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SEMI S8-0705 © SEMI 1995, 2005 3 Waters, Thomas, et. al., Application Manual for the Revised NIOSH Liftin g Equation , U.S. Departm ent of Health and Human Se rvices (NIOSH), Cinci nnati, OH, 1994. A. Mital, A.S. Nichols…
SEMI S8-0705 © SEMI 1995, 2005 2
3.3 The equipment design should incorporate reasonable accommodations for users with special needs, such as left-
handedness and color blindness. Where feasible the design should also accommodate users with hearing or vision
impairments and/or physical disabilities. It should be understood that although designing for the target user
population will accommodate some users with special needs, these guidelines cannot anticipate and fully
accommodate all such users.
3.4 Existing models and subsystems that meet previous versions of SEMI S8 should continue to meet the guidelines
of SEMI S8 in force at the time of design. Models with redesigns that significantly affect the ergonomic design of
the equipment should include conformance to the latest version of SEMI S8 for the redesign.
NOTE 1: Conformance with this document is believed to be a suitable substitute for conformance with its predecessors.
3.5 Conformance with the guidelines in Appendix 1 (SESC) constitutes conformance with SEMI S8.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment
4.2 CEN/CENELEC Standards
1
4.2.1 European Norm (EN) standards are listed herein for application to semiconductor manufacturing equipment to
be used in the European Union (EU). As EN standards are intended for use with a broad range of industrial and
consumer products, conflicts with SEMI safety guidelines are likely. Additionally, provisional EN (prEN) standards
are subject to revision prior to adoption.
EN 894-2 — Safety/Ergonomics for Displays
EN 894-3 — Safety/Ergonomics for Control Actuators
EN 60204-1 — Safety of Machinery — Electrical Equipment of Machines, Part 1. Specification for General
Requirements
4.3 Military Standard
2
MIL-STD-1472 — Human Engineering Design Criteria for Military Systems, Equipment, and Facilities
4.4 NFPA Standard
3
NFPA 79 — Electrical Standard for Industrial Machinery
4.5 ISO Standard
4
ISO 9241 — Ergonomic Requirements for Office Work with Visual Display Terminals
4.6 Other Standards and Documents
Humanscale, The MIT Press, Massachusetts Institute of Technology, Cambridge, MA 02142, 1974
ANSI/IES RP7
5
— Practice for industrial lighting
1 European committee for standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat: rue
de Stassart 35, B-1050 Brussels, Belgium, Website: www.cenelac.org
2 United States Military Standards, Available through the Naval Publications and Forms Center, 5801 Tabor Avenue, Philadelphia, PA 19120-
5099, USA. Telephone: 215.697.3321
3 National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, Website: www.nfpa.org
4 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: www.iso.ch
5 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023, Website:
www.ansi.org
SEMI S8-0705 © SEMI 1995, 2005 3
Waters, Thomas, et. al., Application Manual for the Revised NIOSH Lifting Equation, U.S. Department of Health
and Human Services (NIOSH), Cincinnati, OH, 1994.
A. Mital, A.S. Nicholson, M.M. Ayoub: A Guide to Manual Materials Handling, Taylor and Francis, London, 1993.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 MAWL — Maximum Acceptable Weight of Lift
5.1.2 MMH — Manual Material Handling
5.1.3 SESC — Supplier Ergonomics Success Criteria (See Appendix 1.)
5.2 Definitions
5.2.1 administrative controls — administrative controls modify the way in which a job is performed without
involving equipment design. They are non-engineering controls which include: job rotation, job enlargement, work-
rest scheduling, micro-breaks, and stretching exercises. Engineering controls are preferred over administrative
controls.
5.2.2 anthropometric considerations — design considerations based upon anthropometric (e.g., size and strength)
limitations of user personnel.
5.2.3 anthropometry — description of the physical measurement of humans (e.g., size, strength).
5.2.4 cognitive — relating to human information processing, perception, and attention.
5.2.5 critical controls and displays — controls and displays which prevent the equipment from entering, or indicate
that equipment is entering an unsafe condition in which hazards to personnel or damage to equipment may occur.
Emergency Off (EMO) switches, interlock defeat indicators, and malfunction alarms are examples of critical
controls and displays.
5.2.6 cumulative trauma disorder — a disorder which results from the accumulation of stresses (e.g., forces,
repetitive movements, etc.) to a body part over a period of time.
5.2.7 duration — the length of time of a cycle or the entire task, which represents the time of exposure to single or
multiple risk factors.
5.2.8 emergency off (EMO) — a control circuit which, when activated, places the equipment into a safe shutdown
condition.
5.2.9 engineering control — a method to eliminate or mitigate a hazard through equipment design.
5.2.10 ergonomic-related hazard — an equipment or workplace condition that creates stress to the user that
contributes to the risk of developing either an acute injury or a cumulative trauma disorder.
5.2.11 ergonomic issues — those issues dealing with the user’s physical and cognitive needs, capabilities, and
human performance limitations in relation to the design of machines, tasks, and other features of the human’s
working environment.
5.2.12 ergonomics — the study of human mental and physical capability in relation to the working environment and
the equipment operated by the worker.
5.2.13
excessive reach — a reach which may result in biomechanical or other stress to the user.
5.2.14 extended reach — a reach which requires either stretching, stooping, crouching, bending forward at the waist
greater than 20 degrees, or shoulder flexion or abduction greater than 45 degrees.
5.2.15 force — the mechanical effort to accomplish a specific movement or exertion. These include: static
exertions, which produce no motion but have significant duration; dynamic exertions, which are motions including
lifting, pushing, pulling; and contact stress, which is localized pressure exerted against the skin by an external force.
5.2.16 frequency — how often a task is performed over time.
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5.2.17 frequently used — used in processing or job cycle at least once every hour. Multiple tool operation by a
single operator should be considered.
5.2.18 human error — errors which include: failure to perform a required function; performing a function that has
an undesirable consequence; failure to recognize and correct a hazardous condition; or inadequate or incorrect
response to a contingency.
5.2.19 inadvertent actuation — accidental or unintentional activation or deactivation of a control.
5.2.20 infrequently used — used in processing or job cycle less frequently than once every hour. Multiple tool
operation by a single operator should be considered.
5.2.21 installation — the activities performed after the equipment is received at a user site through preparation for
initial service, including transportation, lifting, uncrating, placement, leveling, and facilities fit up.
5.2.22 lateral pinch — grip in which the object is held between the thumb and the side of the index finger (often
referred to as key grip).
5.2.23 maintenance — planned or unplanned activities intended to keep equipment in good working order.
5.2.24 mock up — a full size physical model of the equipment, generally made of relatively inexpensive materials,
used for human factors evaluation.
5.2.25 neutral posture — the position of the human body in which the joints are least stressed. Generally, the body
in its neutral position is standing erect with the eyes looking forward, and the arms hanging by the sides.
5.2.26 non-neutral (awkward) postures — The position of a joint(s) away from its neutral, or least stressed, posture.
5.2.27 normal line of sight — the line extending from the eyes, perpendicular to the interoccular line and 15 degrees
below the horizontal position of the eye.
5.2.28 operation — consists of functions by which the operator causes the equipment to perform its intended
purpose; these may include loading product and setting or manipulating external controls.
5.2.29 operator — a user that interacts with the equipment only to the degree necessary for the equipment to
perform its intended function.
5.2.30 override — to take precedence over the current control system state.
5.2.31 palmar pinch — grip where the fingers press against the palm of the hand, with the object held between the
fingers and the palm. Thumb is not used (e.g., picking up a sheet of plywood).
5.2.32 personal protective equipment (PPE) — equipment and clothing worn to reduce potential for personal injury
from hazards associated with the task to be performed (e.g., chemical gloves, respirators, safety glasses, etc.). In the
context of this document, cleanroom attire (e.g., gloves, smocks, booties, hoods) is not considered personal
protective equipment.
5.2.33 power grip — a grip in which the fingers and thumb wrap entirely around the handle such that the thumb
contacts or overlaps the index finger.
5.2.34 postural stress — stress occurring when a body position places undue load on the muscles, tendons, nerves,
and blood vessels, or produces pressure on a joint.
5.2.35 primary viewing area — the 30 degree cone around the normal line of site (15 degrees above, below, and to
either side of the line of sight).
5.2.36 problem tasks — tasks which have been defined as presenting ergonomically incorrect conditions that are
likely to cause biomechanical stresses or injury to personnel, misoperation, or damage to equipment or the product.
5.2.37 risk factors — those elements of the design which allow an increased potential for injury/illness to
personnel, or for damage to equipment, environment, or product.
5.2.38 semiconductor manufacturing equipment — equipment used in the design, development, manufacture,
assembly, measurement and test of semiconductors, and associated semiconductor support processes.
5.2.39 service — unplanned activities intended to return equipment, which has failed, to good working order.