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SEMI S2-0703a E © SEMI 1991, 2004 45 Energy Category Physical Quantity Measured (units) Operator- Accessible Limit Maintenance- and Service- Accessible Limit Pacemaker Labeling Level Testing Methods Radio- frequency Fiel…

SEMI S2-0703a

Energy

Category

Physical

Quantity

Measured

(units)

Operator-

Accessible Limit

Maintenance-

and Service-

Accessible Limit

Pacemaker

Labeling

Level

Testing Methods

Sub Radio-

frequency

1 Hz to

3 kHz

(e.g.,

electromagnets

in etch

equipment)

*See exception

below for 50

and 60 Hz

power

frequencies.

Electric

Field

Strength

(V/m) (See

NOTE 1.)

1–100 Hz

5 kV/m*

100 Hz to 3 kHz

500,000/f (Hz) in

V/m

1–100 Hz

5 kV/m*

100 Hz to 3 kHz

500,000/f (Hz) in

V/m

1 kV/m Use a displacement sensor.

Determine the maximum field

strength and orientation at the

surface of the equipment (2–3

cm).

Remove field perturbations by

using a long non-conductive

handle extension or remote fiber

optic readout.

Locate 1 kV/m line to post

pacemaker warnings.

Sub Radio-

frequency

1 Hz to

3 kHz

(e.g.,

electromagnets

in etch

equipment)

*See exception

below for 50

and 60 Hz

power

frequencies.

Magnetic

Field

Strength

(A/m or G)

(See

NOTES 1

and 2.)

1–300 Hz

12/f (Hz) in mT

300 Hz to 3 kHz

0.04 mT

(400 mG)*

1–300 Hz

12/f (Hz) in mT

300 Hz to 3 kHz

0.04 mT

(400 mG)*

0.1 mT

(1 G)

Use a loop sensor at each location

(use three axis probe or make

three mutually orthogonal

measurements at each location).

The sensor should be almost

contacting the equipment surface

(2 cm from surface).

Identify 1 G line to post

pacemaker warnings.

Power

Frequency (50

or 60 Hz)

1,5

(e.g.,

electromagnets

in etch

equipment)

Electric

Field

Strength

(V/m) (See

NOTE 1.)

1 kV/m 2 kV/m 1 kV/m See Sub radiofrequency Electric

Field Testing Method, but probe

is positioned as needed to

determine distance to 1 kV/m.

Power

Frequency (50

or 60 Hz)

1,5

(e.g.,

electromagnets

in etch

equipment)

Magnetic

Field

Strength

(A/m or G)

(See

NOTES 1

and 2.)

0.02 mT

(200 mG)

0.1 mT

(1 G)

0.1 mT

(1 G)

See Sub radiofrequency Magnetic

Field Testing Method, but probe

is positioned as needed to

determine distance to 1 G

pacemaker criterion.

Radio-

frequency

Field

3 kHz to

100 kHz

(e.g., RF used

to generate

plasma)

Induced

current and

contact

current

(mA)

Frequency-

dependent:

180f (kHz) in mA

through both feet

90f through each

foot

90f for contact.

where f is in MHz

Frequency-

dependent:

400f (kHz) in mA

through both feet,

200f through each

foot

200f for contact.

where f is in MHz

NA Contact instrument vendor for

suitable instrument based on

frequency and emission

characteristics.

Measurement of induced and

contact currents for freq. < 100

MHz should be made when

approaching 20% of the

applicable electric field emission

limit.

SEMI S2-0703a

Energy

Category

Physical

Quantity

Measured

(units)

Operator-

Accessible Limit

Maintenance-

and Service-

Accessible Limit

Pacemaker

Labeling

Level

Testing Methods

Radio-

frequency

Field

100 kHz to

100 MHz

(e.g., RF used

to generate

plasma)

Induced

current and

contact

current

(mA)

18 mA through

both feet

9 mA through each

foot

9 mA contact

40 mA through

both feet

20 mA through

each foot

20 mA contact

NA Contact instrument vendor for

suitable instrument based on

frequency and emission

characteristics.

Measurement of induced and

contact currents for freq. < 100

MHz should be made when

approaching 20% of the

applicable electric field emission

limit.

Radio-

frequency

Field

3 kHz to

300 MHz

(e.g., RF used

to generate

plasma)

Electric

Field

Strength

(V/m) (See

NOTE 1.)

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Uncontrolled limit

in Table 2 of

C95.1

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Controlled limit

in Table 1 of

C95.1

NA Use a diode rectifier or

displacement sensor at each

location (use three axis probe or

make three mutually orthogonal

measurements at each location).

Measurements should be made at

20 cm from the surface.

Radio-

frequency

Field

3 kHz to

300 MHz

(e.g., RF used

to generate

plasma)

Magnetic

Field

Strength

(A/m) (See

NOTES 1

and 2.)

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Uncontrolled limit

in Table 2 of

C95.1

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Controlled limit

in Table 1 of

C95.1

NA Use a coil sensor at each location

(use three axis probe or make

three mutually orthogonal

measurements at each location)

Measurements should be made at

20 cm of the surface.

Radio-

frequency

Fields

300 MHz to

300 GHz

(e.g., RF used

to generate

plasma)

Power

Density

(mW/cm

)

(See NOTE

1.)

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Uncontrolled limit

in Table 2 of

C95.1

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Controlled limit

in Table 1 of

C95.1

NA Use a diode rectifier or

thermocouple at each location

(use three axis probe or make

three mutually orthogonal

measurements at each location).

Measurements should be made at

20 cm of the surface.

NOTE 1: It is assumed that electric and magnetic fields exist separately at frequencies below 300 MHz. It is assumed that electric and magnetic

fields exist as a combined entity (electromagnetic radiation) at higher frequencies. Two evaluations are needed at frequencies <300 MHz and only

one (usually made by measuring the electric field) at higher frequencies.

NOTE 2: 1 gauss (G) 79.55 amperes per meter (A/m). 1 tesla (T) = 10,000 G, 1 millitesla (mT) = 10 G.

Table A5-2 Optical Energy

Optical Energy Physical Quantity

Measured

(units)

Access Limit Testing Methods

Infrared

Energy

700 nm to

1 mm

(e.g., heating

lamps)

Irradiance

W/m

(See NOTES 1, 2,

and 3.)

Radiance

W/m

- sr

Wavelength dependent

20% of the applicable

exposure limits.

(See Reference 1.)

Thermocouple, thermopile, pyroelectric, photoelectric

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

SEMI S2-0703a

Optical Energy Physical Quantity

Measured

(units)

Access Limit Testing Methods

Visible Light

400 nm to

700 nm

(e.g., heating

lamps)

Irradiance

µW/cm

(See NOTES 1, 2,

and 3.)

Radiance

W/m

- sr

Wavelength dependent

20% of the applicable

exposure limits.

(See Reference 1.)

Thermocouple, thermopile, pyroelectric, photoelectric

Direct measurement locating the maximum irradiance and

orientation of the light energy at the closest approach to

view port(s) or accessible leakage point(s).

Ultraviolet

Energy

315 nm to

400 nm

(e.g., plasma,

stepper)

Irradiance

mW/cm

(See NOTES 1

and 2.)

0.2 mW/cm

Photoelectric detectors with filters and or controlled

phosphors

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

Ultraviolet

Light

180 nm to

315 nm

(e.g., plasma,

stepper)

Effective

Irradiance

µW/cm

(See NOTE 4.)

0.02 W/ cm

Photoelectric detectors with filters and/or controlled

phosphors (See NOTE 5.)

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

NOTE 1: “Irradiance” is essentially the same as “power density.”

NOTE 2: Lamp manufacturer data can sometimes be used to estimate and evaluate exposures using a spreadsheet.

NOTE 3: These guidelines cover visible, IR-A, and IR-B, and are frequency dependent. Separate evaluations may be needed for thermal or

photochemical retinal hazards and infrared eye hazards.

NOTE 4: “Effective irradiance” is irradiance adjusted to account for the wavelength-dependent biological hazard. Permissible exposure time =

0.003 J/cm2 divided by the effective irradiance.

NOTE 5: Instrumentation is commercially available that accounts for the wavelength dependence of the standard and gives results in effective

irradiance.

A5-5 References

1. 1996 TLVs and BEIs Threshold Limit Values for Chemical Substances and Physical Agents Biological

Exposure Indices, ACGIH, Cincinnati, OH

2. ANSI/IEEE Standard for Safety Levels with Respect to Human Exposure to Radio Frequency Electromagnetic

Fields, 3 kHz to 300 GHz, C95.1-1991, Piscataway, New Jersey

3. Guidelines on Limits of Exposure to Broad-Band Incoherent Optical Radiation (0.38 to 3 M), Health Physics

Vol. 73, No. 3 (September), pp.539-554, 1997

4. ICNIRP 1994 “Guidelines on Limits of Exposure to Static Magnetic Fields,” Health Physics Vol 66 (1)

(January), pp. 100-106, 1994

5. Interim Guidelines on the Limits of Exposure to 50/60 Hz Electric and Magnetic Fields, IRPA/ICNIRP

Guidelines, Health Physics Vol. 58, No. 1 (January), pp. 113-122, 1990