semi合集-English.pdf - 第6880页

SEMI S4-0304 © 1992, 2004 2 4.3 Compressed Gas Association 4 P20 — Standa rd for the Cl assification of Toxic Gas Mixtures P23 — Standard f or Categori zing Gas Mixt ures Containing Flamm able and Nonflammabl e Compone n…

100%1 / 7923
SEMI S4-0304 © SEMI 1992, 2004 1
SEMI S4-0304
SAFETY GUIDELINE FOR THE SEPARATION OF CHEMICAL
CYLINDERS CONTAINED IN DISPENSING CABINETS
This safety guideline was technically approved by the Global Environmental, Health, and Safety Committee
and is the direct responsibility of the North American Environmental, Health, and Safety Committee. Current
edition approved by the North American Regional Standards Committee on December 4, 2003. Initially
available at www.semi.org February 2004; to be published March 2004. Originally published in 1992.
NOTICE: This safety guideline was completely
rewritten in 2003.
NOTICE: Paragraphs entitled “NOTE” are not an
official part of this document and are not intended to
modify or supersede the official Safety Guideline.
These have been supplied by the Task Force to enhance
usage of the Safety Guideline.
NOTICE: The intent of the task force that produced
this document is that conformance to the “should”
provisions of this guideline comprises conformance
with this guideline.
1 Purpose
1.1 This safety guideline provides a method for
determining cylinders of which types of chemicals
should be in separate gas cabinets and which cylinders
may be in gas cabinets with each other.
1.2 The safety guideline is intended to be used by those
working or doing research in semiconductor-related
technology.
2 Scope
2.1 This safety guideline refers to chemicals, which
includes gases and liquids, contained in cylinders, that
are used in gaseous form because of their vapor
pressure or because they may be transported as a vapor
by a carrier gas.
2.2 It also pertains to all types of cylinders, up to and
including an internal volume of 1000 liters.
2.3 The primary intent of this guideline is directed to a
cylinder gas in use in, or being dispensed in, the
research and manufacturing processes.
2.4 This safety guideline addresses purge gases
supplied in cylinders and used to purge process
chemical lines.
2.5 This safety guideline addresses process chemicals
in cylinders which are designed to provide them at
pressures less than 101.3 kPa (one atmosphere).
NOTICE: This safety guideline does not purport to
address all of the safety issues associated with its use.
It is the responsibility of the users of this safety
guideline to establish appropriate safety and health
practices and determine the applicability of regulatory
or other limitations prior to use.
3 Limitations
3.1 This safety guideline does not pertain to those
cases where chemical cylinders are incorporated within
a piece of process equipment.
NOTE 1: Guidance regarding other aspects of the safety and
management of gas cylinders is contained in several of the
documents listed in the Related Documents section of this
safety guideline.
3.2 This safety guideline does not pertain to chemicals
used in fabrication facilities for ancillary purposes, such
as welding.
4 Referenced Standards
4.1 United States Code of Federal Regulations
16 CFR 1500.41 — Method of testing primary irritant
substances
1
49 CFR 173 — Shippers – General Requirements for
Shipment and Packaging
2
4.2 National Fire Protection Association
3
NFPA 49 — Hazardous Chemicals Data
NOTE 2: NFPA 49 is no longer part of the NFPA codes in
either the compact disc or hard copy version. It is now part of
the NFPA Fire Protection Guide to Hazardous Materials and
must be purchased separately from NFPA.
NFPA 704 — Identification of Fire Hazards of
Materials
1 The Office of the Federal Register, Washington, D.C. 20037
http://www.access.gpo.gov/nara/cfr/waisidx_00/16cfr1500_00.html
2 The Office of the Federal Register, Washington, D.C. 20037
http://www.access.gpo.gov/nara/cfr/waisidx_00/49cfr173_00.html
3 National Fire Protection Association, 1 Batterymarch Park, Quincy,
MA 02269, Website: www.nfpa.org
SEMI S4-0304 © 1992, 2004 2
4.3 Compressed Gas Association
4
P20 — Standard for the Classification of Toxic Gas
Mixtures
P23 — Standard for Categorizing Gas Mixtures
Containing Flammable and Nonflammable Components
4.4 International Organization for Standardization
(ISO)
5
10156:1996 — Gases and gas mixtures - Determination
of fire potential and oxidizing ability for the selection
of cylinder valve outlets
4.5 European Directives
6
67/548/EEC — On The Approximation Of The Laws,
Regulations And Administrative Provisions Relating To
The Classification, Packaging And Labeling Of
Dangerous Substances Including Its Amendments And
Adaptations To Technical Progress
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CGA — Compressed Gas Association
5.1.2 CFR — Code of Federal Regulations (United
States)
5.1.3 HPM— Hazardous Production Material
5.1.4 ISO — International Organization for
Standardization
5.1.5 LC
50
— median lethal concentration in air
5.1.6 NFPA — National Fire Protection Association
5.2 Definitions
5.2.1 acid — a corrosive chemical whose chemical
reaction characteristic is that of an electron acceptor.
5.2.2 base — a corrosive chemical whose chemical
reaction characteristic is that of an electron donor.
5.2.3 chemical — a liquid or gas used in a process for
its ability to react with or displace other substances.
4 Compressed Gas Association, 4221 Walney Road, 5th Floor,
Chantilly VA 20151-2923., Phone: 703-788-2700, Fax: 703-961-
1831, Email:
cga@cganet.com , www.cganet.com
5 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,
Website: /www.iso.ch
6 http://europa.eu.int/comm/environment/dansub/main67_548/index-
_en.htm
5.2.4 combustible material — a material that, in the
form in which it is used and under the conditions
anticipated, may ignite, burn, or release flammable
vapors when subjected to fire or heat.
5.2.5 corrosive — a chemical that causes visible
destruction of, or irreversible alterations in, living tissue
by chemical action at the site of contact. A chemical is
considered to be corrosive if, when tested on the intact
skin of albino rabbits by the method described in the U.
S. Department of Transportation in Appendix A to 49
CFR 173, it destroys or changes irreversibly the
structure of the tissue at the site of contact following an
exposure period of four hours. This term shall not refer
to action on inanimate surfaces.
5.2.6 cylinder — a pressure vessel designed for
containing chemicals at positive gauge pressure and
having a circular cross section. The definition of
“cylinder” does not include a portable tank, multiunit
tank car tank, cargo tank, or tank car.
5.2.7 flammable gas — any gas that forms an ignitable
mixture with air at 20 ° C (68 ° F) and 101.3 kPa (14.7
psia). [SEMI S2, S18]
5.2.8 gas — the fluid form of a substance in which it
can expand indefinitely and completely fill its
container; form that is neither liquid or solid. [SEMI
F78]
5.2.9 gas cabinet — a metal enclosure which is
intended to provide local exhaust ventilation, protection
for the gas cylinder from fire from outside the cabinet,
and protection for the surroundings from fire from
inside the cabinet.
5.2.10 hazardous production material (HPM) — a
solid, liquid, or gas that has a degree of hazard rating in
health, flammability, or reactivity of Class 3 or 4 as
ranked by NFPA 704 and which is used directly in
research, laboratory, or production processes which
have as their end product materials which are not
hazardous. [SEMI S2]
5.2.11 highly toxic chemical — a chemical that has a
median lethal concentration (LC
50
) in air of 200 parts
per million by volume or less of gas or vapor, or 2
milligrams per liter or less of mist, fume, or dust, when
administered by continuous inhalation for one hour (or
less if death occurs within one hour) to albino rats
weighing between 200 and 300 grams each.
5.2.12 inert gas — a gas which at ambient conditions
does not react chemically with other chemicals.
5.2.13 irritant — A chemical is considered to be an
irritant if:
a) It is classified as a “primary skin irritant” per 16 CFR
1500, or
SEMI S4-0304 © SEMI 1992, 2004 3
b) It is designated as an irritant according to European
Directive 67/548/EEC, on the approximation of the
laws, regulations and administrative provisions relating
to the classification, packaging and labeling of
dangerous substances including its amendments and
adaptations to technical progress.
5.2.14 liquid — having its molecules moving freely
with respect to each other so as to flow readily, unlike a
solid, but because of cohesive forces not expanding
infinitely like a gas. [SEMI F78]
5.2.15 other health hazard —A chemical for which
there is statistically significant evidence based on at
least one study conducted in accordance with
established scientific principles that acute or chronic
health effects may occur in exposed employees, other
than those for which a separate classification is defined.
The term “other health hazard” includes chemicals
which are carcinogens, reproductive toxins, sensitizers,
hepatotoxins, nephrotoxins, neurotoxins, mutagens,
agents which act on the hematopoietic system, and
agents which damage the lungs, skin, eyes, or mucous
membranes.
5.2.16 oxidizer chemical — a chemical which will
support combustion or increase the burning rate of a
combustible or flammable material with which it may
come in contact.
5.2.17 pyrophoric chemical — a chemical which upon
contact with air will ignite spontaneously at or below a
temperature of 54°C (130°F).
5.2.18 separation — the condition of having the risks
of mixing of chemicals and of exposure of cylinders to
chemicals other than those they contain managed by the
cylinders being in different gas cabinets.
5.2.19 toxic chemical — A chemical is considered to
be toxic if:
a) It that has a median lethal concentration (LC
50
) in air
of more than 200 parts per million but not more than
2,000 parts per million by volume of gas or vapor, or
more than 20 milligrams per liter of mist, fume, or dust,
when administered by continuous inhalation for one
hour (or less if death occurs within one hour) to albino
rats weighing between 200 and 300 grams each, or
b) It is designated as “Toxic” according to European
Directive 67/548/EEC on the approximation of the
laws, regulations and administrative provisions relating
to the classification, packaging and labeling of
dangerous substances including its amendments and
adaptations to technical progress.
5.2.20 unstable (reactive) — a chemical which in the
pure state, or as produced or transported, will
vigorously polymerize, decompose, condense, or will
become self-reactive under conditions of shock,
pressure, or temperature.
5.2.21 water reactive — a chemical that reacts with
water to release a chemical that is either flammable or
presents a health hazard.
6 Classification
6.1 Chemicals should be classified according to the
categories and associated symbols as shown in Table 1.
6.2 Information on the properties of chemicals (other
than mixtures) should be obtained through
measurement or from literature, such as MSDSs.
Table 1 Classifications and Symbols
Classification Symbol
Flammable F
Pyrophoric P
Corrosive Acid CA
Corrosive Base CB
Toxic T
Highly Toxic HT
Oxidizer O
Inert I
Irritant IRR
Water Reactive WR
Unstable (Reactive) UR
Other Health Hazard OHH
6.3 A chemical should be assigned more than one
classification if it possesses more than one of the
characteristics listed in the table.
6.4 The properties of mixtures of two or more
chemicals should be determined experimentally or
estimated using accepted principles, such as those in
ISO 10156, CGA P20 and P23.
NOTE 3: The experimentation or estimation may be
performed by the user, or the user may rely on experimental
results or estimations by accepted principles performed by
others and reported in a document, such as an MSDS.
NOTE 4: A list of some chemicals used in the semiconductor
industry and their classification symbols appears in Related
Information 1.
7 Separation
7.1 Where practical, each chemical (except for inert
gases) should be contained in a separate cabinet.