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SEMI S4-0304 © SEMI 1992, 2004 1 SEMI S4-0304 SAFETY GUIDELINE FOR THE SEPARATION OF CHEMICAL CYLINDERS CONTAINED IN DISPENSING CABINETS This safety guideline was technicall y approved by th e Global Environmental, Healt…

SEMI S3-91 © SEMI 1991, 19965

NOTICE: These guidelines do not purport to address

all of the safety issues associated with their use. It is the

responsibility of the users of these guidelines to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use. SEMI makes no warranties or

representations as to the suitability of the guidelines set

forth herein for any particular application. The

determination of the suitability of these guidelines is

solely the responsibility of the user. Users are cautioned

to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

guidelines are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

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consent of SEMI.

SEMI S4-0304 © SEMI 1992, 2004 1

SEMI S4-0304

SAFETY GUIDELINE FOR THE SEPARATION OF CHEMICAL

CYLINDERS CONTAINED IN DISPENSING CABINETS

This safety guideline was technically approved by the Global Environmental, Health, and Safety Committee

and is the direct responsibility of the North American Environmental, Health, and Safety Committee. Current

edition approved by the North American Regional Standards Committee on December 4, 2003. Initially

available at www.semi.org February 2004; to be published March 2004. Originally published in 1992.

NOTICE: This safety guideline was completely

rewritten in 2003.

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this document and are not intended to

modify or supersede the official Safety Guideline.

These have been supplied by the Task Force to enhance

usage of the Safety Guideline.

NOTICE: The intent of the task force that produced

this document is that conformance to the “should”

provisions of this guideline comprises conformance

with this guideline.

1 Purpose

1.1 This safety guideline provides a method for

determining cylinders of which types of chemicals

should be in separate gas cabinets and which cylinders

may be in gas cabinets with each other.

1.2 The safety guideline is intended to be used by those

working or doing research in semiconductor-related

technology.

2 Scope

2.1 This safety guideline refers to chemicals, which

includes gases and liquids, contained in cylinders, that

are used in gaseous form because of their vapor

pressure or because they may be transported as a vapor

by a carrier gas.

2.2 It also pertains to all types of cylinders, up to and

including an internal volume of 1000 liters.

2.3 The primary intent of this guideline is directed to a

cylinder gas in use in, or being dispensed in, the

research and manufacturing processes.

2.4 This safety guideline addresses purge gases

supplied in cylinders and used to purge process

chemical lines.

2.5 This safety guideline addresses process chemicals

in cylinders which are designed to provide them at

pressures less than 101.3 kPa (one atmosphere).

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use.

It is the responsibility of the users of this safety

guideline to establish appropriate safety and health

practices and determine the applicability of regulatory

or other limitations prior to use.

3 Limitations

3.1 This safety guideline does not pertain to those

cases where chemical cylinders are incorporated within

a piece of process equipment.

NOTE 1: Guidance regarding other aspects of the safety and

management of gas cylinders is contained in several of the

documents listed in the Related Documents section of this

safety guideline.

3.2 This safety guideline does not pertain to chemicals

used in fabrication facilities for ancillary purposes, such

as welding.

4 Referenced Standards

4.1 United States Code of Federal Regulations

16 CFR 1500.41 — Method of testing primary irritant

substances

49 CFR 173 — Shippers – General Requirements for

Shipment and Packaging

4.2 National Fire Protection Association

NFPA 49 — Hazardous Chemicals Data

NOTE 2: NFPA 49 is no longer part of the NFPA codes in

either the compact disc or hard copy version. It is now part of

the NFPA Fire Protection Guide to Hazardous Materials and

must be purchased separately from NFPA.

NFPA 704 — Identification of Fire Hazards of

Materials

1 The Office of the Federal Register, Washington, D.C. 20037

http://www.access.gpo.gov/nara/cfr/waisidx_00/16cfr1500_00.html

2 The Office of the Federal Register, Washington, D.C. 20037

http://www.access.gpo.gov/nara/cfr/waisidx_00/49cfr173_00.html

3 National Fire Protection Association, 1 Batterymarch Park, Quincy,

MA 02269, Website: www.nfpa.org

4.3 Compressed Gas Association

P20 — Standard for the Classification of Toxic Gas

Mixtures

P23 — Standard for Categorizing Gas Mixtures

Containing Flammable and Nonflammable Components

4.4 International Organization for Standardization

(ISO)

10156:1996 — Gases and gas mixtures - Determination

of fire potential and oxidizing ability for the selection

of cylinder valve outlets

4.5 European Directives

67/548/EEC — On The Approximation Of The Laws,

Regulations And Administrative Provisions Relating To

The Classification, Packaging And Labeling Of

Dangerous Substances Including Its Amendments And

Adaptations To Technical Progress

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CGA — Compressed Gas Association

5.1.2 CFR — Code of Federal Regulations (United

States)

5.1.3 HPM— Hazardous Production Material

5.1.4 ISO — International Organization for

Standardization

5.1.5 LC

— median lethal concentration in air

5.1.6 NFPA — National Fire Protection Association

5.2 Definitions

5.2.1 acid — a corrosive chemical whose chemical

reaction characteristic is that of an electron acceptor.

5.2.2 base — a corrosive chemical whose chemical

reaction characteristic is that of an electron donor.

5.2.3 chemical — a liquid or gas used in a process for

its ability to react with or displace other substances.

4 Compressed Gas Association, 4221 Walney Road, 5th Floor,

Chantilly VA 20151-2923., Phone: 703-788-2700, Fax: 703-961-

1831, Email:

cga@cganet.com , www.cganet.com

5 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,

Website: /www.iso.ch

6 http://europa.eu.int/comm/environment/dansub/main67_548/index-

_en.htm

5.2.4 combustible material — a material that, in the

form in which it is used and under the conditions

anticipated, may ignite, burn, or release flammable

vapors when subjected to fire or heat.

5.2.5 corrosive — a chemical that causes visible

destruction of, or irreversible alterations in, living tissue

by chemical action at the site of contact. A chemical is

considered to be corrosive if, when tested on the intact

skin of albino rabbits by the method described in the U.

S. Department of Transportation in Appendix A to 49

CFR 173, it destroys or changes irreversibly the

structure of the tissue at the site of contact following an

exposure period of four hours. This term shall not refer

to action on inanimate surfaces.

5.2.6 cylinder — a pressure vessel designed for

containing chemicals at positive gauge pressure and

having a circular cross section. The definition of

“cylinder” does not include a portable tank, multiunit

tank car tank, cargo tank, or tank car.

5.2.7 flammable gas — any gas that forms an ignitable

mixture with air at 20 ° C (68 ° F) and 101.3 kPa (14.7

psia). [SEMI S2, S18]

5.2.8 gas — the fluid form of a substance in which it

can expand indefinitely and completely fill its

container; form that is neither liquid or solid. [SEMI

F78]

5.2.9 gas cabinet — a metal enclosure which is

intended to provide local exhaust ventilation, protection

for the gas cylinder from fire from outside the cabinet,

and protection for the surroundings from fire from

inside the cabinet.

5.2.10 hazardous production material (HPM) — a

solid, liquid, or gas that has a degree of hazard rating in

health, flammability, or reactivity of Class 3 or 4 as

ranked by NFPA 704 and which is used directly in

research, laboratory, or production processes which

have as their end product materials which are not

hazardous. [SEMI S2]

5.2.11 highly toxic chemical — a chemical that has a

median lethal concentration (LC

) in air of 200 parts

per million by volume or less of gas or vapor, or 2

milligrams per liter or less of mist, fume, or dust, when

administered by continuous inhalation for one hour (or

less if death occurs within one hour) to albino rats

weighing between 200 and 300 grams each.

5.2.12 inert gas — a gas which at ambient conditions

does not react chemically with other chemicals.

5.2.13 irritant — A chemical is considered to be an

irritant if:

a) It is classified as a “primary skin irritant” per 16 CFR

1500, or