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SEMI S2-0703a E © SEMI 1991, 2004 96 26.4 The following detailed information sh ould be available to an ev aluator:  Justification f or when engineerin g controls are not feas ible to limit exposure during operatio n or…

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26.1.1.1 If pulsed, the pulse repetition rate, pulse duration and description of the pulse waveform should be
identified in the documentation provided to the user.
26.1.1.2 For Class 3b or 4 embedded laser systems,
the above information and the physical location of the laser
sources within the product should be identified in the documentation provided to the user and in the maintenance
manual.
26.1.1 As an alternative to completing a Laser Data Sheet, the equipment manufacturer may provide the
information that is specified on the Laser Data Sheet in another format. The information should be organized so the
user can easily read and understand it.
26.1.2 Equipment should not exceed the laser product classification of Class 2; however, individual lasers may
exceed this classification prior to integration into the final equipment assembly.
26.1.3 Equipment and lasers should be labeled according to the appropriate standards (e.g., IEC 60825-1, 21CFR
1040.10).
NOTE 1: A Class 1 product label may be is required in some jurisdictions. but is not currently required in the United States.
NOTE 2: The laser product classification for some equipment is
will be Class 1 or 2, even though an embedded laser is of higher
hazard classification.
26.1.4 Equipment suppliers should provide maintenance or service task information in the documents provided to
users for equipment that requires access to laser radiation in excess of the maximum permissible exposure (MPE).
26.1.4.1 The information for these tasks should be documented on a Laser Data Sheet (See Appendix 7) in the
documents provided to users and should include the accessible laser and beam parameters (A7-2), laser control
measures (A7-3) and personal protective equipment (A7-4) for each laser or task requiring this access.
EXCEPTION: In the case of proprietary beam parameters, an acceptable alternative is to provide the nominal
ocular hazard distance (NOHD) results (according to IEC 60825 or its equivalent) for each task requiring access
above the MPE.
EXCEPTION: If a laser system is a stand-alone laser product delivered as a component or spare for laser
equipment, the laser system supplier’s responsibility for Laser Data Sheet information is limited to that which
applies specifically to the stand-alone laser product and not the integrated laser equipment.
26.1.5 The physical location of the embedded laser sources and access points within the laser product should be
identified in the documents provided to users.
26.2 Equipment, including beam diagnostic or alignment tools, should be designed to prevent injury from all lasers
during normal operation, and should minimize the risk of injury during maintenance or service. Potential exposures
should be controlled in the following order of preference:
26.2.1 Engineering controls (e.g., enclosures, shielding, filters, use of fiber optics to transmit energy, interlocks).
26.2.2 Temporary enclosures or control measures for maintenance, service, and non-routine tasks.
26.2.3 Administrative controls (e.g., written warnings, standard operating procedures, labeling).
26.2.4 Personnel protective equipment.
NOTE 3: Temporary enclosures and personal protective equipment are considered to be administrative controls, because they
require human action to implement.
NOTE 4: Certain classes of laser products are regulated around the world. Regulations and licensing requirements may cover
activities such as importing, exporting, distributing, demonstrating, installing, servicing, and using these laser products.
26.3 The equipment supplier should provide the following in the operation and maintenance manuals:
A description of laser related hazards present during operation, maintenance, or service, and methods to
minimize the hazard;
Justification for any procedures that require a laser controlled area and the dimensions of this hazard zone;
Administrative controls used in maintenance and service activities; and
A description of the necessary personal protective equipment.
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26.4 The following detailed information should be available to an evaluator:
Justification for when engineering controls are not feasible to limit exposure during operation or maintenance
tasks, and how administrative controls provide equivalent protection (See Section 26.2); and
Documentation showing compliance with an appropriate international laser product safety or industry standard,
or the national standard of the country of use.
D1-4 Addition of Appendix 7 (Laser Data Sheet – SEMI S2) — OPTIONAL Before Effective Date
D1-4 Addition of the following as Appendix 7 (Laser Data Sheet – SEMI S2):
APPENDIX 7
Laser Data Sheet – SEMI S2
A7-1 Equipment Information - (All Laser Product Classes)
Laser Equipment Manufacturer ____________________________________________________
Equipment Model # ________________________
Date Laser Data Sheet Completed ________________
Laser Product Classification ____________ (e.g., 1, 1M, 2, 2M, 3A, 3R, 3B, 4)
Classification Standard(s) ____________ (e.g., IEC, FDA/CDRH, JIS)
Certification File Identification Number ______________(e.g., CDRH accession number, or if CDRH accession
number has been applied for, but not yet received, a statement of ‘pending’ along with the submittal date may be
used instead. If self declaring under IEC 60825-1 or if certification is not required, e.g., if class 1 laser product is
incorporated without changes, then ‘N/A’ may be used)
A7-2 Laser Information (Greater than Class 2 & embedded Class 3R (3A), 3B & 4)
Is access to laser radiation above the maximum permissible exposure (MPE) level YES NO
required during maintenance or service tasks? ____ _____
If NO, then the information in Parts A7-2, A7-3 and A7-4 need not be provided.
If YES, complete the information in Parts A7-2, A7-3 and A7-4 for each task and laser that requires access.
If there are multiple lasers contained within the laser equipment, provide the following for each task/laser
combination that meets the above criteria.
Laser Parameters Laser ___1___, ___2___, __etc.__
Laser Manufacturer _______, _______, _______
Laser Model No. _______, _______, _______
A7-2.1 Laser Medium Type (HeNe, Nd:YAG, Argon, KrF, Diode, etc.) _______, _______, _______
A7-2.2 Wavelength(s) in nanometers (nm) _______, _______, _______
A7-2.3 Laser Hazard Classification (individual laser) _______, _______, _______
NOTE 3: If a laser is used in both continuous wave and pulsed modes, complete both A7-2.4 and A7-2.5.
A7-2.4 Continuous Wave Lasers
A. Power in Watts (W) _______, _______, _______
B. Irradiance in Watts/square centimeter (W/cm
2
at aperture) _______, _______, _______
A7-2.5 Pulsed Laser Characteristics
A. Pulse Duration in Seconds (s) _______, _______, _______
B. Energy per Pulse in Joules (J) _______, _______, _______
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C. Pulse Repetition Frequency in Hertz (Hz) _______, _______, _______
D. Average Power in Watts (W) _______, _______, _______
E. Radiant Exposure Joules/square centimeter (J/cm
2
) _______, _______, _______
F. Q-Switch controlled pulses (Yes/No) _______, _______, _______
A7-2.6 Beam Parameters at maintenance or service access points
Exception: In the case of proprietary information, an acceptable alternative to providing the Beam
Parameters is to provide NOHD results for each access point according to IEC 60825 or equivalent.
A. Beam shape Circular (C), Rectangular (R), Elliptical (E) _______, _______, _______
B. Beam size (mm) Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
Laser Parameters Laser ___1___, ___2___, __etc.__
C. Beam divergence in milliradians (mr)
Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
D. Focal length in millimeters (mm) (of the emitting lens)
Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
E. Is there a collecting optics hazard? (Yes/No) _______, _______, _______
A7-3 Laser Control Measures
A7-3.1 Specify maintenance/service tasks requiring access to laser radiation in excess of the MPE and
recommended laser control measures.
A. Task 1 ________________________________________________________________
B. Task 2 ________________________________________________________________
C. Etc. ________________________________________________________________
Note 1: Suppliers may alternately provide a reference to laser control measures information that is located in a document
available to users.
A7-3.2 Of the tasks in A7-3.1, which tasks need a Laser Controlled Area (for Class 3b or 4 lasers)?
_______________________________________________________________________________
A7-3.3 If a nominal ocular hazard distance (NOHD) is used as a control measure, then provide the NOHD
calculations and assumptions. See IEC 60825-1 for NOHD calculations.
Exception: If specific information required by A7-2.6 is proprietary, suppliers may provide the NOHD results and
an explanation of the assumptions made.
A7-3.4 Include a beam path diagram identifying the accessible points.
NOTE 1: A description of the access points from the exterior of the tool can be considered equivalent to a diagram.
A7-4 Personnel Protective Equipment (PPE)
Provide information for accessible laser radiation hazards in excess of the Maximum Permissible Exposure (MPE)
Laser Parameters Laser ___1___, ___2___, __etc.__
A. Optical Density (OD) of PPE required during maintenance _______, _______, _______
B. OD of PPE required during service activities _______, _______, _______