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SEMI S2-0703a E © SEMI 1991, 2004 25  reduced use of res ources during maintena nce procedures (e. g ., parts cleani ng procedures could include minimum rinse rates and rinse times);  recycling or reusing chem ic als i…

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19.4 The locations of the tie-ins, attachments, or

seismic anchorage points should be clearly identified.

NOTE 89: It is not the intent of SEMI S2 that the supplier

provide the seismic attachment point hardware. Such

hardware may be provided as agreed upon between supplier

and user.

NOTE 90: It is the responsibility of the user to verify that the

vibration isolation, leveling, seismic reinforcing, and load

distribution is adequate.

20 Automated Material Handlers

20.1 This section covers automated material handlers,

which include:

 substrate handlers;

 industrial robots and industrial robot systems; and

 unmanned transport vehicles (UTVs).

NOTE 91: Substrate handlers typically handle a single

substrate at a time, and are distinguished from industrial

robots by their small load capacity.

20.2 General — The means of incorporating personnel

safeguarding into automated material handlers should

be based on a hazard analysis. The hazard analysis

should include consideration of the size, capacity,

speed, and spatial operating range of the handler.

20.2.1 Subsystem Stops — If a separate stop button is

used for the automated material handler, it should be

differentiated from the EMO button.

20.3 Substrate Handlers — See Section 20.2, General.

20.4 Industrial Robots and Industrial Robot Systems

— Industrial robots and industrial robot systems should

meet the requirements of appropriate national or

international standards, e.g., ANSI/RIA R15.06, ISO

10218, EN 775. If there are deviations from these

standards because of semiconductor applications of the

robot, these deviations may be found acceptable based

on risk assessments.

20.5 UTVs

NOTE 92: There are two basic types of UTVs: (1) the floor-

traveling (including both rail-guided and rail-independent)

UTV, that automatically travels on the floor to a specified

destination where it is unloaded or loaded; and (2) the space-

traveling UTV, which automatically travels without resting on

the floor (e.g., in the space below the ceiling) to a specified

destination where it is loaded or unloaded. UTVs do not

include rail-guided mechanisms that are attached to

equipment (such as in wet benches).

20.5.1 Collision Avoidance — UTVs generally travel

in wide areas and are used in a system rather than stand

alone operation. UTVs should be equipped with a non-

contact approach sensing device so that they do not

inadvertently contact people or other objects.

20.5.2 UTVs: Loading and Unloading Equipment

20.5.2.1 UTVs should be interlocked with equipment

such as semiconductor process equipment, automated

load ports, stockers, ground-based conveyors, and

automated warehouses as needed to ensure that the load

remains secure and that the UTV and transfer

components are not in conflict with one another.

20.5.2.2 If loading results in an unsafe condition, the

equipment should detect and indicate the condition, and

movement of all loading equipment should stop

immediately. The system should not reset or restart

automatically.

21 Environmental Considerations

21.1 This section covers environmental impacts

throughout the life of the equipment.

NOTE 93: It is recommended that environmental impacts be

balanced against other factors, including safety and health,

legal, and regulatory requirements.

NOTE 94: It is recommended that the manufacturer maintain

awareness of relevant environmental regulations, either

internally or through the user.

NOTE 95: The user is responsible for providing the

manufacturer with information regarding any environmental

restrictions that are specific to a given site and that may

impact equipment design (e.g., cumulative emissions limits,

permit requirements, site-specific programs).

NOTE 96: See Section 14 for fire suppression emission

issues.

NOTE 97: References to “process” in this section are meant

to refer to the baseline process.

21.2 Design

21.2.1 The following design guidelines apply to all

phases of equipment life, from concept to

decommissioning and disposal.

NOTE 98: The documentation described in Sections 8.5.3

and 9.4 provide information that can be used for evaluating

conformance to this section.

21.2.2 Resource Conservation

21.2.2.1 The manufacturer should consider resource

conservation (i.e., reduction, reuse, recycling) during

equipment design, for example:

 water reuse or water recycling within the

equipment;

 reduced chemical consumption, energy use, and

water use (e.g., reducing resource use when no

process is occurring);

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 reduced use of resources during maintenance

procedures (e.g., parts cleaning procedures could

include minimum rinse rates and rinse times);

 recycling or reusing chemicals in the equipment,

rather than consuming only new materials;

 reducing volume of packaging, increasing recycled

content of packaging, and/or designing reusable

packaging.

21.2.3 Chemical Selection

21.2.3.1 Chemical selection for process, maintenance,

and utility uses (e.g., gases, etchants, strippers, cleaners,

lubricants, and coolants) should take into account

effectiveness, environmental impacts, volume, toxicity,

by-products, decommissioning, disposal, and

recyclability; use of the least hazardous chemical is

preferred. To the extent practicable, the utilities,

maintenance, and process should be designed so that

the equipment operates without the use of:

 ozone depleting substances (ODSs) as identified by

the Montreal Protocol, such as chlorofluorocarbons

(CFCs), methylchloroform, hydrochlorofluoro-

carbons (HCFCs), and carbon tetrachloride, or

 perfluorocompounds (PFCs), including CF

, C

, and SF

, and CHF

due to their global

warming potential.

21.2.4 Prevention and Control of Unintended Releases

21.2.4.1 Equipment design, including feed, storage,

and waste collection systems, should prevent potential

unintended releases. At a minimum:

21.2.4.2 Secondary containment for liquids should be

capable of holding at least 110% (see first row of Table

A3-1 of Appendix 3) of the volume of the single largest

container, or the largest expected volume for any single

point failure.

NOTE 99: In some circumstances secondary containment

may be specified by the equipment supplier, but provided by

the user.

21.2.4.3 Chemical storage containers and secondary

containment should be designed for accessibility and

easy removal of collected material.

21.2.4.4 Secondary containment should have alarms

and gas detection or liquid sensing, as appropriate, or

have recommended sensing points identified in the

equipment installation instructions.

21.2.4.5 Equipment design should allow personnel to

determine all in-equipment container levels

conveniently without having to open the containers,

where ignorance of the level could result in an

inadvertent release.

21.2.4.6 Overfill level detectors and alarms should be

provided for in-equipment containers.

21.2.4.7 Secondary containment and other control

systems should be designed to ensure that chemicals

cannot be combined, where the combination could

result in an inadvertent release.

21.2.4.8 Equipment components should be compatible

with chemicals used in the manufacturing process.

Chemical systems should be designed for the specified

operating conditions, and have sufficient mechanical

strength and corrosion resistance for the intended use.

21.2.4.9 Equipment should be able to accept a signal

from a monitoring device and stop the supply of

chemical, at the first non-manual valve within the

affected system.

21.2.4.10 Chemical distribution systems should be

capable of automatic shutoff and remote shutdown.

21.2.5 Effluents, Wastes, and Emissions

NOTE 100: It is recommended that the manufacturer

document its efforts to minimize the equipment’s generation

of hazardous wastes, solid wastes, wastewater, and air

emissions.

NOTE 101: It is recommended that SEMI F5 be used for

guidance in gaseous effluent handling.

21.2.5.1 Equipment design that allows connection to a

central waste collection system is preferred, except

where collection at the equipment may facilitate

recycling or reuse opportunities or otherwise reduce

environmental impacts.

NOTE 102: It is recommended that individual drains and

exhausts be kept separate (e.g., separate outlets for acid drain,

solvent drain, deionized (DI) water drain; acid exhaust,

solvent exhaust).

21.2.5.1.1 Point-of-use collection containers should be

designed for accessibility as well as the possible reuse

and recycling of the collected materials.

21.2.5.2 Equipment should use partitions, double-

contained lines, or other similar design features to

prevent the mixing of incompatible waste streams.

21.2.5.3 The manufacturer should evaluate the

feasibility of including integrated controls for effluent

and emission treatment.

21.2.5.4 Dilution in excess of process or safety

requirements should not be used to reduce contaminant

discharge concentrations.

21.2.5.5 Segregation of effluents, wastes, and

emissions should be provided in the following cases:

 where chemically incompatible;

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 where segregation facilitates recycling or reuse; or

 where separate abatement or treatment methods are

required.

NOTE 103: It is recommended that the equipment design

documentation show evidence of consideration of by-products

generated during equipment operation, clean-up, maintenance,

and repair. By-products can include deposits in drains or

ducts, and replaceable parts (e.g., batteries, vapor lamps,

contaminated parts).

21.2.6 Decommissioning and Disposal

21.2.6.1 Equipment design should address (see Section

8.5.3 for documentation provisions) construction

material and component reuse, refurbishment, and

recycling.

21.2.6.2 The equipment should be designed to facilitate

equipment decontamination and disposal, e.g., by use of

removable liners or replaceable modules. This includes

minimizing the number of parts that become

contaminated with hazardous materials.

NOTE 104: It is recommended that SEMI S12 “Guidelines

for Equipment Decontamination” be used for guidance during

equipment decontamination.

22 Exhaust Ventilation

22.1 Equipment exhaust ventilation should be designed

to prevent potentially hazardous chemical exposures to

employees as follows:

22.1.1 As primary control when normal operations

present potentially hazardous chemical exposures to

employees by diffusive emissions that cannot be

otherwise prevented or controlled (e.g., wet decks, spin

coaters).

NOTE 105: In the context of this section, “primary control”

means that it is the control of first choice (e.g., rather than

personal protective equipment).

22.1.2 As supplemental control when intermittent

activities (e.g., chamber cleaning, implant source

housing cleaning) present potentially hazardous

chemical exposures to employees which cannot

reasonably be controlled by other means. Supplemental

exhaust hoods or enclosures may be integrated into the

equipment design, or supplied completely by the

equipment user.

22.1.2.1 When a procedure (e.g., cleaning) specified by

the supplier requires exhaust ventilation, the supplier

should include the minimum criteria for exhaust during

the procedure.

22.1.3 As secondary control when a single-point

failure presents the potential for employee exposures to

hazardous materials, and this exposure cannot be

controlled by other means (e.g., use of all welded

fittings).

EXCEPTION: Secondary exhaust control enclosures

for non-welded connections (e.g., valve manifold boxes

that enclose piping jungles) are not included in this

guideline for those hazardous gases that are transported

below atmospheric pressure (e.g., via vacuum piping

systems) if it can be demonstrated that equivalent leak

protection is provided. Equivalent protection may

include such things as equipping the vacuum delivery

system with a fail-safe (e.g., to close) valve

automatically activated by a loss of vacuum pressure.

Loss of vacuum pressure should also activate a visual

and audible alarm provided in visual or audible range of

the operator.

22.2 Equipment exhaust ventilation should be designed

and a ventilation assessment conducted (see Section

23.5, Appendix 2, and SEMI S6) to control, efficiently

and safely, for potential worst-case, realistic employee

exposures to chemicals during normal operation,

maintenance, or failure of other equipment components

(hardware or software). All design criteria and test

protocols should be based on recognized methods. See

also Section 23.3.

22.3 Documentation should be developed showing the

equipment exhaust parameters and relevant test

methods, and should include (see also Appendix 2):

 duct velocity (where needed to transport solid

particles);

 volumetric flow rate Q;

 capture velocity (where airborne contaminants are

generated outside an enclosure);

 face velocity (where applicable);

 hood entry loss factor F

or K;

 coefficient of entry C

;

 hood static pressure SP

;

 duct diameter at the point of connection to

facilities; and

 location(s) on the duct or hood where all

ventilation measurements were taken.

22.4 Exhaust flow interlocks should be provided by the

manufacturer on all equipment that uses hazardous

production materials (HPMs) where loss of exhaust

may create a hazard. Flow (e.g., pitot probe) or static

pressure (e.g., manometer) switches are the preferred

sensing methods.