumption of
production in the equipment should be prevented.)
NOTE 64: Hazardous energies associated with the fire
suppression system may be isolated (i.e., “locked out”) using
an energy isolation procedure (see Section 17) during
equipment maintenance.
NOTE 65: The permissibility of deactivation of suppression
systems varies among jurisdictions.
14.4.5.11 A back-up power supply, capable of
sustaining the suppression system for 24 hours, should
be included where the suppression system requires
independent power from the detection system used to
activate the suppression.
NOTE 66: The requirements for back-up power vary among
jurisdictions.
14.4.5.12 The fire suppression system should be
capable of interfacing with the facility’s alarm system.
This may be done via the fire detection system.
14.4.5.13 Activation of the fire suppression system
should shut down the equipment within the shortest
time period that allows for safe equipment shutdown.
NOTE 67: See Sections 14.4.3.3 and 14.4.3.4 for related
provisions.
EXCEPTION: Activation of the fire suppression system
should not remove power from fire and safety systems.
14.4.5.14 The fire suppression system should be
capable of manual activation, which should shut down
the equipment and activate an alarm signal locally and
at a constantly attended location.
14.4.5.15 The fire suppression system should be tested
on a representative sample of the equipment. The test
procedure should include a suppression agent discharge
test, unless precluded for health or environmental
reasons. This test may be performed at the equipment
supplier’s or other similar facility, but should be
performed under conditions that adequately duplicate
any factors (e.g., equipment exhaust) that may reduce
the effectiveness of the suppression. This representative
sample need not be fully operational, but should
duplicate those factors (e.g., exhaust, air flow) that
could negatively affect the performance of the system.
14.4.5.16 Procedures for controlling access to the
suppression agent source (e.g., protecting agent
cylinders from disconnection by unauthorized
personnel) should be provided.
SEMI S2-0703a
E
© SEMI 1991, 2004 20
14.4.5.17 The equipment design and configuration
should not prevent licensed parties from certifying the
design and installation of fire suppression systems.
NOTE 68: This is not meant to suggest installation by
licensed parties; however, some jurisdictions require fire
detection and suppression system installers to be licensed as
specified by the jurisdiction.
14.4.5.18 Installation of Piping for Fire Suppression
Agent — The fire suppression piping system should be:
made from corrosion-resistant components,
designed to minimize water accumulation around
components and control other conditions that
promote corrosion, and
designed so mechanical inspections are easily
performed.
14.4.5.19 Piping should be designed, installed, and
tested to ensure that it is capable of containing the high
pressures generated by the discharge of the suppression
agent.
14.4.5.20 The supplier should provide information
necessary for proper field installation of piping.
14.5 Warnings and Safe Work Practices — Warnings
and safe work practices related to fire detection and
suppression features of the equipment (e.g., restrictions
on using open flames within range of active fire
detection systems, hazardous stored energy in
pressurized suppression systems) should be part of the
documentation provided by the supplier.
14.6 Maintenance and Testing of Fire Detection and
Suppression Systems — The equipment supplier should
provide detailed maintenance and testing procedures for
the fire systems provided with each piece of equipment.
These procedures should include testing frequency, as
well as details of special equipment required for testing.
14.6.1 Chemical generating test apparatus (e.g., canned
smoke) should be avoided for cleanroom applications.
NOTE 69: Information about UV/IR generating sources used
for testing fire detection systems may require consideration of
Section 25 (Non-Ionizing Radiation).
14.6.2 The maintenance testing procedure should
include testing of the facility interface and verifying
that all the equipment fire detection and suppression
systems are functional.
14.6.3 The detection and suppression systems should
be designed so that preventative maintenance of
components does not degrade their performance (e.g.,
by resulting in displacement or destruction of sensors).
14.6.4 Supplier should document the sound pressure
level generated during suppression agent discharge, if
the test is performed.
14.6.5 Materials or procedures used for testing and
maintenance of the fire detection and suppression
system should not degrade the equipment’s ability to
perform its intended function.
14.6.6 Suppliers should describe hazardous energies
present in fire detection and suppression systems, and
provide instructions for their proper isolation (see
Section 17.2).
14.7 Environmental — Suppliers should provide
guidance to users regarding the impact on emissions of
any fire suppression agents used in the equipment.
15 Heated Chemical Baths
15.1 Refer to SEMI S3 for the minimum safety design
considerations for heated chemical baths. Each heated
chemical bath should have the following:
grounded or GFCI-protected heater;
power interrupt;
manual reset;
automatic temperature controller;
liquid level sensor;
fail-safe over-temperature protection;
proper construction materials;
exhaust failure interlock; and
overcurrent protection.
NOTE 70: See Section 14 for fire protection risk assessment
considerations for baths using combustible or flammable
chemicals.
16 Ergonomics and Human Factors
16.1 General — Ergonomics and human factors design
principles should be incorporated into the development
of equipment to identify and eliminate or mitigate
ergonomics- and human factors-related hazards.
16.2 Provisions for Conformance — Equipment should
be assessed to the guidelines set forth in SEMI S8. The
Supplier Ergonomic Success Criteria (SESC; see SEMI
S8), or the equivalent, should be used to document the
assessment.
SEMI S2-0703a
E
© SEMI 1991, 2004 21
17 Hazardous Energy Isolation
17.1 General
17.1.1 Lockable energy isolation capabilities should be
provided for tasks that may result in contact with
hazardous energy sources.
17.1.2 Where service tasks may be safely performed on
subassemblies, energy isolation devices (e.g., circuit
breakers, disconnect switches, manual valves) may be
provided for the subassemblies for use as an alternative
to shutting down the entire equipment system. The
isolation devices should isolate all hazardous energy to
the subassemblies and be capable of being locked in the
position in which the hazardous energy is isolated.
17.1.3 The person actuating or inspecting an energy
isolating device should not be exposed to serious risks
of tripping or falling or of coming in contact with
energized electrical parts, moving machinery, surfaces
or objects operating at high temperatures, or other
hazardous equipment.
NOTE 71: Hazardous energies include electrical, stored
electrical (e.g., capacitors, batteries), chemical,
thermal/cryogenic, stored pressure (e.g., pressurized
containers), suspended weight, stored mechanical (e.g.,
springs), generated pressure (e.g., hydraulics and pneumatics),
and other sources that may lead to the risk of injury.
NOTE 72: In order to minimize down-time and provide ease
of use, it is preferred to have energy isolation devices located
in the areas where maintenance or service is performed.
NOTE 73: Energy isolation devices for incompatible
hazardous energy sources (e.g., electrical and water,
incompatible gases) are recommended to be separated.
NOTE 74: Isolation of hazardous energy may include:
deenergizing of hazardous voltage; stopping flow of
hazardous production material (HPM); containing HPM
reservoirs; depressurizing or containing HPM and pneumatic
lines; deenergizing or totally containing hazardous radiation;
discharging of residual energy in capacitors; stopping of
hazardous moving parts; and shutting off hazardous
temperature sources.
NOTE 75: Energy isolation devices with integral locking
capabilities are preferred, but may not be feasible or
commercially available, in which case detachable lockout
adapters may be used.
NOTE 76: See Section 14 for information on fire protection
hazardous energies.
17.2 Installation and Maintenance Manuals
17.2.1 Installation and maintenance manuals should
identify the types of hazardous energies within the
equipment.
17.2.2 Installation and maintenance manuals should
provide specific instructions for the equipment on how
to:
shut down the equipment in an orderly manner;
locate and operate all the equipment's energy
isolating devices;
affix energy isolating (“lockout/tagout”) devices;
relieve any stored energies;
verify that the equipment has actually been isolated
and deenergized; and
properly release the equipment from its isolated
state.
17.2.3 Where the manufacturer provides written
maintenance procedures for tasks within subassemblies,
and intends that these tasks be performed without
controlling hazardous energies at the entire equipment
level, the installation and maintenance manuals should
provide appropriate energy isolation procedures at the
subassembly level.
17.3 Electrical Energy Isolation
17.3.1 The main energy isolation capabilities
(equipment supply disconnect) should be in a location
that is readily accessible and should be lockable only in
the deenergized position.
NOTE 77: For equipment with multiple incoming supply
sources, it is recommended that all of the energy isolation
devices be located in one area.
17.4 Non-Electrical Energy Isolation
17.4.1 The equipment should include provisions and
procedures so that hazardous energy sources, such as
pressurized systems and stored energy, can be isolated
or reduced to a zero energy state prior to maintenance
or service work.
17.4.2 The hazardous energy isolation devices should
be in a location that is readily accessible.
17.4.3 The hazardous energy isolation devices should
be capable of being locked in the position in which the
hazardous energy is isolated.
18 Mechanical Design
18.1 This section covers hazards due to the mechanical
aspects of the equipment.
NOTE 78: This is similar to the essential requirements of
European Union directives. The supplier has the option of
demonstrating compliance by choosing standards that are
appropriate to the machine and application.
NOTE 79: Pressurized vessels must meet applicable codes
and regulations.
18.2 Machine Stability — Equipment, components,
and fittings should be designed and constructed so that
they are stable under reasonably foreseeable shipping,