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SEMI S8-0705 © SEMI 1995, 2005 1 SEMI S8-0705 SAFETY GUIDELINES FOR ER GONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT These safety guidelin es were technicall y approved by the global EH &S Committee. …

SEMI S7-96 © SEMI 1994, 19963

10.4.2 System Description — Type of equipment

evaluated and its function.

10.4.3 Analysis and Test Methods — Specific tests

used to determine the compliance with the criteria. This

should include a point-by-point evaluation of

requirements listed in the pertinent specifications.

10.4.4 Environmental, Safety, and Health Assessment

— The detailed results of the evaluation, including the

point-by-point results, using SEMI S2 as an outline. If a

section is not applicable, so state.

10.4.5 Body — The body of the report should describe

the type of ESH evaluations, methods, and test

equipment used, and results achieved. The methods

used may include: fault testing, fault tree analysis, task

analysis, industrial hygiene analysis, chemical mass

balance, and ergonomics assessment.

10.4.6 Recommendations — Listings of

recommendations made by the evaluator and statements

that the recommendations were implemented, rejected,

or otherwise addressed.

10.4.7 Detailed Analysis and Test Worksheets —

Copies of the laboratory and field test data.

10.4.8 Additional Information/Remarks — Any

information that may clarify tests performed,

exceptions not specifically defined in the documents,

precautions for certain applications of the equipment, or

conditions of operation.

11 Provision of Reports to Po tential Users

11.1 Whenever possible, copies of the evaluator’s

final report should be made available to potential users.

If the supplier considers some information in the

evaluator’s report proprietary, the supplier should write

an overview report that includes all environmental,

safety, and health information with all proprietary

information deleted.

11.2 Deficiencies that have been remedied and now

meet the appropriate standards do not need to be listed

in the report available to users.

11.3 This modified report should be signed by the

evaluator.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the safety

guideline set forth herein for any particular application.

The determination of the suitability of this safety

guideline is solely the responsibility of the user. Users

are cautioned to refer to manufacturer’s instructions,

product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein.

This safety guideline is subject to change without

notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S8-0705 © SEMI 1995, 2005 1

SEMI S8-0705

SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF

SEMICONDUCTOR MANUFACTURING EQUIPMENT

These safety guidelines were technically approved by the global EH&S Committee. This edition was

approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available

at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; previously

published in 2003.

NOTICE: The official values in this guideline are expressed in The International System of Units (SI). Values that:

— are expressed in inch-pound (also known as “US Customary” or “English”) units,

— are enclosed in parentheses, and

— directly follow values expressed in SI units

are not official, are provided for reference only, and might not be exact conversions of the SI values.

1 Purpose

1.1 These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing

equipment.

1.2 The purpose of these guidelines is to promote compatibility between the user and the equipment in the

manufacturing environment. The following general principles are integral to the ergonomics design and evaluation

of equipment:

1.2.1 The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among

hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and

hazards. Appropriate distribution of tasks will also optimize performance.

1.2.2 Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’

expectations.

1.2.3 The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size,

strength, and range of motion characteristics of the user population. Such design will also facilitate task

performance.

2 Scope

2.1 The guidelines address safety aspects of ergonomics engineering in the design of semiconductor manufacturing

equipment. It should be noted that in order to ensure comprehensive coverage of potential safety hazards, some

guidelines also address general design goals for effective human-machine performance. The guidelines apply to the

design, operation, maintenance, and service of semiconductor manufacturing equipment, as well as, to a limited

extent, equipment installation (see ¶7.3).

NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the

responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 International, national, and local standards, codes, and regulations must be consulted to ensure that equipment

meets regulatory requirements.

3.2 Human factors data compiled in references and specifications are influenced by the population from which they

were drawn and the reason they were collected. Human factors design criteria are sometimes based on studies using

few subjects or are context-specific. Ergonomics experts should be consulted where data development or

interpretation is required.

3.3 The equipment design should incorporate reasonable accommodations for users with special needs, such as left-

handedness and color blindness. Where feasible the design should also accommodate users with hearing or vision

impairments and/or physical disabilities. It should be understood that although designing for the target user

population will accommodate some users with special needs, these guidelines cannot anticipate and fully

accommodate all such users.

3.4 Existing models and subsystems that meet previous versions of SEMI S8 should continue to meet the guidelines

of SEMI S8 in force at the time of design. Models with redesigns that significantly affect the ergonomic design of

the equipment should include conformance to the latest version of SEMI S8 for the redesign.

NOTE 1: Conformance with this document is believed to be a suitable substitute for conformance with its predecessors.

3.5 Conformance with the guidelines in Appendix 1 (SESC) constitutes conformance with SEMI S8.

4 Referenced Standards and Documents

4.1 SEMI Standards

SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment

4.2 CEN/CENELEC Standards

4.2.1 European Norm (EN) standards are listed herein for application to semiconductor manufacturing equipment to

be used in the European Union (EU). As EN standards are intended for use with a broad range of industrial and

consumer products, conflicts with SEMI safety guidelines are likely. Additionally, provisional EN (prEN) standards

are subject to revision prior to adoption.

EN 894-2 — Safety/Ergonomics for Displays

EN 894-3 — Safety/Ergonomics for Control Actuators

EN 60204-1 — Safety of Machinery — Electrical Equipment of Machines, Part 1. Specification for General

Requirements

4.3 Military Standard

MIL-STD-1472 — Human Engineering Design Criteria for Military Systems, Equipment, and Facilities

4.4 NFPA Standard

NFPA 79 — Electrical Standard for Industrial Machinery

4.5 ISO Standard

ISO 9241 — Ergonomic Requirements for Office Work with Visual Display Terminals

4.6 Other Standards and Documents

Humanscale, The MIT Press, Massachusetts Institute of Technology, Cambridge, MA 02142, 1974

ANSI/IES RP7

— Practice for industrial lighting

1 European committee for standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat: rue

de Stassart 35, B-1050 Brussels, Belgium, Website: www.cenelac.org

2 United States Military Standards, Available through the Naval Publications and Forms Center, 5801 Tabor Avenue, Philadelphia, PA 19120-

5099, USA. Telephone: 215.697.3321

3 National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, Website: www.nfpa.org

4 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.

Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: www.iso.ch

5 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:

202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023, Website: