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SEMI S2-0703a E © SEMI 1991, 2004 78 RELATED INFORMATION 14 RECOMMENDATIONS FOR DESIGN ING AND SELECTING FAIL-TO- SAFE EQUIPMENT CONTROL SYSTEM S (FECS) WITH SOLID STATE INTERLOCKS AND EMO NOTICE: This relate d informati…

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upon the results of the risk assessment for actual and
foreseeable normal usage.
R13-8 The proposed hazardous surface temperatures
for external surfaces and internal parts which may be
touched are 70°C for metal, 80°C for glass/porcelain,
and 95°C for plastic/rubber. It is assumed that this limit
applies to inadvertent touching by the
operator/maintenance person, resulting in the person
instantly breaking contact with the hot surface. There
are no analogs in either the MIL-STD or the MIL-
HDBK for these temperature limits. The EN563 burn
threshold range for one-second contact with uncoated
metal is 65 to 70°C, while the range for one-second
contact with glass is 80 to 86°C. The proposed
temperature limit appears to be slightly high for
reasonably foreseeable inadvertent contact with
external metal surfaces. The Section 18 Table 1 limit
for contact with external metal surfaces is 65°C, which
is the conservative end of the EN563 range.
R13-9 No information was available to support or
refute the temperature limits for contact with external
plastic/rubber surfaces. With regard to internal parts,
the proposed temperature limits may be adequate given
the foreseeable cooling which would likely occur prior
to handling of internal parts. The actual thermal lag of
components likely to be handled could be verified by
thermocouple readings on specific equipment during a
risk assessment.
Table R13-1 Allowable Surface Temperatures (°C)
for Handles, Knobs, Grips, etc., Held for Short
Periods Only (5 seconds or less)
Metal Glass,
Porcelain,
Vitreous
Material
Plastic,
Rubber
EN563 58 70 n/a
MIL-STD-1472 60 68 85
MIL-HDBK-759 60 n/a n/a
Section 18 Table
1 Value
60 70 85
Table R13-2 Allowable Surface Temperatures (°C)
for Handles, Knobs, Grips, etc., Held in Normal Use
Metal Glass,
Porcelain,
Vitreous
Material
Plastic,
Rubber
EN563 51 56 60
MIL-STD-1472 49 59 69
MIL-HDBK-759 52 n/a n/a
Section 18 Table
1 Value
51 56 60
Table R13-3 Allowable Surface Temperatures (°C)
for External Surface of Equipment Which May Be
Momentarily Touched
Metal Glass,
Porcelain,
Vitreous
Material
Plastic,
Rubber
EN563 65-70 80-86 n/a
MIL-STD-1472 n/a n/a n/a
MIL-HDBK-759 n/a n/a n/a
Section 18 Table
1 Value
65 80 95
Table R13-4 Allowable Surface Temperatures (°C)
for Parts, Inside the Equipment, Which May Be
Momentarily Touched
Metal Glass,
Porcelain,
Vitreous
Material
Plastic,
Rubber
EN563 n/a 68 85
MIL-STD-1472 n/a n/a n/a
MIL-HDBK-759 n/a n/a n/a
Section 18 Table
1 Value
65 80 95
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© SEMI 1991, 2004 78
RELATED INFORMATION 14
RECOMMENDATIONS FOR DESIGNING AND SELECTING FAIL-TO-
SAFE EQUIPMENT CONTROL SYSTEMS (FECS) WITH SOLID STATE
INTERLOCKS AND EMO
NOTICE: This related information is not an official part of SEMI S2. It was derived from original Task Force
activity. This related information was approved for publication by line item ballot vote on July 2003.
NOTE 1: Determination of the suitability of this material is
solely the responsibility of the user.
R14-1 Safety Philosophy
R14-1.1 The following documents should control
applicability of criteria in order of precedence as
shown:
1. regulatory codes and standards
2. applicable sections of SEMI S2
3. SEMI Safety Guidelines
4. this Related Information
5. other appropriate standards for functional
safety
R14-2 Purpose
R14-2.1 This Related Information describes
approaches to using alternative technology and
technical concepts to achieve functional safety in
semiconductor manufacturing equipment.
R14-2.2 Who can make use of this Related Information
— Recommendations for Designing and Selecting Fail-
to Safe Control Systems (FECS) with Solid State
Interlocks and EMO may be used by semiconductor
equipment manufacturers, system integrators, end users
and suppliers of automation systems as well as
independent third parties.
R14-3 Scope
R14-3.1 Applicability — This Related Information
applies to facilities, equipment and machinery used to
manufacture, measure, assemble and test semiconductor
products and therefore need a high level of safety to
protect people, machines, the environment and the
industrial processes.
R14-3.2 This Related Information is intended for use
by semiconductor equipment manufacturers, system
integrators, end users and suppliers of automation
systems as well as independent third parties as an
orientation to design and architecture of automation
systems based on safety-related components. The
safety-related automation system executes safety
functions to bring the equipment into a safe condition
or to maintain it in a safe condition when a hazardous
event occurs.
R14-3.3 This Related Information specifies a technical
concept for equipment control systems, which does not
require the exclusive use of hardwired
electromechanical safety components.
R14-3.4 Contents — This Related Information
contains the following sections:
1. Purpose
2. Scope
3. Limitations
4. Referenced Standards
5. Terminology and Definitions
6. State-of-the-Art Safety Control System —
Comprised of Solid State Electronics
7. Philosophy and General Concepts
8. Guide to Assessment and Test Methods
9. Safety Performance
10.
Application Examples
11. Related Documents
NOTICE: This Related Information does not purport to
address all of the safety issues associated with its use.
It is the responsibility of the user of this Related
Information to establish appropriate functional safety
and determine the applicability of regulatory or other
limitations prior to use.
R14-4 Limitations
R14-4.1 This Related Information does not contain the
technical detail necessary to design equipment control
systems.
R14-4.2 This Related Information is not intended to be
used to verify compliance to local regulatory
requirements.
R14-4.3 It is not the philosophy of this Related
Information to give advice on what must be done to
achieve a certain safety performance for equipment
control systems, but it gives advice on how to achieve a
specified level of safety functionality using industrial
controllers (e.g. programmable logic controllers),
distributed input/output (I/O) functions and network
communications.
SEMI S2-0703a
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© SEMI 1991, 2004 79
R14-4.4 Where references to standards have been
incorporated into this Related Information. These
references do not imply applicability of the entire
standards, but only of the sections referenced.
R14-4.5 Because of the variety of uses for FECS
described in this Related Information, those responsible
for the application and use of FECS must satisfy
themselves that all necessary steps have been taken to
assure that each application and use meets all
performance and safety requirements, including any
applicable laws, regulations, codes and standards. The
illustrations, charts and layout examples shown in this
Related Information are solely for purposes of example.
R14-5 Referenced Standards
R14-5.1 SEMI Standards
SEMI E54 — Sensor/Actuator Network Standard
SEMI E81 — Provisional Specification for CIM
Framework Domain Architecture
SEMI E98 — Provisional Standard for the Object-
Based Equipment Model (OBEM)
SEMI S10 — Safety Guideline For Risk Assessment
R14-5.2 IEC Standards
18
NOTE 2: International standards bodies are indicated, with
the equivalent national standards shown in parenthesis.
IEC 60204-1 (EN 60204-1) — Safety of Machinery –
Electrical Equipment of Machines - Part 1: General
Requirements
IEC 61010-1 (EN 61010-1) — Safety Requirements for
Electrical Equipment for Measurement, Control, and
Laboratory Use - Part 1: General Requirements
IEC 61508 (EN 61508) — Functional Safety of
Electrical/Electronic/Programmable Electronic Safety-
Related Systems
NOTE 3: IEC 61508 consists of 7 parts, IEC 61508-1 through
IEC 61508-7
R14-5.3 ISO Standards
19
NOTE 4: International standards bodies are indicated, with
the equivalent national standards shown in parenthesis.
ISO 10218 (EN 775) — Manipulating Industrial
Robots-Safety
18 International Electrotechnical Commission, 3, rue de Varembé,
Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00 Website: http://www.iec.ch
19 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: http://www.iso.ch
ISO (ISO 13849-1 (EN 954-1)-1) — Safety of
Machinery-Safety-Related Parts of Control Systems
ISO 13849-2 (EN 954-2) — Safety of Machinery-
Safety-Related Parts of Control Systems – Part 2
Validation
ISO/IEC 13850 (EN 418) — Safety of Machinery –
Emergency Stop – Principles of Design
ISO 14118 (EN 1037) — Safety of Machinery –
Prevention of Unexpected Start-Up
ISO 14119 (EN 1088) — Safety of Machinery-
Interlocking Devices Associated with Guards –
Principles for Design & Selection
ISO 14121 (EN 1050) — Safety of Machinery-
Principles of Risk
NOTE 5: National and local Codes and Standards must be
applied as required by the installation location. Examples of
some that might apply are included below.
R14-5.4 ANSI Standards
20
ANSI/IEEE C95.1 (United States) — Standards for
Safety Levels with Respect to Human Exposure to
Radio Frequency Electromagnetic Fields
ANSI/ISA-S84.01-1996 — Application of Safety
Instrumented Systems for the Process Industry
ANSI/RIA R15.06 (United States) — Industrial Robots
and Robot System – Safety Requirements
R14-5.5 National Fire Protection Association
21
NFPA 79 (United States) — Electrical Standard for
Industrial Machinery
R14-5.6 VDI Standards
22
VDI/VDE 2180 Bl.2 (Germany) — Safety of Process
Control Technology
R14-5.7 DIN V VDE Standards
23
DIN V VDE 0801 — Principle for Computers in Safety
Related Systems
R14-6 Terminology
R14-6.1 Abbreviations and Acronyms
R14-6.1.1 ATL — Approved Testing Laboratory
20 American National Standards Institute, New York Office: 11 West
42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;
Fax: 212.398.0023 Website: http://www.ansi.org
21 National Fire Protection Association, 1 Batterymarch Park, P.O.
Box 9101, Quincy, MA 02269-9101, USA, www.nfpa.org
22 VDE-Verlag GmbH, Bismarkstrasse 33, 10625 Berlin, Germany,
www.vde.de
23 VDE-Verlag GmbH, Bismarkstrasse 33, 10625 Berlin, Germany,
www.vde.de