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SEMI S2-0703a E © SEMI 1991, 2004 21 17 Hazardous Energy Isolation 17.1 General 17.1.1 Lockable energ y isolation capabilities shou ld be provided for tasks that may resu lt in contact with hazardous energy sources. 17.1…

SEMI S2-0703a

14.4.5.17 The equipment design and configuration

should not prevent licensed parties from certifying the

design and installation of fire suppression systems.

NOTE 68: This is not meant to suggest installation by

licensed parties; however, some jurisdictions require fire

detection and suppression system installers to be licensed as

specified by the jurisdiction.

14.4.5.18 Installation of Piping for Fire Suppression

Agent — The fire suppression piping system should be:

 made from corrosion-resistant components,

 designed to minimize water accumulation around

components and control other conditions that

promote corrosion, and

 designed so mechanical inspections are easily

performed.

14.4.5.19 Piping should be designed, installed, and

tested to ensure that it is capable of containing the high

pressures generated by the discharge of the suppression

agent.

14.4.5.20 The supplier should provide information

necessary for proper field installation of piping.

14.5 Warnings and Safe Work Practices — Warnings

and safe work practices related to fire detection and

suppression features of the equipment (e.g., restrictions

on using open flames within range of active fire

detection systems, hazardous stored energy in

pressurized suppression systems) should be part of the

documentation provided by the supplier.

14.6 Maintenance and Testing of Fire Detection and

Suppression Systems — The equipment supplier should

provide detailed maintenance and testing procedures for

the fire systems provided with each piece of equipment.

These procedures should include testing frequency, as

well as details of special equipment required for testing.

14.6.1 Chemical generating test apparatus (e.g., canned

smoke) should be avoided for cleanroom applications.

NOTE 69: Information about UV/IR generating sources used

for testing fire detection systems may require consideration of

Section 25 (Non-Ionizing Radiation).

14.6.2 The maintenance testing procedure should

include testing of the facility interface and verifying

that all the equipment fire detection and suppression

systems are functional.

14.6.3 The detection and suppression systems should

be designed so that preventative maintenance of

components does not degrade their performance (e.g.,

by resulting in displacement or destruction of sensors).

14.6.4 Supplier should document the sound pressure

level generated during suppression agent discharge, if

the test is performed.

14.6.5 Materials or procedures used for testing and

maintenance of the fire detection and suppression

system should not degrade the equipment’s ability to

perform its intended function.

14.6.6 Suppliers should describe hazardous energies

present in fire detection and suppression systems, and

provide instructions for their proper isolation (see

Section 17.2).

14.7 Environmental — Suppliers should provide

guidance to users regarding the impact on emissions of

any fire suppression agents used in the equipment.

15 Heated Chemical Baths

15.1 Refer to SEMI S3 for the minimum safety design

considerations for heated chemical baths. Each heated

chemical bath should have the following:

 grounded or GFCI-protected heater;

 power interrupt;

 manual reset;

 automatic temperature controller;

 liquid level sensor;

 fail-safe over-temperature protection;

 proper construction materials;

 exhaust failure interlock; and

 overcurrent protection.

NOTE 70: See Section 14 for fire protection risk assessment

considerations for baths using combustible or flammable

chemicals.

16 Ergonomics and Human Factors

16.1 General — Ergonomics and human factors design

principles should be incorporated into the development

of equipment to identify and eliminate or mitigate

ergonomics- and human factors-related hazards.

16.2 Provisions for Conformance — Equipment should

be assessed to the guidelines set forth in SEMI S8. The

Supplier Ergonomic Success Criteria (SESC; see SEMI

S8), or the equivalent, should be used to document the

assessment.

SEMI S2-0703a

17 Hazardous Energy Isolation

17.1 General

17.1.1 Lockable energy isolation capabilities should be

provided for tasks that may result in contact with

hazardous energy sources.

17.1.2 Where service tasks may be safely performed on

subassemblies, energy isolation devices (e.g., circuit

breakers, disconnect switches, manual valves) may be

provided for the subassemblies for use as an alternative

to shutting down the entire equipment system. The

isolation devices should isolate all hazardous energy to

the subassemblies and be capable of being locked in the

position in which the hazardous energy is isolated.

17.1.3 The person actuating or inspecting an energy

isolating device should not be exposed to serious risks

of tripping or falling or of coming in contact with

energized electrical parts, moving machinery, surfaces

or objects operating at high temperatures, or other

hazardous equipment.

NOTE 71: Hazardous energies include electrical, stored

electrical (e.g., capacitors, batteries), chemical,

thermal/cryogenic, stored pressure (e.g., pressurized

containers), suspended weight, stored mechanical (e.g.,

springs), generated pressure (e.g., hydraulics and pneumatics),

and other sources that may lead to the risk of injury.

NOTE 72: In order to minimize down-time and provide ease

of use, it is preferred to have energy isolation devices located

in the areas where maintenance or service is performed.

NOTE 73: Energy isolation devices for incompatible

hazardous energy sources (e.g., electrical and water,

incompatible gases) are recommended to be separated.

NOTE 74: Isolation of hazardous energy may include:

deenergizing of hazardous voltage; stopping flow of

hazardous production material (HPM); containing HPM

reservoirs; depressurizing or containing HPM and pneumatic

lines; deenergizing or totally containing hazardous radiation;

discharging of residual energy in capacitors; stopping of

hazardous moving parts; and shutting off hazardous

temperature sources.

NOTE 75: Energy isolation devices with integral locking

capabilities are preferred, but may not be feasible or

commercially available, in which case detachable lockout

adapters may be used.

NOTE 76: See Section 14 for information on fire protection

hazardous energies.

17.2 Installation and Maintenance Manuals

17.2.1 Installation and maintenance manuals should

identify the types of hazardous energies within the

equipment.

17.2.2 Installation and maintenance manuals should

provide specific instructions for the equipment on how

to:

 shut down the equipment in an orderly manner;

 locate and operate all the equipment's energy

isolating devices;

 affix energy isolating (“lockout/tagout”) devices;

 relieve any stored energies;

 verify that the equipment has actually been isolated

and deenergized; and

 properly release the equipment from its isolated

state.

17.2.3 Where the manufacturer provides written

maintenance procedures for tasks within subassemblies,

and intends that these tasks be performed without

controlling hazardous energies at the entire equipment

level, the installation and maintenance manuals should

provide appropriate energy isolation procedures at the

subassembly level.

17.3 Electrical Energy Isolation

17.3.1 The main energy isolation capabilities

(equipment supply disconnect) should be in a location

that is readily accessible and should be lockable only in

the deenergized position.

NOTE 77: For equipment with multiple incoming supply

sources, it is recommended that all of the energy isolation

devices be located in one area.

17.4 Non-Electrical Energy Isolation

17.4.1 The equipment should include provisions and

procedures so that hazardous energy sources, such as

pressurized systems and stored energy, can be isolated

or reduced to a zero energy state prior to maintenance

or service work.

17.4.2 The hazardous energy isolation devices should

be in a location that is readily accessible.

17.4.3 The hazardous energy isolation devices should

be capable of being locked in the position in which the

hazardous energy is isolated.

18 Mechanical Design

18.1 This section covers hazards due to the mechanical

aspects of the equipment.

NOTE 78: This is similar to the essential requirements of

European Union directives. The supplier has the option of

demonstrating compliance by choosing standards that are

appropriate to the machine and application.

NOTE 79: Pressurized vessels must meet applicable codes

and regulations.

18.2 Machine Stability — Equipment, components,

and fittings should be designed and constructed so that

they are stable under reasonably foreseeable shipping,

SEMI S2-0703a

installation, and operating conditions. The need for

special handling devices and anchors should be

indicated in the instructions. Unanchored equipment in

its installed condition should not overbalance when

tilted in any direction to an angle of 10 degrees from its

normal position.

NOTE 80: See IEC 61010-1 for an example of stability tests.

18.3 Break-up During Operation — The various parts

of the equipment and its linkages should be able to

withstand the stresses to which they are subjected when

used as designed. Precautions should be taken to

control risks from falling or flying objects.

18.3.1 The potential effects of fatigue, aging,

corrosion, and abrasion for the intended operating

environment should be considered as part of the

mechanical hazards risk assessment.

18.3.2 Where a risk of rupture or disintegration

remains despite the measures taken (e.g., a substrate

chuck that loses its vacuum), the moving parts should

be mounted and positioned in such a way that, in case

of rupture, their fragments will be contained.

18.3.3 Both rigid and flexible pipes carrying liquids or

gases should be able to withstand the foreseen internal

and external stresses and should be firmly attached or

protected against external stresses and strains. Based on

the application, an appropriate factor of safety should

be included.

18.4 Moving Parts — The moving parts of equipment

should be designed, built, and positioned to avoid

hazards. Where hazards persist, equipment should be

fitted with guards or protective devices that reduce the

likelihood of contact that could lead to injury.

18.4.1 Where the machine is designed to perform

operations under different conditions of use (e.g.,

different speeds or energy supplies), it should be

designed and constructed in such a way that selection

and adjustment of these conditions can be performed

safely.

18.4.2 Selection of Protection Against Hazards Related

to Moving Parts — Guards or protective devices used

to protect against hazards related to moving parts

should be selected on the basis of a risk assessment that

includes the:

 hazards that are being guarded against;

 probability of occurrence and severity of injury of

each hazard scenario; and

 frequency of removal of guards.

18.4.3 Guards and protection devices. Guards should:

 reduce the risk that personnel will contact the

mechanical hazard to an acceptable level; and

 not give rise to additional risk.

18.5 Lifting Operations — Equipment presenting

hazards due to lifting operations (e.g., falling loads,

collisions, tipping) should be designed and constructed

to reduce the risk to an acceptable level.

18.6 Extreme Temperatures — Surfaces that are

accessible to personnel, and that are at high (per

temperature limits in Table 1) or very cold temperatures

(below -10C [14F]), should be fitted with guards or

designed out.

18.6.1 Where it is not feasible to protect or design out

the exposures to extreme temperature, temperatures

exceeding the limits are permitted, provided that either

of the following conditions is met:

 unintentional contact with such a surface is

unlikely; or

 the part has a warning indicating that the surface is

at a hazardous temperature.

Table 1 Potentially Hazardous Surface Temperatures

Maximum Surface Temperature, in



Accessible Parts

Metal Glass, Porcelain,

Vitreous Material

Plastic,

Rubber

Handles, knobs, grips, etc., held or touched for short periods (5

seconds or less) in normal use.

60 70 85

Handles, knobs, grips, etc. held continuously in normal use. 51 56 60

External surfaces of equipment, or parts inside the equipment,

that may be touched.

65 80 95